JPS6022833U - 半導体製造装置 - Google Patents

半導体製造装置

Info

Publication number
JPS6022833U
JPS6022833U JP11409083U JP11409083U JPS6022833U JP S6022833 U JPS6022833 U JP S6022833U JP 11409083 U JP11409083 U JP 11409083U JP 11409083 U JP11409083 U JP 11409083U JP S6022833 U JPS6022833 U JP S6022833U
Authority
JP
Japan
Prior art keywords
semiconductor manufacturing
manufacturing equipment
holding member
chemical solution
semiconductor wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11409083U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0119392Y2 (Direct
Inventor
池田　準一
Original Assignee
関西日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 関西日本電気株式会社 filed Critical 関西日本電気株式会社
Priority to JP11409083U priority Critical patent/JPS6022833U/ja
Publication of JPS6022833U publication Critical patent/JPS6022833U/ja
Application granted granted Critical
Publication of JPH0119392Y2 publication Critical patent/JPH0119392Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP11409083U 1983-07-21 1983-07-21 半導体製造装置 Granted JPS6022833U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11409083U JPS6022833U (ja) 1983-07-21 1983-07-21 半導体製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11409083U JPS6022833U (ja) 1983-07-21 1983-07-21 半導体製造装置

Publications (2)

Publication Number Publication Date
JPS6022833U true JPS6022833U (ja) 1985-02-16
JPH0119392Y2 JPH0119392Y2 (Direct) 1989-06-05

Family

ID=30263862

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11409083U Granted JPS6022833U (ja) 1983-07-21 1983-07-21 半導体製造装置

Country Status (1)

Country Link
JP (1) JPS6022833U (Direct)

Also Published As

Publication number Publication date
JPH0119392Y2 (Direct) 1989-06-05

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