JPS60174241U - タ−ゲツト・チヤンバ - Google Patents

タ−ゲツト・チヤンバ

Info

Publication number
JPS60174241U
JPS60174241U JP6194584U JP6194584U JPS60174241U JP S60174241 U JPS60174241 U JP S60174241U JP 6194584 U JP6194584 U JP 6194584U JP 6194584 U JP6194584 U JP 6194584U JP S60174241 U JPS60174241 U JP S60174241U
Authority
JP
Japan
Prior art keywords
target chamber
flat plate
targets
holes
rotation axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6194584U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0222986Y2 (enrdf_load_stackoverflow
Inventor
猛 林
Original Assignee
松下電子工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 松下電子工業株式会社 filed Critical 松下電子工業株式会社
Priority to JP6194584U priority Critical patent/JPS60174241U/ja
Publication of JPS60174241U publication Critical patent/JPS60174241U/ja
Application granted granted Critical
Publication of JPH0222986Y2 publication Critical patent/JPH0222986Y2/ja
Granted legal-status Critical Current

Links

JP6194584U 1984-04-25 1984-04-25 タ−ゲツト・チヤンバ Granted JPS60174241U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6194584U JPS60174241U (ja) 1984-04-25 1984-04-25 タ−ゲツト・チヤンバ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6194584U JPS60174241U (ja) 1984-04-25 1984-04-25 タ−ゲツト・チヤンバ

Publications (2)

Publication Number Publication Date
JPS60174241U true JPS60174241U (ja) 1985-11-19
JPH0222986Y2 JPH0222986Y2 (enrdf_load_stackoverflow) 1990-06-21

Family

ID=30590691

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6194584U Granted JPS60174241U (ja) 1984-04-25 1984-04-25 タ−ゲツト・チヤンバ

Country Status (1)

Country Link
JP (1) JPS60174241U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0222986Y2 (enrdf_load_stackoverflow) 1990-06-21

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