JPS60210178A - 圧電素子を利用した微動装置 - Google Patents
圧電素子を利用した微動装置Info
- Publication number
- JPS60210178A JPS60210178A JP59066293A JP6629384A JPS60210178A JP S60210178 A JPS60210178 A JP S60210178A JP 59066293 A JP59066293 A JP 59066293A JP 6629384 A JP6629384 A JP 6629384A JP S60210178 A JPS60210178 A JP S60210178A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- shaft
- elements
- piezoelectric
- cylindrical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000008602 contraction Effects 0.000 claims description 10
- 230000002093 peripheral effect Effects 0.000 claims description 9
- 230000008878 coupling Effects 0.000 claims description 4
- 238000010168 coupling process Methods 0.000 claims description 4
- 238000005859 coupling reaction Methods 0.000 claims description 4
- 239000011810 insulating material Substances 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims 1
- 239000012212 insulator Substances 0.000 abstract description 3
- 238000005452 bending Methods 0.000 abstract 1
- 241000256247 Spodoptera exigua Species 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000005684 electric field Effects 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000000452 restraining effect Effects 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000011017 operating method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
- H02N2/023—Inchworm motors
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Control Of Position Or Direction (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59066293A JPS60210178A (ja) | 1984-04-03 | 1984-04-03 | 圧電素子を利用した微動装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59066293A JPS60210178A (ja) | 1984-04-03 | 1984-04-03 | 圧電素子を利用した微動装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60210178A true JPS60210178A (ja) | 1985-10-22 |
| JPH0522472B2 JPH0522472B2 (enExample) | 1993-03-29 |
Family
ID=13311628
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59066293A Granted JPS60210178A (ja) | 1984-04-03 | 1984-04-03 | 圧電素子を利用した微動装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60210178A (enExample) |
-
1984
- 1984-04-03 JP JP59066293A patent/JPS60210178A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0522472B2 (enExample) | 1993-03-29 |
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