JPS601840A - プロ−ブカ−ドの固定装置 - Google Patents

プロ−ブカ−ドの固定装置

Info

Publication number
JPS601840A
JPS601840A JP58110584A JP11058483A JPS601840A JP S601840 A JPS601840 A JP S601840A JP 58110584 A JP58110584 A JP 58110584A JP 11058483 A JP11058483 A JP 11058483A JP S601840 A JPS601840 A JP S601840A
Authority
JP
Japan
Prior art keywords
probe card
jig
pins
prober
pogo
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58110584A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0247858B2 (enExample
Inventor
Toshimi Yasuda
安田　利美
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP58110584A priority Critical patent/JPS601840A/ja
Publication of JPS601840A publication Critical patent/JPS601840A/ja
Publication of JPH0247858B2 publication Critical patent/JPH0247858B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP58110584A 1983-06-20 1983-06-20 プロ−ブカ−ドの固定装置 Granted JPS601840A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58110584A JPS601840A (ja) 1983-06-20 1983-06-20 プロ−ブカ−ドの固定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58110584A JPS601840A (ja) 1983-06-20 1983-06-20 プロ−ブカ−ドの固定装置

Publications (2)

Publication Number Publication Date
JPS601840A true JPS601840A (ja) 1985-01-08
JPH0247858B2 JPH0247858B2 (enExample) 1990-10-23

Family

ID=14539548

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58110584A Granted JPS601840A (ja) 1983-06-20 1983-06-20 プロ−ブカ−ドの固定装置

Country Status (1)

Country Link
JP (1) JPS601840A (enExample)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61125902A (ja) * 1984-11-21 1986-06-13 Yokohama Rubber Co Ltd:The 空気入りタイヤ
JPS6294635U (enExample) * 1985-12-04 1987-06-17
US4721198A (en) * 1985-11-13 1988-01-26 Ando Electric Co., Ltd. Probe card clamping and changing mechanism
JPS6424437A (en) * 1987-07-20 1989-01-26 Tokyo Electron Ltd Probe device
US6924654B2 (en) 2003-03-12 2005-08-02 Celerity Research, Inc. Structures for testing circuits and methods for fabricating the structures
US6946859B2 (en) 2003-03-12 2005-09-20 Celerity Research, Inc. Probe structures using clamped substrates with compliant interconnectors
US7170306B2 (en) 2003-03-12 2007-01-30 Celerity Research, Inc. Connecting a probe card and an interposer using a compliant connector

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61125902A (ja) * 1984-11-21 1986-06-13 Yokohama Rubber Co Ltd:The 空気入りタイヤ
US4721198A (en) * 1985-11-13 1988-01-26 Ando Electric Co., Ltd. Probe card clamping and changing mechanism
JPS6294635U (enExample) * 1985-12-04 1987-06-17
JPS6424437A (en) * 1987-07-20 1989-01-26 Tokyo Electron Ltd Probe device
US6924654B2 (en) 2003-03-12 2005-08-02 Celerity Research, Inc. Structures for testing circuits and methods for fabricating the structures
US6946859B2 (en) 2003-03-12 2005-09-20 Celerity Research, Inc. Probe structures using clamped substrates with compliant interconnectors
US6998864B2 (en) 2003-03-12 2006-02-14 Celerity Research, Inc. Structures for testing circuits and methods for fabricating the structures
US7170306B2 (en) 2003-03-12 2007-01-30 Celerity Research, Inc. Connecting a probe card and an interposer using a compliant connector

Also Published As

Publication number Publication date
JPH0247858B2 (enExample) 1990-10-23

Similar Documents

Publication Publication Date Title
US4665360A (en) Docking apparatus
US6856154B2 (en) Test board for testing IC package and tester calibration method using the same
JPH0247858B2 (enExample)
JPH10142291A (ja) Ｉｃ試験装置
JPH10150082A (ja) 半導体試験装置
JP3224519B2 (ja) ウェーハ測定治具、テストヘッド装置およびウェーハ測定装置
JPH0221268A (ja) 接触形電気的検査用プローバ
JPH0331077Y2 (enExample)
JPS63262848A (ja) Ｉｃチツプの試験測定方法
JPH07109838B2 (ja) 半導体試験測定用プローブ装置
JP2526252B2 (ja) 半導体素子の信頼性試験方法
JP2002116238A (ja) Ｉｃソケットおよびｉｃソケットにおける接触不良検出方法
TWI221651B (en) Prober and handler for testing semiconductor device
KR950009876Y1 (ko) 반도체 테스트 장비의 테스트 보드장치
KR940002455Y1 (ko) 레스트신호 체크용 보드가 구비된 반도체 웨이퍼 레스트장치
JP2005010088A (ja) 半導体装置の試験方法
JPS59189641A (ja) プロ−ブカ−ド固定装置
JPS6137776B2 (enExample)
JPS62122154A (ja) テストヘツド用治具
JPS6286836A (ja) プロ−ブカ−ド
JP2004172551A5 (enExample)
JPS63204623A (ja) 半導体装置
KR19980068692A (ko) 집적회로 테스트용 소켓
JPH0574897A (ja) 半導体デバイスの検査装置
JPS61155966A (ja) ハイブリツドｉｃ用基板の検査装置