JPS60185332U - 化合物半導体気相成長用ソ−スボ−ト - Google Patents
化合物半導体気相成長用ソ−スボ−トInfo
- Publication number
- JPS60185332U JPS60185332U JP7197884U JP7197884U JPS60185332U JP S60185332 U JPS60185332 U JP S60185332U JP 7197884 U JP7197884 U JP 7197884U JP 7197884 U JP7197884 U JP 7197884U JP S60185332 U JPS60185332 U JP S60185332U
- Authority
- JP
- Japan
- Prior art keywords
- source port
- vapor phase
- phase growth
- compound semiconductor
- semiconductor vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 150000001875 compounds Chemical class 0.000 title claims description 8
- 239000004065 semiconductor Substances 0.000 title claims description 8
- 238000001947 vapour-phase growth Methods 0.000 title claims description 8
- 229910052751 metal Inorganic materials 0.000 claims 2
- 239000002184 metal Substances 0.000 claims 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 229910052738 indium Inorganic materials 0.000 claims 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical group [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7197884U JPS60185332U (ja) | 1984-05-18 | 1984-05-18 | 化合物半導体気相成長用ソ−スボ−ト |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7197884U JPS60185332U (ja) | 1984-05-18 | 1984-05-18 | 化合物半導体気相成長用ソ−スボ−ト |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60185332U true JPS60185332U (ja) | 1985-12-09 |
| JPH0442912Y2 JPH0442912Y2 (enrdf_load_stackoverflow) | 1992-10-12 |
Family
ID=30609961
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7197884U Granted JPS60185332U (ja) | 1984-05-18 | 1984-05-18 | 化合物半導体気相成長用ソ−スボ−ト |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60185332U (enrdf_load_stackoverflow) |
-
1984
- 1984-05-18 JP JP7197884U patent/JPS60185332U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0442912Y2 (enrdf_load_stackoverflow) | 1992-10-12 |
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