JPS60247687A - 液晶表示素子の製造方法 - Google Patents
液晶表示素子の製造方法Info
- Publication number
- JPS60247687A JPS60247687A JP59105195A JP10519584A JPS60247687A JP S60247687 A JPS60247687 A JP S60247687A JP 59105195 A JP59105195 A JP 59105195A JP 10519584 A JP10519584 A JP 10519584A JP S60247687 A JPS60247687 A JP S60247687A
- Authority
- JP
- Japan
- Prior art keywords
- conductor
- liquid crystal
- crystal display
- display element
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004973 liquid crystal related substance Substances 0.000 title claims description 26
- 238000004519 manufacturing process Methods 0.000 title claims description 20
- 239000004020 conductor Substances 0.000 claims description 38
- 239000000758 substrate Substances 0.000 claims description 16
- 238000000034 method Methods 0.000 claims description 9
- 239000010409 thin film Substances 0.000 claims description 5
- 239000010408 film Substances 0.000 description 13
- 229920002120 photoresistant polymer Polymers 0.000 description 7
- 239000000463 material Substances 0.000 description 5
- 241000251468 Actinopterygii Species 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910003437 indium oxide Inorganic materials 0.000 description 2
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 2
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 239000012777 electrically insulating material Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 229910001936 tantalum oxide Inorganic materials 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
Landscapes
- Liquid Crystal (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59105195A JPS60247687A (ja) | 1984-05-23 | 1984-05-23 | 液晶表示素子の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59105195A JPS60247687A (ja) | 1984-05-23 | 1984-05-23 | 液晶表示素子の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60247687A true JPS60247687A (ja) | 1985-12-07 |
| JPH0476092B2 JPH0476092B2 (enrdf_load_stackoverflow) | 1992-12-02 |
Family
ID=14400884
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59105195A Granted JPS60247687A (ja) | 1984-05-23 | 1984-05-23 | 液晶表示素子の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60247687A (enrdf_load_stackoverflow) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5720779A (en) * | 1980-07-11 | 1982-02-03 | Matsushita Electric Ind Co Ltd | Image display unit |
| JPS57182779A (en) * | 1981-05-06 | 1982-11-10 | Suwa Seikosha Kk | Liquid crystal display unit |
-
1984
- 1984-05-23 JP JP59105195A patent/JPS60247687A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5720779A (en) * | 1980-07-11 | 1982-02-03 | Matsushita Electric Ind Co Ltd | Image display unit |
| JPS57182779A (en) * | 1981-05-06 | 1982-11-10 | Suwa Seikosha Kk | Liquid crystal display unit |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0476092B2 (enrdf_load_stackoverflow) | 1992-12-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |