JPS60158611A - めつき装置 - Google Patents

めつき装置

Info

Publication number
JPS60158611A
JPS60158611A JP1329184A JP1329184A JPS60158611A JP S60158611 A JPS60158611 A JP S60158611A JP 1329184 A JP1329184 A JP 1329184A JP 1329184 A JP1329184 A JP 1329184A JP S60158611 A JPS60158611 A JP S60158611A
Authority
JP
Japan
Prior art keywords
substrate
plating
magnetic field
holder
substrate holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1329184A
Other languages
English (en)
Japanese (ja)
Other versions
JPH051608B2 (enrdf_load_stackoverflow
Inventor
Makoto Morijiri
誠 森尻
Masaaki Sano
雅章 佐野
Midori Imura
井村　みどり
Shinichi Hara
真一 原
Shinji Narushige
成重　真治
Tsuneo Yoshinari
吉成　恒男
Mitsuo Sato
佐藤　満男
Masanobu Hanazono
雅信 華園
Toshihiro Yoshida
吉田　敏博
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Computer Basic Technology Research Association Corp
Original Assignee
Computer Basic Technology Research Association Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Computer Basic Technology Research Association Corp filed Critical Computer Basic Technology Research Association Corp
Priority to JP1329184A priority Critical patent/JPS60158611A/ja
Publication of JPS60158611A publication Critical patent/JPS60158611A/ja
Publication of JPH051608B2 publication Critical patent/JPH051608B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Thin Magnetic Films (AREA)
  • Electroplating Methods And Accessories (AREA)
JP1329184A 1984-01-30 1984-01-30 めつき装置 Granted JPS60158611A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1329184A JPS60158611A (ja) 1984-01-30 1984-01-30 めつき装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1329184A JPS60158611A (ja) 1984-01-30 1984-01-30 めつき装置

Publications (2)

Publication Number Publication Date
JPS60158611A true JPS60158611A (ja) 1985-08-20
JPH051608B2 JPH051608B2 (enrdf_load_stackoverflow) 1993-01-08

Family

ID=11829089

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1329184A Granted JPS60158611A (ja) 1984-01-30 1984-01-30 めつき装置

Country Status (1)

Country Link
JP (1) JPS60158611A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62122208A (ja) * 1985-11-22 1987-06-03 Hitachi Ltd 薄膜製造装置
JP2008156677A (ja) * 2006-12-21 2008-07-10 Yamamoto Mekki Shikenki:Kk めっき用治具およびめっき装置
JP2013502513A (ja) * 2009-08-24 2013-01-24 エンパイア テクノロジー ディベロップメント エルエルシー 磁性電気メッキ
EP4575044A1 (en) * 2023-12-21 2025-06-25 Industrial Technology Research Institute Electrolysis device, stirring deposition equipment, circulating deposition system and electrolysis method

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6057579U (ja) * 1983-09-26 1985-04-22 三菱電機株式会社 段ボ−ル包装体

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55108932A (en) * 1979-02-14 1980-08-21 Nippon Telegr & Teleph Corp <Ntt> Magnetic disc plating unit

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55108932A (en) * 1979-02-14 1980-08-21 Nippon Telegr & Teleph Corp <Ntt> Magnetic disc plating unit

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62122208A (ja) * 1985-11-22 1987-06-03 Hitachi Ltd 薄膜製造装置
JP2008156677A (ja) * 2006-12-21 2008-07-10 Yamamoto Mekki Shikenki:Kk めっき用治具およびめっき装置
JP2013502513A (ja) * 2009-08-24 2013-01-24 エンパイア テクノロジー ディベロップメント エルエルシー 磁性電気メッキ
US9797057B2 (en) 2009-08-24 2017-10-24 Empire Technology Development Llc Magnetic electro-plating
EP4575044A1 (en) * 2023-12-21 2025-06-25 Industrial Technology Research Institute Electrolysis device, stirring deposition equipment, circulating deposition system and electrolysis method

Also Published As

Publication number Publication date
JPH051608B2 (enrdf_load_stackoverflow) 1993-01-08

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