JPH0119392Y2 - - Google Patents
Info
- Publication number
- JPH0119392Y2 JPH0119392Y2 JP11409083U JP11409083U JPH0119392Y2 JP H0119392 Y2 JPH0119392 Y2 JP H0119392Y2 JP 11409083 U JP11409083 U JP 11409083U JP 11409083 U JP11409083 U JP 11409083U JP H0119392 Y2 JPH0119392 Y2 JP H0119392Y2
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- holding member
- liquid tank
- chemical
- chemical solution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007788 liquid Substances 0.000 claims description 48
- 239000000126 substance Substances 0.000 claims description 43
- 239000004065 semiconductor Substances 0.000 claims description 40
- 235000012431 wafers Nutrition 0.000 claims description 27
- 238000004519 manufacturing process Methods 0.000 claims description 12
- 239000012530 fluid Substances 0.000 claims description 4
- 238000012545 processing Methods 0.000 description 18
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 12
- 238000005530 etching Methods 0.000 description 11
- 238000000034 method Methods 0.000 description 9
- 238000012993 chemical processing Methods 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 229910052814 silicon oxide Inorganic materials 0.000 description 4
- 238000003756 stirring Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 230000006903 response to temperature Effects 0.000 description 1
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11409083U JPS6022833U (ja) | 1983-07-21 | 1983-07-21 | 半導体製造装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11409083U JPS6022833U (ja) | 1983-07-21 | 1983-07-21 | 半導体製造装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6022833U JPS6022833U (ja) | 1985-02-16 |
| JPH0119392Y2 true JPH0119392Y2 (Direct) | 1989-06-05 |
Family
ID=30263862
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11409083U Granted JPS6022833U (ja) | 1983-07-21 | 1983-07-21 | 半導体製造装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6022833U (Direct) |
-
1983
- 1983-07-21 JP JP11409083U patent/JPS6022833U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6022833U (ja) | 1985-02-16 |
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