JPH0522472B2 - - Google Patents

Info

Publication number
JPH0522472B2
JPH0522472B2 JP59066293A JP6629384A JPH0522472B2 JP H0522472 B2 JPH0522472 B2 JP H0522472B2 JP 59066293 A JP59066293 A JP 59066293A JP 6629384 A JP6629384 A JP 6629384A JP H0522472 B2 JPH0522472 B2 JP H0522472B2
Authority
JP
Japan
Prior art keywords
piezoelectric element
shaft
piezoelectric
piezoelectric elements
cylindrical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59066293A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60210178A (ja
Inventor
Kunio Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP59066293A priority Critical patent/JPS60210178A/ja
Publication of JPS60210178A publication Critical patent/JPS60210178A/ja
Publication of JPH0522472B2 publication Critical patent/JPH0522472B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/021Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
    • H02N2/023Inchworm motors

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Control Of Position Or Direction (AREA)
JP59066293A 1984-04-03 1984-04-03 圧電素子を利用した微動装置 Granted JPS60210178A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59066293A JPS60210178A (ja) 1984-04-03 1984-04-03 圧電素子を利用した微動装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59066293A JPS60210178A (ja) 1984-04-03 1984-04-03 圧電素子を利用した微動装置

Publications (2)

Publication Number Publication Date
JPS60210178A JPS60210178A (ja) 1985-10-22
JPH0522472B2 true JPH0522472B2 (enExample) 1993-03-29

Family

ID=13311628

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59066293A Granted JPS60210178A (ja) 1984-04-03 1984-04-03 圧電素子を利用した微動装置

Country Status (1)

Country Link
JP (1) JPS60210178A (enExample)

Also Published As

Publication number Publication date
JPS60210178A (ja) 1985-10-22

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