JPS60188320U - 弾性表面波発振器 - Google Patents

弾性表面波発振器

Info

Publication number
JPS60188320U
JPS60188320U JP1985057755U JP5775585U JPS60188320U JP S60188320 U JPS60188320 U JP S60188320U JP 1985057755 U JP1985057755 U JP 1985057755U JP 5775585 U JP5775585 U JP 5775585U JP S60188320 U JPS60188320 U JP S60188320U
Authority
JP
Japan
Prior art keywords
transducers
acoustic wave
surface acoustic
oscillation circuit
wave oscillator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1985057755U
Other languages
English (en)
Inventor
ジエイ・フレミング・デイアス
ヘンリー・イー・キヤーラー
Original Assignee
横河・ヒユ−レツト・パツカ−ド株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 横河・ヒユ−レツト・パツカ−ド株式会社 filed Critical 横河・ヒユ−レツト・パツカ−ド株式会社
Publication of JPS60188320U publication Critical patent/JPS60188320U/ja
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G10MUSICAL INSTRUMENTS; ACOUSTICS
    • G10KSOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/36Devices for manipulating acoustic surface waves
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/16Measuring force or stress, in general using properties of piezoelectric devices
    • G01L1/162Measuring force or stress, in general using properties of piezoelectric devices using piezoelectric resonators
    • G01L1/165Measuring force or stress, in general using properties of piezoelectric devices using piezoelectric resonators with acoustic surface waves
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
    • G01L9/0025Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element with acoustic surface waves
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S73/00Measuring and testing
    • Y10S73/04Piezoelectric

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。

Description

【図面の簡単な説明】
第1図は本考案の一実施例による力検出用弾性表面波発
振器の概略構成図、第2図は第1図に示しり弾性表面波
発振器に部ける発振周波数の標準偏差を示す特性線図、
第3a図は本考案の他の実、2施例によるアユ4アル弾
性表面波発振器の概略構成−図、羊3b図は第3a図に
示したデュナル弾性表面波発振器を形成す木部トランス
ジューサ及び及  ′′びグランド板の基板上における
配置を示す構成−、第3c図・および第3d図iよトー
y7スジユー′すの周擁数応答特性線図、゛第4図は第
3a図に示し、aqet*tz−r::7面波発振器に
よ□る力検出器の概  79.10J30,40:ピエ
ゾ基板、12,1 ′4、36.37. ′3’む39
.1.3.5.7. .44.46,45..47:ト
ランスジ五−サ、35、:すだれ状電極、16.32.
34.48.49:増幅器、18,42:マウント、2
,4゜1.678:グニント二、5.1:混合器。  
、     121、−    \イ− −リ−yつ”n−Qm’ (*J) −Fig、2−ン Fig、3c fo = 41MH2 \や、− OH60 Fig、3a 7  −’″′      ’8ノ    −一ン1−
   4      3

Claims (1)

    【実用新案登録請求の範囲】
  1. トランスジューサを形成すやための第1、第2、の表面
    を有するピエゾ基板と、前記シエゾ基板に加えられた力
    に応じて前記ピエゾ基板を保持するためのマウント部と
    、前記第1の表面に弾性表面波信号を伝播させるために
    配置された第1、第2のトランスジューサと、前記第2
    の表面に弾性表面波信号を伝播させるために配置された
    第3、第4めトランスジューサと、第1発振回路を構成
    するために前記第1、第2のトランスジューサ藺に−設
    けられた第1増幅器と、第2発振回路を構成するために
    前記第3、第4のトランスジューサ間に設けられた第2
    増幅器と、前記第1発振回路お−よ−q第2発振回路の
    発振周波数に基づいて前記力に関連する信号を出力する
    出力部とを具備して成2  リ、前記第1、第2トラン
    スジ立−サは各々前記第1、第2トランスジユーサとオ
    フセットされて、  いることを特徴とする弾性表面波
    発振器。
JP1985057755U 1974-01-08 1985-04-18 弾性表面波発振器 Pending JPS60188320U (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US404829*[A US3878477A (en) 1974-01-08 1974-01-08 Acoustic surface wave oscillator force-sensing devices
US404829 1974-01-08

Publications (1)

Publication Number Publication Date
JPS60188320U true JPS60188320U (ja) 1985-12-13

Family

ID=23601231

Family Applications (2)

Application Number Title Priority Date Filing Date
JP50004755A Pending JPS50102245A (ja) 1974-01-08 1975-01-08
JP1985057755U Pending JPS60188320U (ja) 1974-01-08 1985-04-18 弾性表面波発振器

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP50004755A Pending JPS50102245A (ja) 1974-01-08 1975-01-08

Country Status (3)

Country Link
US (1) US3878477A (ja)
JP (2) JPS50102245A (ja)
GB (1) GB1488155A (ja)

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CN109990819B (zh) * 2019-03-29 2021-06-01 电子科技大学 一种基于声表面波传感器的频率信号检测系统及检测方法
CN110966913B (zh) * 2019-12-12 2021-01-19 西安电子科技大学 基于液态金属的柔性大应变传感器及其制备方法
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JP2005241461A (ja) * 2004-02-26 2005-09-08 Kyocera Corp 圧力センサモジュール
JP4511216B2 (ja) * 2004-02-26 2010-07-28 京セラ株式会社 圧力センサモジュール

Also Published As

Publication number Publication date
JPS50102245A (ja) 1975-08-13
GB1488155A (en) 1977-10-05
US3878477A (en) 1975-04-15

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