JPS60183717A - 金属化誘電体の電極マ−ジン形成方法 - Google Patents
金属化誘電体の電極マ−ジン形成方法Info
- Publication number
- JPS60183717A JPS60183717A JP4110484A JP4110484A JPS60183717A JP S60183717 A JPS60183717 A JP S60183717A JP 4110484 A JP4110484 A JP 4110484A JP 4110484 A JP4110484 A JP 4110484A JP S60183717 A JPS60183717 A JP S60183717A
- Authority
- JP
- Japan
- Prior art keywords
- margin
- metallized
- electrode
- metallized dielectric
- glow discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 17
- 229910052782 aluminium Inorganic materials 0.000 claims description 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 7
- 239000010409 thin film Substances 0.000 claims description 6
- 239000003989 dielectric material Substances 0.000 claims description 5
- 230000001590 oxidative effect Effects 0.000 claims description 2
- 239000000956 alloy Substances 0.000 claims 1
- 229910045601 alloy Inorganic materials 0.000 claims 1
- 208000028659 discharge Diseases 0.000 description 16
- 229910052751 metal Inorganic materials 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- 239000003990 capacitor Substances 0.000 description 5
- 238000011282 treatment Methods 0.000 description 5
- 229910044991 metal oxide Inorganic materials 0.000 description 4
- 150000004706 metal oxides Chemical class 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 230000000873 masking effect Effects 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000011104 metalized film Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000002932 luster Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- -1 polypropylene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4110484A JPS60183717A (ja) | 1984-03-02 | 1984-03-02 | 金属化誘電体の電極マ−ジン形成方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4110484A JPS60183717A (ja) | 1984-03-02 | 1984-03-02 | 金属化誘電体の電極マ−ジン形成方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60183717A true JPS60183717A (ja) | 1985-09-19 |
| JPH0436569B2 JPH0436569B2 (enrdf_load_stackoverflow) | 1992-06-16 |
Family
ID=12599166
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4110484A Granted JPS60183717A (ja) | 1984-03-02 | 1984-03-02 | 金属化誘電体の電極マ−ジン形成方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60183717A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62279620A (ja) * | 1986-05-28 | 1987-12-04 | マルコン電子株式会社 | コンデンサ用蒸着フイルムの製造方法 |
-
1984
- 1984-03-02 JP JP4110484A patent/JPS60183717A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62279620A (ja) * | 1986-05-28 | 1987-12-04 | マルコン電子株式会社 | コンデンサ用蒸着フイルムの製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0436569B2 (enrdf_load_stackoverflow) | 1992-06-16 |
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