JPS60170706A - 光学式表面変位検出回路 - Google Patents
光学式表面変位検出回路Info
- Publication number
- JPS60170706A JPS60170706A JP2682784A JP2682784A JPS60170706A JP S60170706 A JPS60170706 A JP S60170706A JP 2682784 A JP2682784 A JP 2682784A JP 2682784 A JP2682784 A JP 2682784A JP S60170706 A JPS60170706 A JP S60170706A
- Authority
- JP
- Japan
- Prior art keywords
- signal
- reflected
- detector
- reference signal
- threshold
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000006073 displacement reaction Methods 0.000 title claims abstract description 46
- 230000003287 optical effect Effects 0.000 title claims description 27
- 238000001514 detection method Methods 0.000 claims abstract description 55
- 238000000034 method Methods 0.000 claims description 15
- 238000005259 measurement Methods 0.000 claims description 12
- 230000004069 differentiation Effects 0.000 claims description 5
- 230000000875 corresponding effect Effects 0.000 description 9
- 230000000630 rising effect Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000003708 edge detection Methods 0.000 description 5
- 239000003990 capacitor Substances 0.000 description 3
- 230000002596 correlated effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 241001377010 Pila Species 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000011549 displacement method Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2682784A JPS60170706A (ja) | 1984-02-15 | 1984-02-15 | 光学式表面変位検出回路 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2682784A JPS60170706A (ja) | 1984-02-15 | 1984-02-15 | 光学式表面変位検出回路 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60170706A true JPS60170706A (ja) | 1985-09-04 |
| JPH0226161B2 JPH0226161B2 (cs) | 1990-06-07 |
Family
ID=12204100
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2682784A Granted JPS60170706A (ja) | 1984-02-15 | 1984-02-15 | 光学式表面変位検出回路 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60170706A (cs) |
-
1984
- 1984-02-15 JP JP2682784A patent/JPS60170706A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0226161B2 (cs) | 1990-06-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5473436A (en) | Surface shape measurement device with slit plate and single photoelectric converter | |
| JPH0652170B2 (ja) | 光結像式非接触位置測定装置 | |
| JP3300803B2 (ja) | 変位計及び変位測定方法、厚み計 | |
| US4043673A (en) | Reticle calibrated diameter gauge | |
| JPH035845Y2 (cs) | ||
| JPH0233186Y2 (cs) | ||
| JPS60170706A (ja) | 光学式表面変位検出回路 | |
| JPS62144014A (ja) | 光電式位置検出装置 | |
| JPS6111684A (ja) | 光学式表面変位検出回路 | |
| JPH056667B2 (cs) | ||
| JPH0331367B2 (cs) | ||
| JP3059714B1 (ja) | 相対位置計測装置 | |
| JPH0371044B2 (cs) | ||
| JPS5826325Y2 (ja) | 位置検出装置 | |
| JP2903283B2 (ja) | 細線径測定装置 | |
| JP3085341B2 (ja) | 外形測定装置及びその被測定物配置方法 | |
| JPH0318887Y2 (cs) | ||
| JPS6029087B2 (ja) | 焦点位置検出方式 | |
| JPH02272310A (ja) | 回転角度測定装置 | |
| JPS59226802A (ja) | 光学式測定機器におけるエツジ検出装置 | |
| RU2036415C1 (ru) | Лазерный датчик ультразвуковых колебаний | |
| SU651390A1 (ru) | Фотоэлектрический преобразователь угла поворота вала в код | |
| JPH0460526B2 (cs) | ||
| JPH0552521A (ja) | 光学式寸法測定器 | |
| JPH0355048Y2 (cs) |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |