JPS60235708A - 窒化珪素微粉末の製造方法 - Google Patents

窒化珪素微粉末の製造方法

Info

Publication number
JPS60235708A
JPS60235708A JP9135484A JP9135484A JPS60235708A JP S60235708 A JPS60235708 A JP S60235708A JP 9135484 A JP9135484 A JP 9135484A JP 9135484 A JP9135484 A JP 9135484A JP S60235708 A JPS60235708 A JP S60235708A
Authority
JP
Japan
Prior art keywords
silicon nitride
hydrogen
group
reaction
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9135484A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0454611B2 (enrdf_load_stackoverflow
Inventor
Takashi Suzuki
喬 鈴木
Takamasa Kawakami
川上　殷正
Goji Koyama
剛司 小山
Masami Orisaku
織作　正美
Hiromasa Isaki
寛正 伊崎
Rieko Nakano
里愛子 中野
Akira Mori
晃 森
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Gas Chemical Co Inc
Original Assignee
Mitsubishi Gas Chemical Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Gas Chemical Co Inc filed Critical Mitsubishi Gas Chemical Co Inc
Priority to JP9135484A priority Critical patent/JPS60235708A/ja
Priority to US06/729,751 priority patent/US4613490A/en
Priority to DE19853516589 priority patent/DE3516589A1/de
Publication of JPS60235708A publication Critical patent/JPS60235708A/ja
Publication of JPH0454611B2 publication Critical patent/JPH0454611B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ceramic Products (AREA)
JP9135484A 1984-05-08 1984-05-08 窒化珪素微粉末の製造方法 Granted JPS60235708A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP9135484A JPS60235708A (ja) 1984-05-08 1984-05-08 窒化珪素微粉末の製造方法
US06/729,751 US4613490A (en) 1984-05-08 1985-05-02 Process for preparing silicon nitride, silicon carbide or fine powdery mixture thereof
DE19853516589 DE3516589A1 (de) 1984-05-08 1985-05-08 Verfahren zur herstellung von siliciumnitrid, siliciumcarbid oder feinen, pulverfoermigen mischungen daraus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9135484A JPS60235708A (ja) 1984-05-08 1984-05-08 窒化珪素微粉末の製造方法

Publications (2)

Publication Number Publication Date
JPS60235708A true JPS60235708A (ja) 1985-11-22
JPH0454611B2 JPH0454611B2 (enrdf_load_stackoverflow) 1992-08-31

Family

ID=14024054

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9135484A Granted JPS60235708A (ja) 1984-05-08 1984-05-08 窒化珪素微粉末の製造方法

Country Status (1)

Country Link
JP (1) JPS60235708A (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60200813A (ja) * 1984-03-22 1985-10-11 Mitsubishi Gas Chem Co Inc 窒化珪素と炭化珪素との複合微粉末の製造方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60200813A (ja) * 1984-03-22 1985-10-11 Mitsubishi Gas Chem Co Inc 窒化珪素と炭化珪素との複合微粉末の製造方法

Also Published As

Publication number Publication date
JPH0454611B2 (enrdf_load_stackoverflow) 1992-08-31

Similar Documents

Publication Publication Date Title
US4428916A (en) Method of making α-silicon nitride powder
US4387079A (en) Method of manufacturing high-purity silicon nitride powder
US4619905A (en) Process for the synthesis of silicon nitride
US4613490A (en) Process for preparing silicon nitride, silicon carbide or fine powdery mixture thereof
JPS5913442B2 (ja) 高純度の型窒化珪素の製造法
US4521393A (en) Method of manufacturing β type silicon nitride whiskers
JPS6111886B2 (enrdf_load_stackoverflow)
JPS60235708A (ja) 窒化珪素微粉末の製造方法
CA2008645C (en) Process for producing sinterable crystalline aluminum nitride powder
JPS5930645B2 (ja) 高純度α型窒化珪素の製造法
JPS61127616A (ja) 炭化珪素微粉末の製造方法
JPS6111885B2 (enrdf_load_stackoverflow)
JPS6140805A (ja) 窒化珪素微粉末の製造方法
JPS61117108A (ja) 窒化珪素微粉末の製造方法
JPS60235707A (ja) 複合微粉末の製造方法
JPS6148409A (ja) けい素、炭素、窒素からなる微粉末およびその製造方法
JPS6163506A (ja) 窒化珪素微粉末の製造方法
JPH0454609B2 (enrdf_load_stackoverflow)
JP2604753B2 (ja) 炭化ケイ素ウイスカーの製造方法
JPS61247608A (ja) 窒化珪素と炭化珪素との混合微粉末の製造方法
JPS6259049B2 (enrdf_load_stackoverflow)
JPS62162610A (ja) 窒化けい素粉末の製造方法
JPS63230509A (ja) 窒化ケイ素−炭化ケイ素混合微粉末の製造法
JPH05326B2 (enrdf_load_stackoverflow)
JPS60131899A (ja) 炭化ケイ素ウイスカ−の製造方法