JPS60213754A - 清浄保持必要物運搬方法 - Google Patents
清浄保持必要物運搬方法Info
- Publication number
- JPS60213754A JPS60213754A JP7140784A JP7140784A JPS60213754A JP S60213754 A JPS60213754 A JP S60213754A JP 7140784 A JP7140784 A JP 7140784A JP 7140784 A JP7140784 A JP 7140784A JP S60213754 A JPS60213754 A JP S60213754A
- Authority
- JP
- Japan
- Prior art keywords
- clean
- room
- clean room
- pressure
- entrance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 claims abstract description 6
- 230000006854 communication Effects 0.000 claims description 20
- 238000004891 communication Methods 0.000 claims description 19
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 239000000428 dust Substances 0.000 abstract description 11
- 230000009545 invasion Effects 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 10
- 230000003749 cleanliness Effects 0.000 description 8
- 238000011109 contamination Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 4
- 238000004806 packaging method and process Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 235000013305 food Nutrition 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 238000007664 blowing Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 229940079593 drug Drugs 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 210000003127 knee Anatomy 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000005022 packaging material Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000010186 staining Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Ventilation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7140784A JPS60213754A (ja) | 1984-04-09 | 1984-04-09 | 清浄保持必要物運搬方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7140784A JPS60213754A (ja) | 1984-04-09 | 1984-04-09 | 清浄保持必要物運搬方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60213754A true JPS60213754A (ja) | 1985-10-26 |
JPH0332697B2 JPH0332697B2 (enrdf_load_stackoverflow) | 1991-05-14 |
Family
ID=13459628
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7140784A Granted JPS60213754A (ja) | 1984-04-09 | 1984-04-09 | 清浄保持必要物運搬方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60213754A (enrdf_load_stackoverflow) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63144527U (enrdf_load_stackoverflow) * | 1987-03-12 | 1988-09-22 | ||
JPS63233231A (ja) * | 1987-03-20 | 1988-09-28 | Matsushita Electric Ind Co Ltd | クリ−ン空間のメンテナンス装置 |
US5326316A (en) * | 1991-04-17 | 1994-07-05 | Matsushita Electric Industrial Co., Ltd. | Coupling type clean space apparatus |
US5562539A (en) * | 1991-04-17 | 1996-10-08 | Matsushita Electric Industrial Co., Ltd. | Clean space system |
WO2019141770A1 (en) * | 2018-01-19 | 2019-07-25 | Assa Abloy Entrance Systems Ab | Door entrance system |
-
1984
- 1984-04-09 JP JP7140784A patent/JPS60213754A/ja active Granted
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63144527U (enrdf_load_stackoverflow) * | 1987-03-12 | 1988-09-22 | ||
JPS63233231A (ja) * | 1987-03-20 | 1988-09-28 | Matsushita Electric Ind Co Ltd | クリ−ン空間のメンテナンス装置 |
US5326316A (en) * | 1991-04-17 | 1994-07-05 | Matsushita Electric Industrial Co., Ltd. | Coupling type clean space apparatus |
US5562539A (en) * | 1991-04-17 | 1996-10-08 | Matsushita Electric Industrial Co., Ltd. | Clean space system |
WO2019141770A1 (en) * | 2018-01-19 | 2019-07-25 | Assa Abloy Entrance Systems Ab | Door entrance system |
Also Published As
Publication number | Publication date |
---|---|
JPH0332697B2 (enrdf_load_stackoverflow) | 1991-05-14 |
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