JPS60202684A - 薄膜ｅｌデイスプレイパネルの発光膜形成方法 - Google Patents
薄膜ｅｌデイスプレイパネルの発光膜形成方法Info
- Publication number
- JPS60202684A JPS60202684A JP59058439A JP5843984A JPS60202684A JP S60202684 A JPS60202684 A JP S60202684A JP 59058439 A JP59058439 A JP 59058439A JP 5843984 A JP5843984 A JP 5843984A JP S60202684 A JPS60202684 A JP S60202684A
- Authority
- JP
- Japan
- Prior art keywords
- film
- light emitting
- luminescent
- thin film
- emitting film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010408 film Substances 0.000 title claims description 84
- 238000000034 method Methods 0.000 title claims description 25
- 239000010409 thin film Substances 0.000 title claims description 23
- 239000000758 substrate Substances 0.000 claims description 35
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 claims description 17
- 229910052717 sulfur Inorganic materials 0.000 claims description 17
- 239000011593 sulfur Substances 0.000 claims description 17
- 238000010438 heat treatment Methods 0.000 claims description 16
- 239000000463 material Substances 0.000 claims description 14
- 238000000151 deposition Methods 0.000 claims description 6
- 238000007740 vapor deposition Methods 0.000 claims description 6
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 claims description 4
- 239000000203 mixture Substances 0.000 claims description 3
- 150000001875 compounds Chemical class 0.000 claims description 2
- 238000009413 insulation Methods 0.000 claims description 2
- 229910052761 rare earth metal Inorganic materials 0.000 claims description 2
- 150000002910 rare earth metals Chemical class 0.000 claims description 2
- 239000011521 glass Substances 0.000 description 9
- 238000010894 electron beam technology Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 229910004664 Cerium(III) chloride Inorganic materials 0.000 description 2
- 238000002441 X-ray diffraction Methods 0.000 description 2
- VYLVYHXQOHJDJL-UHFFFAOYSA-K cerium trichloride Chemical compound Cl[Ce](Cl)Cl VYLVYHXQOHJDJL-UHFFFAOYSA-K 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000000295 emission spectrum Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 239000005357 flat glass Substances 0.000 description 2
- 150000002366 halogen compounds Chemical class 0.000 description 2
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
- 101100059600 Caenorhabditis elegans cec-1 gene Proteins 0.000 description 1
- 235000010627 Phaseolus vulgaris Nutrition 0.000 description 1
- 244000046052 Phaseolus vulgaris Species 0.000 description 1
- JGIATAMCQXIDNZ-UHFFFAOYSA-N calcium sulfide Chemical compound [Ca]=S JGIATAMCQXIDNZ-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000005297 pyrex Substances 0.000 description 1
- 229910001404 rare earth metal oxide Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 150000004763 sulfides Chemical class 0.000 description 1
- 230000001502 supplementing effect Effects 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59058439A JPS60202684A (ja) | 1984-03-28 | 1984-03-28 | 薄膜ｅｌデイスプレイパネルの発光膜形成方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59058439A JPS60202684A (ja) | 1984-03-28 | 1984-03-28 | 薄膜ｅｌデイスプレイパネルの発光膜形成方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60202684A true JPS60202684A (ja) | 1985-10-14 |
| JPS63915B2 JPS63915B2 (enrdf_load_stackoverflow) | 1988-01-09 |
Family
ID=13084427
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59058439A Granted JPS60202684A (ja) | 1984-03-28 | 1984-03-28 | 薄膜ｅｌデイスプレイパネルの発光膜形成方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60202684A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5482603A (en) * | 1992-05-07 | 1996-01-09 | Fuji Electric Co., Ltd. | Method of producing electroluminescence emitting film |
| JPH0845666A (ja) * | 1995-08-11 | 1996-02-16 | Komatsu Ltd | 薄膜ｅｌ素子 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57102983A (en) * | 1980-12-19 | 1982-06-26 | Matsushita Electric Ind Co Ltd | Electroluminescent element |
-
1984
- 1984-03-28 JP JP59058439A patent/JPS60202684A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57102983A (en) * | 1980-12-19 | 1982-06-26 | Matsushita Electric Ind Co Ltd | Electroluminescent element |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5482603A (en) * | 1992-05-07 | 1996-01-09 | Fuji Electric Co., Ltd. | Method of producing electroluminescence emitting film |
| JPH0845666A (ja) * | 1995-08-11 | 1996-02-16 | Komatsu Ltd | 薄膜ｅｌ素子 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63915B2 (enrdf_load_stackoverflow) | 1988-01-09 |
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