JPS60234335A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS60234335A
JPS60234335A JP59091213A JP9121384A JPS60234335A JP S60234335 A JPS60234335 A JP S60234335A JP 59091213 A JP59091213 A JP 59091213A JP 9121384 A JP9121384 A JP 9121384A JP S60234335 A JPS60234335 A JP S60234335A
Authority
JP
Japan
Prior art keywords
chip
bonding
inner lead
lead frame
pad
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP59091213A
Other languages
Japanese (ja)
Inventor
Masashi Nagase
永瀬 政志
Hiroshi Kishimoto
浩 岸本
Kazuo Yasunobu
保延 和男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Toshiba Electronic Device Solutions Corp
Original Assignee
Toshiba Corp
Toshiba Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Toshiba Microelectronics Corp filed Critical Toshiba Corp
Priority to JP59091213A priority Critical patent/JPS60234335A/en
Publication of JPS60234335A publication Critical patent/JPS60234335A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/42Wire connectors; Manufacturing methods related thereto
    • H01L24/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L24/49Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02Bonding areas; Manufacturing methods related thereto
    • H01L2224/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/05Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • H01L2224/0554External layer
    • H01L2224/0555Shape
    • H01L2224/05552Shape in top view
    • H01L2224/05554Shape in top view being square
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H01L2224/491Disposition
    • H01L2224/49105Connecting at different heights
    • H01L2224/49109Connecting at different heights outside the semiconductor or solid-state body
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H01L2224/491Disposition
    • H01L2224/4911Disposition the connectors being bonded to at least one common bonding area, e.g. daisy chain
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H01L2224/491Disposition
    • H01L2224/4912Layout
    • H01L2224/49171Fan-out arrangements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H01L2224/494Connecting portions
    • H01L2224/4943Connecting portions the connecting portions being staggered
    • H01L2224/49433Connecting portions the connecting portions being staggered outside the semiconductor or solid-state body
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01033Arsenic [As]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01082Lead [Pb]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/19Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
    • H01L2924/191Disposition
    • H01L2924/19101Disposition of discrete passive components
    • H01L2924/19107Disposition of discrete passive components off-chip wires

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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Wire Bonding (AREA)

Abstract

PURPOSE:To obtain a highly integrated semiconductor device having small electrostatic capacitance by a method wherein a connecting pad is provided between the corner parts of a chip and an inner lead frame, and the short-circuit generating between wires is prevented by reducing the length of a bonding wire. CONSTITUTION:A connecting pad 15 provided between the corner parts of a chip 11 and an inner lead frame 14, and the connection of the first bonding pad 12 of the corner part of the chip 11 and the second bonding pad 13 of the corner part of the inner lead frame 14 is performed through the intermediary of said connecting pad 15. As a result, the length of a bonding wire 16 at the corner part can be made shorter, and an IC package to correspond with the formation of multipins can be obtained without enlarging the package.

Description

【発明の詳細な説明】 〔発明の技術的背景〕 本発明は、チップとインナリードとの接続に改良を加え
た半導体装置に関する。
DETAILED DESCRIPTION OF THE INVENTION [Technical Background of the Invention] The present invention relates to a semiconductor device in which the connection between a chip and an inner lead is improved.

〔発明の技術的背景とその問題点〕[Technical background of the invention and its problems]

従来、半導体装置としては、第1図(a)、(b)に示
すものが知られている。なお、同図(a)は平面図、同
図(’ b )は同図(a)を部分的に拡大した平面図
である。
2. Description of the Related Art Conventionally, semiconductor devices shown in FIGS. 1(a) and 1(b) are known. It should be noted that FIG. 5A is a plan view, and FIG. 1B is a partially enlarged plan view of FIG.

図中の1は、縁部に複数の第1のポンディングパッド2
・・・を設けたチップである。このチップ1の周囲には
、先端が第2のポンディングパッド3・・・になってい
るインナーリード4・・・が設けられている。なお、こ
れらインナーリードフレーム4・・・を総称してインナ
ーリードフレームど呼ぶ。前記第1のポンディングパッ
ド2・・・と第2のポンディングパッド3・・・は、夫
々ボンディングワイヤ5・・・によって接続されている
1 in the figure indicates a plurality of first bonding pads 2 on the edge.
It is a chip equipped with... Around this chip 1, inner leads 4 are provided, the tips of which become second bonding pads 3. Note that these inner lead frames 4 are collectively referred to as an inner lead frame. The first bonding pads 2 and the second bonding pads 3 are connected by bonding wires 5, respectively.

しかるに、現在、ICの集積化が進み、多ビン化の傾向
が強くなっており、多ビン化に対応したICパッケージ
が必要とされている。しかしながら、従来技術で多ビン
化に対応すると、多ピンに見合うインナーリードの数を
確保するために、パッケージが大型化したり、インナー
リードの線幅が微細化したり、あるいは第2図に示す如
くインナーリードが階段状に設【プられたすする。この
ため、種々の問題が生じる。即ち、パッケージの大型化
は、ICの特徴である小形化の意ME失わせたり、入出
力ピンの静電容量を増加させてダイナミックの電気特性
を劣化させたり、あるいはホンディングワイヤ5を長く
させてワイヤ間の短絡を生じさせたりする。前記インナ
ルリードの線幅の微細化は、マシーンの精度を要求し、
マシーン自体のコスト高をもたらす。
However, as ICs are currently becoming more integrated, there is a growing trend toward multi-bin packaging, and there is a need for IC packages that can accommodate multiple bins. However, when conventional technology is used to support the increase in the number of bins, in order to secure the number of inner leads commensurate with the number of pins, the package becomes larger, the line width of the inner leads becomes finer, or as shown in Fig. The reeds are set up in a stepped manner. This causes various problems. In other words, increasing the size of the package may cause the user to lose the desire for miniaturization, which is a characteristic of ICs, may increase the capacitance of input/output pins and deteriorate the dynamic electrical characteristics, or may cause the wire 5 to become longer. This can cause short circuits between wires. The miniaturization of the line width of the inner lead requires high precision of the machine,
This results in higher costs for the machine itself.

〔発明の目的〕[Purpose of the invention]

本発明は、上記事情に鑑みてなされたもので、ボンディ
ングワイヤの長さを従来と比べて短くしてワイヤ間の短
絡を防止するとともに、低コスト、高集積度で静電容量
の小さい半導体装置を提供することを目的とするもので
ある。
The present invention has been made in view of the above circumstances, and it is possible to prevent a short circuit between the wires by making the length of the bonding wire shorter than that of the conventional one, and to provide a low-cost, highly integrated semiconductor device with small capacitance. The purpose is to provide the following.

〔発明の概要〕[Summary of the invention]

本発明は、少なくともチップとインナーリードフレーム
の夫々のコーナ一部間に中継用パッドを設け、第1のポ
ンディングパッド、中継用パッド間、及び中継用パッド
、第2のボンティングパット間に夫々ホンディングヮイ
Vを設【ノることによって、前述した種々の目的を達成
しようとしたものである。
The present invention provides a relay pad between at least a portion of each corner of the chip and the inner lead frame, and provides bonding pads between the first bonding pad and the relay pad, and between the relay pad and the second bonding pad, respectively. By setting up the Honda Motor Vehicle V, we attempted to achieve the various objectives mentioned above.

(発明の実施例) 以下、本発明の一実施例を第3図を参照して説明する。(Example of the invention) An embodiment of the present invention will be described below with reference to FIG.

図中の11は、チップである。このチップ11の縁部に
は、複数の第1のポンディングパッド12・・・が設け
られている。これらパッド12・・・の間隔は、チップ
11の台片の中央部からコーナーに近ずくにつれて広く
なっている。前記デツプ11の周囲には、該チップ11
から離間して複数の第2のポンディングパッド13・・
・を有したインナーリード14・・・が設けられている
。なお、これらインナーリード14・・・を総称してイ
ンナーリードフレームと呼ぶ。前記パッド13・・・は
、夫々デツプ11の台片に対して2列で千鳥状に配列さ
れている。前記デツプ11とインナーリードフレームの
夫々のコーナ一部間には、中継用バンド15・・・が設
けられている。前記第1のホンディングバッド12・・
・と中継用バラl’ 15・・・間、及びこれら中幇用
パッド15・・・と第2のホンディングバット13間に
は、夫々複数のボンディングワイヤ16・・・がコーナ
一部から順に設けられている。また、チップ11の台片
の中央部及びその付近の第1のポンディングパッド12
・・・とこれに近い第2のポンディングパッド13・・
・は、別のボンディングワイヤ17・・・によって直接
接続されている。
11 in the figure is a chip. A plurality of first bonding pads 12 . . . are provided on the edge of this chip 11 . The spacing between these pads 12 . . . becomes wider from the center of the base piece of the chip 11 toward the corners. Around the depth 11, the chip 11
A plurality of second pounding pads 13 are spaced apart from each other.
An inner lead 14 having an inner lead 14 is provided. Note that these inner leads 14 are collectively referred to as an inner lead frame. The pads 13 are arranged in two rows in a staggered manner with respect to the base of the depth 11, respectively. A relay band 15 is provided between the depth 11 and a portion of each corner of the inner lead frame. Said first homing pad 12...
A plurality of bonding wires 16 are connected between the intermediate pads 15 and the second bonding butts 13, starting from a part of the corner. It is provided. In addition, the first bonding pad 12 is located in the center of the base piece of the chip 11 and in the vicinity thereof.
...and a second pounding pad 13 similar to this...
* are directly connected by another bonding wire 17...

しかして、本発明によれば、チップ11とインナーリー
ドフレームの夫々のコーナ一部間に中継用バッド15・
・・を設け、この中継用バッド15・・・を介してチッ
プ11のコーナ一部の第1のボンデ−(ングバット12
・・・と、インナーリードフレームのコーナ一部の第2
のボンディングバラ1−13・・・の接続を行なうため
、従来と比べ、コーナ一部でのホンディングワイヤ16
・・・の長さを短かくてきる。従って、従来パッケージ
の大型化に起因して生じたボンディングワイヤ間の短絡
を回避できる。
According to the present invention, the relay pad 15 is provided between the chip 11 and a portion of each corner of the inner lead frame.
... is provided, and a first bonding butt 12 is connected to a part of the corner of the chip 11 via the relay pad 15...
...and the second part of the corner of the inner lead frame.
In order to connect the bonding roses 1-13..., the bonding wires 16 at some corners are
... shorten the length. Therefore, it is possible to avoid short circuits between bonding wires that have conventionally occurred due to the increase in size of packages.

また、上記と同様な理由により、パッケージの大型化を
せずに、多ビン化に対応したICパッケージが得られる
ため、素子を高集積度化できるとともに、静電容量が増
加してダイナミックな電気的特性が劣化することもなく
、しかもコストを低減できる。更に、インナーリード1
4・・・の第2のボンディングフレーム13・・・が2
列に配列されているため、第2のボンディングバット1
3・・・の数を一層増やすことかでき、素子の高集積化
を促進できる。
In addition, for the same reason as above, an IC package that can accommodate multiple bins can be obtained without increasing the size of the package, allowing for higher integration of elements and increasing capacitance to enable dynamic electrical There is no deterioration in physical characteristics, and costs can be reduced. Furthermore, inner lead 1
The second bonding frame 13 of 4... is 2
Because they are arranged in rows, the second bonding butt 1
3... can be further increased, and higher integration of elements can be promoted.

なお、本発明に係る半導体装置は、上記実施例のものに
限らず、例えば、第4図に示す如く、中継用パッド21
・・・をチップ11の各月に対して夫々平行に設けた構
造のものでもよい。なお、図中の22・・・はボンディ
ングワイヤを示″g。ここで、第2のボンディングフレ
ームの間隔を、インナーリードフレームの各月の中央部
からコーナーに近ずくにつれて広くすれば、ボンディン
グ間の短絡を一層防止できる。
It should be noted that the semiconductor device according to the present invention is not limited to the above-mentioned embodiment, and for example, as shown in FIG.
... may be provided in parallel to each month of the chip 11. Note that 22... in the figure indicates bonding wires. Here, if the interval between the second bonding frames is increased from the center of each month of the inner lead frame to the corner, the bonding distance can be increased. Short circuits can be further prevented.

また、上記実施例では、中継用パッドの形状を略一様に
形成したが、これに限らず、例えば図示しないが、ボン
ディングワイヤと接続する部分のみ太くなった形状のも
のでもよい。このような形状にすることにより、中継用
パッドとこのパッド下のグランド用又は信号用配線との
容量を小さくすることができる。
Further, in the above embodiment, the shape of the relay pad is formed to be substantially uniform, but the shape is not limited to this, and, for example, although not shown, it may have a shape in which only the portion connected to the bonding wire is thickened. By adopting such a shape, the capacitance between the relay pad and the ground or signal wiring under the pad can be reduced.

〔発明の効果〕〔Effect of the invention〕

以上詳述した如く本発明によれば、同一チップに対して
多ビン化が実現でき、ボンティングワイヤ間の短絡を防
止するとともに、コスト低減、高集積度化でき−かつ静
電容量の小さい半導体装置を提供できる。
As detailed above, according to the present invention, multiple bins can be realized on the same chip, short circuits between bonding wires can be prevented, costs can be reduced, high integration can be achieved, and semiconductors with small capacitance can be realized. equipment can be provided.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図(a)は従来の半導体装置の平面図、同図(b)
は同図(a)の部分拡大平面図、第2図は従来の他の半
導体装置の概略斜視図、第3図は本発明の一実施例に係
る半導体装置の平面図、第4図は本発明の他の実施例に
係る半導体装置の平面図である。 11・・・チップ、12.13・・・ポンディングパッ
ド、14・・・インナーリードフレーム、15.21・
・・中継用パラ1−116.17.22・・・ボンディ
ングワイヤ。 出願人代理人 弁理士 鈴江武彦 第1図(a) (b) 第2図 第3図
FIG. 1(a) is a plan view of a conventional semiconductor device, and FIG. 1(b) is a plan view of a conventional semiconductor device.
2 is a schematic perspective view of another conventional semiconductor device, FIG. 3 is a plan view of a semiconductor device according to an embodiment of the present invention, and FIG. 4 is a partially enlarged plan view of FIG. FIG. 7 is a plan view of a semiconductor device according to another embodiment of the invention. 11... Chip, 12.13... Bonding pad, 14... Inner lead frame, 15.21.
...Relay Para 1-116.17.22...Bonding wire. Applicant's agent Patent attorney Takehiko Suzue Figure 1 (a) (b) Figure 2 Figure 3

Claims (4)

【特許請求の範囲】[Claims] (1)、複数の第当ンデイングパツドを設けたチップと
、このチップの周囲に配設された複数の第2のポンディ
ングパッドを有したインナーリードフレームと、少なく
とも前記チップとインナーリードフレームの夫々のコー
ナ一部間に設けられた中継用パッドと、第1のポンディ
ングパッド、中継用パッド間、及び中継用パッド、第2
のポンティングパッド間に夫々設けられたボンディング
ワイヤとを具備することを特徴とする半導体装置。
(1) A chip provided with a plurality of first bonding pads, an inner lead frame having a plurality of second bonding pads arranged around the chip, and at least each of the chip and the inner lead frame. Between the relay pad provided in one corner, the first bonding pad, the relay pad, and the relay pad, the second
and bonding wires provided between the respective ponting pads of the semiconductor device.
(2)、インナーリードフレームの第2のポンディング
パッドを複列化したことを特徴とする特許請求の範囲第
1項記載の半導体装置。
(2) The semiconductor device according to claim 1, characterized in that the second bonding pads of the inner lead frame are arranged in double rows.
(3)、チップの第1のポンディングパッドの間隔を、
チップの多片の中央部からコーナーに近ずくにつれて広
くすることを特徴とする特許請求の範囲第1項記載の半
導体装置。
(3), the distance between the first bonding pads of the chip is
2. The semiconductor device according to claim 1, wherein the width increases from the center of each of the multiple pieces of the chip toward the corners.
(4)、インナーリードフレームの第2のポンディング
パッドの間隔を、インナーリードフレームの多片の中央
部からコーナーに近ずくにつれて広くすることを特徴と
する特許請求の範囲第1項記載の半導体装置。
(4) The semiconductor according to claim 1, wherein the distance between the second bonding pads of the inner lead frame is increased from the center of the multiple pieces of the inner lead frame to the corners thereof. Device.
JP59091213A 1984-05-08 1984-05-08 Semiconductor device Pending JPS60234335A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59091213A JPS60234335A (en) 1984-05-08 1984-05-08 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59091213A JPS60234335A (en) 1984-05-08 1984-05-08 Semiconductor device

Publications (1)

Publication Number Publication Date
JPS60234335A true JPS60234335A (en) 1985-11-21

Family

ID=14020140

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59091213A Pending JPS60234335A (en) 1984-05-08 1984-05-08 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS60234335A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63224335A (en) * 1987-03-13 1988-09-19 Sharp Corp Semiconductor integrated circuit device
JPH0249133U (en) * 1988-09-29 1990-04-05
US5309016A (en) * 1991-05-30 1994-05-03 Fujitsu Limited Semiconductor integrated circuit device having terminal members provided between semiconductor element and leads
WO2001020669A3 (en) * 1999-09-16 2001-10-04 Koninkl Philips Electronics Nv Use of additional bonding finger rows to improve wire bond density

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63224335A (en) * 1987-03-13 1988-09-19 Sharp Corp Semiconductor integrated circuit device
JPH057865B2 (en) * 1987-03-13 1993-01-29 Sharp Kk
JPH0249133U (en) * 1988-09-29 1990-04-05
US5309016A (en) * 1991-05-30 1994-05-03 Fujitsu Limited Semiconductor integrated circuit device having terminal members provided between semiconductor element and leads
US5361970A (en) * 1991-05-30 1994-11-08 Fujitsu Limited Method of producing a semiconductor integrated circuit device having terminal members provided between semiconductor element and leads
WO2001020669A3 (en) * 1999-09-16 2001-10-04 Koninkl Philips Electronics Nv Use of additional bonding finger rows to improve wire bond density

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