JPS60151709A - 工業炉の炉温制御装置 - Google Patents

工業炉の炉温制御装置

Info

Publication number
JPS60151709A
JPS60151709A JP575484A JP575484A JPS60151709A JP S60151709 A JPS60151709 A JP S60151709A JP 575484 A JP575484 A JP 575484A JP 575484 A JP575484 A JP 575484A JP S60151709 A JPS60151709 A JP S60151709A
Authority
JP
Japan
Prior art keywords
furnace
furnace temperature
temperature
control
transfer function
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP575484A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0565883B2 (enrdf_load_stackoverflow
Inventor
Yutaka Funiyu
船生　豊
Takanori Fujiwara
藤原　高矩
Seiji Kawai
成治 川合
Kazuhiko Nakatani
中谷　一彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JFE Steel Corp
Fuji Electric Co Ltd
Fuji Facom Corp
Original Assignee
Fuji Electric Co Ltd
Fuji Facom Corp
Kawasaki Steel Corp
Fuji Electric Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd, Fuji Facom Corp, Kawasaki Steel Corp, Fuji Electric Manufacturing Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP575484A priority Critical patent/JPS60151709A/ja
Publication of JPS60151709A publication Critical patent/JPS60151709A/ja
Publication of JPH0565883B2 publication Critical patent/JPH0565883B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00—Control of temperature
    • G05D23/19—Control of temperature characterised by the use of electric means
    • G05D23/1917—Control of temperature characterised by the use of electric means using digital means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Regulation And Control Of Combustion (AREA)
  • Control Of Heat Treatment Processes (AREA)
  • Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
  • Feedback Control In General (AREA)
JP575484A 1984-01-18 1984-01-18 工業炉の炉温制御装置 Granted JPS60151709A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP575484A JPS60151709A (ja) 1984-01-18 1984-01-18 工業炉の炉温制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP575484A JPS60151709A (ja) 1984-01-18 1984-01-18 工業炉の炉温制御装置

Publications (2)

Publication Number Publication Date
JPS60151709A true JPS60151709A (ja) 1985-08-09
JPH0565883B2 JPH0565883B2 (enrdf_load_stackoverflow) 1993-09-20

Family

ID=11619902

Family Applications (1)

Application Number Title Priority Date Filing Date
JP575484A Granted JPS60151709A (ja) 1984-01-18 1984-01-18 工業炉の炉温制御装置

Country Status (1)

Country Link
JP (1) JPS60151709A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62163107A (ja) * 1986-01-14 1987-07-18 Yokogawa Electric Corp プロセス制御装置
JPH06128656A (ja) * 1992-10-19 1994-05-10 Sumitomo Metal Ind Ltd 加熱炉の燃焼制御方法
EP0851325B1 (fr) * 1996-12-23 2003-05-07 Stein Heurtey Procédé de régulation du chauffage d'un four mettant en oeuvre la technique de la logique floue
WO2014017378A1 (ja) * 2012-07-25 2014-01-30 株式会社Kelk 半導体製造装置用温度調整装置、半導体製造におけるｐｉｄ定数演算方法、及び半導体製造装置用温度調整装置の運転方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110542322B (zh) * 2019-08-21 2021-09-21 中国电子科技集团公司第四十八研究所 连续式烧结炉的物料过程控制方法、系统、装置及介质

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5433813A (en) * 1977-08-22 1979-03-12 Nippon Steel Corp Combustion control device in incandescence furnace
JPS5782426A (en) * 1980-11-08 1982-05-22 Mitsubishi Electric Corp Control method for continuous type heating furnace
JPS57185503A (en) * 1981-05-11 1982-11-15 Seiko Instr & Electronics Ltd Automatic proportional, integral and differential constant setter for calorimeter
JPS5831405A (ja) * 1981-08-19 1983-02-24 Hitachi Ltd 加熱炉内温度制御方式
JPS58140808A (ja) * 1981-10-21 1983-08-20 フアウ・エ−・ウイ−センシヤフトリツシエ−テヒニツシエル・ベトリ−プ・ケラミツク 外乱を予め最適化する方法と装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5433813A (en) * 1977-08-22 1979-03-12 Nippon Steel Corp Combustion control device in incandescence furnace
JPS5782426A (en) * 1980-11-08 1982-05-22 Mitsubishi Electric Corp Control method for continuous type heating furnace
JPS57185503A (en) * 1981-05-11 1982-11-15 Seiko Instr & Electronics Ltd Automatic proportional, integral and differential constant setter for calorimeter
JPS5831405A (ja) * 1981-08-19 1983-02-24 Hitachi Ltd 加熱炉内温度制御方式
JPS58140808A (ja) * 1981-10-21 1983-08-20 フアウ・エ−・ウイ−センシヤフトリツシエ−テヒニツシエル・ベトリ−プ・ケラミツク 外乱を予め最適化する方法と装置

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62163107A (ja) * 1986-01-14 1987-07-18 Yokogawa Electric Corp プロセス制御装置
JPH06128656A (ja) * 1992-10-19 1994-05-10 Sumitomo Metal Ind Ltd 加熱炉の燃焼制御方法
EP0851325B1 (fr) * 1996-12-23 2003-05-07 Stein Heurtey Procédé de régulation du chauffage d'un four mettant en oeuvre la technique de la logique floue
WO2014017378A1 (ja) * 2012-07-25 2014-01-30 株式会社Kelk 半導体製造装置用温度調整装置、半導体製造におけるｐｉｄ定数演算方法、及び半導体製造装置用温度調整装置の運転方法
JP2014041593A (ja) * 2012-07-25 2014-03-06 Kelk Ltd 半導体製造装置用温度調整装置、半導体製造におけるｐｉｄ定数演算方法、及び半導体製造装置用温度調整装置の運転方法
CN104508575A (zh) * 2012-07-25 2015-04-08 科理克株式会社 半导体制造装置用温度调整装置、半导体制造中的pid常数运算方法、以及半导体制造装置用温度调整装置的运转方法
US9484231B2 (en) 2012-07-25 2016-11-01 Kelk Ltd. Temperature controller for semiconductor manufacturing equipment, method for calculating PID constants in semiconductor manufacturing, and method for operating temperature controller for semiconductor manufacturing equipment
CN104508575B (zh) * 2012-07-25 2016-12-28 科理克株式会社 半导体制造装置用温度调整装置、半导体制造中的pid常数运算方法、以及半导体制造装置用温度调整装置的运转方法

Also Published As

Publication number Publication date
JPH0565883B2 (enrdf_load_stackoverflow) 1993-09-20

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