JPS60235074A - Contact piece of ic inspection apparatus - Google Patents
Contact piece of ic inspection apparatusInfo
- Publication number
- JPS60235074A JPS60235074A JP59092392A JP9239284A JPS60235074A JP S60235074 A JPS60235074 A JP S60235074A JP 59092392 A JP59092392 A JP 59092392A JP 9239284 A JP9239284 A JP 9239284A JP S60235074 A JPS60235074 A JP S60235074A
- Authority
- JP
- Japan
- Prior art keywords
- contact
- terminal
- inspection apparatus
- testing device
- durability
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【発明の詳細な説明】
〔発明の技術分野〕
この発明はIC1すなわち、集積回路素子の特性を検査
する検査装置に関するものであり、特に、rcの端子へ
検査信号を通電する検査用接触子の改善に関する。DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to an inspection device for inspecting the characteristics of an IC1, that is, an integrated circuit element. Regarding improvement.
従来、ICの検査装置は斜め下向きに突出した対向する
左右一対の接触子の間にICを挿入し、ICの長方形本
体の左右側面からコ字形に突出した端子と前記接触子と
を接触させ、検査信号を送って特性を検査するようにな
っている。すなわち、ICは上方から左右の接触子間に
給送され、両接触子間に挟持された状態で、約2秒間の
短い時間サイクルで検査され、直ちに下方へ落下させる
ものである。よって、接触子と端子とは可及的に少ない
接触抵抗で接することが必要である一方、接触子には優
れたばね特性と耐摩耗性が要求される。Conventionally, an IC inspection device inserts an IC between a pair of opposing left and right contacts that protrude diagonally downward, and brings the contacts into contact with terminals that protrude in a U-shape from the left and right sides of a rectangular body of the IC. The characteristics are tested by sending test signals. That is, the IC is fed from above between the left and right contacts, inspected in a short time cycle of about 2 seconds while being held between both contacts, and immediately dropped downward. Therefore, it is necessary that the contact and the terminal come into contact with each other with as little contact resistance as possible, while the contact is required to have excellent spring characteristics and wear resistance.
斯る目的を達するためには、接触子には硬質且つ導電性
の優れたニッケル・ボロン系のメッキを施すのが好まし
いが、メッキに際し接触子のIC端子に接触する隅角に
硬質物質が析出して、硬質の鋭角を構成するので(第2
図参照)、浸漬メッキを施したICの端子に擦過傷を与
える不具合を生じる。In order to achieve this purpose, it is preferable to plate the contact with nickel-boron, which is hard and has excellent conductivity. and constitutes a hard acute angle (second
(see figure), which causes scratches on the terminals of ICs that have been immersed in immersion plating.
この発明は上記不具合を解決することを目的とするもの
であり、略直方体の本体の左右側面からコ字形に突出し
たICの端子を左右の接触子で挟持して、通電検査する
IC検査装置において、前記端子に対する接触子の接触
端を小半径の円弧状に面取りすると共に、その外面に硬
質の導電性メッキを施した点に特徴がある。The present invention aims to solve the above-mentioned problems, and is directed to an IC testing device that conducts a current conduction test by holding IC terminals protruding in a U-shape from the left and right sides of a substantially rectangular parallelepiped body between left and right contacts. , is characterized in that the contact end of the contact element with respect to the terminal is chamfered into a circular arc shape with a small radius, and the outer surface thereof is coated with hard conductive plating.
以下、図示の実施例によって、この発明を説明する。図
中1はとの発明に係るIC検査装置である。IC検査装
N1は左右一対の支持枠2.2によって支持されたばね
材からなる接触子3.3が斜め下向きに対向して支持さ
れている。4は電線5を通じて接触子3.3に接続され
た検査装置の本体であり、ICの合否を判断する中央演
算装置である。The present invention will be explained below with reference to illustrated embodiments. 1 in the figure is an IC testing device according to the invention. In the IC testing device N1, contacts 3.3 made of a spring material are supported by a pair of left and right support frames 2.2 and are supported diagonally downward and facing each other. 4 is the main body of the inspection device connected to the contactor 3.3 through the electric wire 5, and is a central processing unit that determines whether the IC is acceptable or not.
6は被検査物たるICであり、略直方体をなす本体6a
の左右側面からコ字形に突出した多数の端子6bを有す
る。なお、通常、ICの端子にはハングメッキが施しで
ある。Reference numeral 6 indicates an IC to be inspected, and a main body 6a having a substantially rectangular parallelepiped shape.
It has a large number of terminals 6b protruding from the left and right side surfaces in a U-shape. Note that hang plating is usually applied to the terminals of the IC.
第2図、第3図は検査状態における接触子3と端子6b
との接触状況を示す。すなわち、接触子3は約0.2〜
0.3鶴の板厚を有するベリリウム銅製であり、縁の部
分が端子6bの外面に斜めに接触している。こ\で、第
2図に示す従来の接触子3の先6mAは略直角に切断さ
れており、面取りなどの処理は施されていない。Figures 2 and 3 show the contactor 3 and the terminal 6b in the inspection state.
Indicates contact status with. That is, the contactor 3 is about 0.2~
It is made of beryllium copper with a thickness of 0.3 mm, and the edge portion is in diagonal contact with the outer surface of the terminal 6b. Here, the tip 6mA of the conventional contactor 3 shown in FIG. 2 is cut at a substantially right angle and is not subjected to any treatment such as chamfering.
第3図で示すこの発明に係る接触子3の先端Aには、第
5図山)で示す工程によって、外側に向かう半径約0.
1fiの円弧状面取りが施される。すなわち、従来と同
様にして製作された接触子3をプレス成形によるか、逆
電解して隅角部を除去し、外側に凸の円弧状面取りがな
される。次いで、外面に硬質、且つ良好な導電特性を持
つニッケル・ボロン系のメッキを約10ミクロン程度の
厚さに施し、硬度をメッキ前のヴイッカース320から
ヴイソカース500まで高めた後、それを不活性ガス雰
囲気中で約500℃まで加熱し、母材を時効硬化させて
所望のばね特性を得ている。The tip A of the contactor 3 according to the present invention shown in FIG. 3 has an outward radius of approximately 0.
A 1fi arc-shaped chamfer is applied. That is, the contactor 3 manufactured in the same manner as in the prior art is press-molded or reverse electrolyzed to remove the corner portion, and a convex arcuate chamfer is formed on the outside. Next, the outer surface is plated with nickel-boron, which is hard and has good conductive properties, to a thickness of about 10 microns, increasing the hardness from Vickers 320 before plating to Vickers 500, and then plating it with an inert gas. The base material is heated to about 500° C. in an atmosphere to age harden it to obtain the desired spring characteristics.
斯くて、第4図で示すように、接触抵抗が従来の平均2
4ミリオーム(mΩ)から16mΩに低下した。また、
使用開始後、減摩により使用不能に至った状態、すなわ
ち寿命が尽きるまでの使用回数も、35万回から150
万回に向上し、耐久性の向上が確認された。これによっ
て、24時間の自動運転が可能となった。Therefore, as shown in Figure 4, the contact resistance is lower than the conventional average of 2.
The resistance decreased from 4 milliohms (mΩ) to 16 mΩ. Also,
After the start of use, the number of uses until it becomes unusable due to reduced friction, that is, until the end of its life, is from 350,000 to 150 times.
10,000 times, confirming improved durability. This has enabled 24-hour automatic operation.
この発明のIC検査装置の接触子は、以上のように、被
検査物たるICの端子を挟持する左右の接触子の、IC
の端子に対する接触端を小半径の円弧状に面取りすると
共に、その外面に硬質の導電性メッキを施したものであ
るから、接触子の表面に硬質メッキを施したにも拘わら
ず、その隅角部に鋭角を生しることがないので、ICの
端子を傷付けることがない上、接触子の損耗を軽減し、
装置の耐久性を著しく高めることができる。また、IC
と接触子との接触面積を大きくなり、所望の通電が安定
して行える接触面積が得られるので接触抵抗による電力
損失が減じ、検査を正確に行うことが出来る等、検査装
置の改良として種々の効果を有する。As described above, the contacts of the IC testing device of the present invention are configured to
The contact end for the terminal is chamfered into a small radius arc, and the outer surface is coated with hard conductive plating, so even though the contact surface is hard plated, the corner angle Since there are no sharp angles on the parts, it does not damage the IC terminals, and reduces wear and tear on the contacts.
The durability of the device can be significantly increased. Also, IC
By increasing the contact area between the contactor and the contactor, a contact area that can stably conduct the desired current is obtained, reducing power loss due to contact resistance and making it possible to perform inspections accurately. have an effect.
図面はこの発明の一実施例を示すものであり、第1図は
検査装置を示す系統図、第2図、第3図は検査装置の接
触子を示すものであり、前者は従来例を、後者は本発明
を示す。第4図は接触抵抗を示すグラフ、第5図は加工
工程を示す工程図である。
1・・・・・・IC検査装置、 3・・・・・・接触子
、6・・・・・・被検査物たるIC16b・・・・・・
端子、特許出嘩人 やまと興業株式会社The drawings show an embodiment of the present invention; FIG. 1 is a system diagram showing an inspection device, and FIGS. 2 and 3 show contacts of the inspection device; the former shows a conventional example; The latter represents the invention. FIG. 4 is a graph showing the contact resistance, and FIG. 5 is a process diagram showing the processing steps. 1... IC inspection device, 3... Contact, 6... IC16b as the object to be inspected...
Terminal, patent originator Yamato Kogyo Co., Ltd.
Claims (1)
たICの端子を左右の接触子で挟持して、通電検査する
IC検査装置において、前記端子に対する接触子の接触
端を小半径の円弧状に面取りすると共に、その外面に硬
質の導電性メッキを施してなるIC検査装置の接触子。 (2)硬質の導電性メッキはニッケル・ボロン系である
特許請求の範囲第1項記載のIC検査装置の接触子。[Scope of Claims] +1) In an IC testing device that conducts a current conduction test by holding an IC terminal protruding in a U-shape from the left and right side surfaces of a substantially rectangular parallelepiped body between left and right contacts, the contact end of the contact with respect to the terminal is provided. A contact for an IC testing device, which is chamfered into a small radius arc shape and is coated with hard conductive plating on its outer surface. (2) A contact for an IC testing device according to claim 1, wherein the hard conductive plating is nickel-boron based.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59092392A JPS60235074A (en) | 1984-05-08 | 1984-05-08 | Contact piece of ic inspection apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59092392A JPS60235074A (en) | 1984-05-08 | 1984-05-08 | Contact piece of ic inspection apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS60235074A true JPS60235074A (en) | 1985-11-21 |
Family
ID=14053143
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP59092392A Pending JPS60235074A (en) | 1984-05-08 | 1984-05-08 | Contact piece of ic inspection apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60235074A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01184477A (en) * | 1988-01-18 | 1989-07-24 | Hitachi Ltd | Probe head for semiconductor lsi inspecting device and its manufacture |
JP2017036993A (en) * | 2015-08-10 | 2017-02-16 | 新電元工業株式会社 | Connection jig and electrification test method of semiconductor device |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS511075A (en) * | 1974-06-21 | 1976-01-07 | Hitachi Ltd | Ic nokensasokuteisochi |
-
1984
- 1984-05-08 JP JP59092392A patent/JPS60235074A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS511075A (en) * | 1974-06-21 | 1976-01-07 | Hitachi Ltd | Ic nokensasokuteisochi |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01184477A (en) * | 1988-01-18 | 1989-07-24 | Hitachi Ltd | Probe head for semiconductor lsi inspecting device and its manufacture |
JPH0810246B2 (en) * | 1988-01-18 | 1996-01-31 | 株式会社日立製作所 | Method for manufacturing probe head for semiconductor LSI inspection device |
JP2017036993A (en) * | 2015-08-10 | 2017-02-16 | 新電元工業株式会社 | Connection jig and electrification test method of semiconductor device |
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