JPS60215599A - 化合物半導体単結晶の製造方法 - Google Patents
化合物半導体単結晶の製造方法Info
- Publication number
- JPS60215599A JPS60215599A JP6969784A JP6969784A JPS60215599A JP S60215599 A JPS60215599 A JP S60215599A JP 6969784 A JP6969784 A JP 6969784A JP 6969784 A JP6969784 A JP 6969784A JP S60215599 A JPS60215599 A JP S60215599A
- Authority
- JP
- Japan
- Prior art keywords
- compound
- single crystal
- temperature
- compound semiconductor
- furnace
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013078 crystal Substances 0.000 title claims description 30
- 150000001875 compounds Chemical class 0.000 title claims description 23
- 239000004065 semiconductor Substances 0.000 title claims description 10
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 238000001816 cooling Methods 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 11
- 238000002425 crystallisation Methods 0.000 claims description 4
- 230000008025 crystallization Effects 0.000 claims description 4
- 238000010494 dissociation reaction Methods 0.000 claims description 4
- 230000005593 dissociations Effects 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims description 3
- 238000002844 melting Methods 0.000 claims description 2
- 230000008018 melting Effects 0.000 claims description 2
- 230000002687 intercalation Effects 0.000 claims 1
- 238000009830 intercalation Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 description 8
- 238000006243 chemical reaction Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 230000002250 progressing effect Effects 0.000 description 2
- 241000257465 Echinoidea Species 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
- C30B11/003—Heating or cooling of the melt or the crystallised material
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6969784A JPS60215599A (ja) | 1984-04-06 | 1984-04-06 | 化合物半導体単結晶の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6969784A JPS60215599A (ja) | 1984-04-06 | 1984-04-06 | 化合物半導体単結晶の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60215599A true JPS60215599A (ja) | 1985-10-28 |
| JPH0343236B2 JPH0343236B2 (enrdf_load_stackoverflow) | 1991-07-01 |
Family
ID=13410307
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6969784A Granted JPS60215599A (ja) | 1984-04-06 | 1984-04-06 | 化合物半導体単結晶の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60215599A (enrdf_load_stackoverflow) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49115768A (enrdf_load_stackoverflow) * | 1973-03-08 | 1974-11-05 | ||
| JPS5632272A (en) * | 1979-08-22 | 1981-04-01 | Nat Marine Plastic | Transporting bag |
-
1984
- 1984-04-06 JP JP6969784A patent/JPS60215599A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49115768A (enrdf_load_stackoverflow) * | 1973-03-08 | 1974-11-05 | ||
| JPS5632272A (en) * | 1979-08-22 | 1981-04-01 | Nat Marine Plastic | Transporting bag |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0343236B2 (enrdf_load_stackoverflow) | 1991-07-01 |
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