JPH0332606B2 - - Google Patents
Info
- Publication number
- JPH0332606B2 JPH0332606B2 JP5581184A JP5581184A JPH0332606B2 JP H0332606 B2 JPH0332606 B2 JP H0332606B2 JP 5581184 A JP5581184 A JP 5581184A JP 5581184 A JP5581184 A JP 5581184A JP H0332606 B2 JPH0332606 B2 JP H0332606B2
- Authority
- JP
- Japan
- Prior art keywords
- furnace temperature
- control
- control zone
- heated
- furnace
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000446 fuel Substances 0.000 claims description 10
- 238000002485 combustion reaction Methods 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 description 16
- 229910000831 Steel Inorganic materials 0.000 description 13
- 239000010959 steel Substances 0.000 description 13
- 238000002791 soaking Methods 0.000 description 4
- 238000005338 heat storage Methods 0.000 description 3
- 230000000717 retained effect Effects 0.000 description 3
- 229910001208 Crucible steel Inorganic materials 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000004134 energy conservation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D23/00—Control of temperature
- G05D23/19—Control of temperature characterised by the use of electric means
- G05D23/1917—Control of temperature characterised by the use of electric means using digital means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Regulation And Control Of Combustion (AREA)
- Control Of Heat Treatment Processes (AREA)
- Feedback Control In General (AREA)
- Control Of Temperature (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5581184A JPS60200319A (ja) | 1984-03-23 | 1984-03-23 | 炉温度制御装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5581184A JPS60200319A (ja) | 1984-03-23 | 1984-03-23 | 炉温度制御装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60200319A JPS60200319A (ja) | 1985-10-09 |
| JPH0332606B2 true JPH0332606B2 (enrdf_load_stackoverflow) | 1991-05-14 |
Family
ID=13009309
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5581184A Granted JPS60200319A (ja) | 1984-03-23 | 1984-03-23 | 炉温度制御装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60200319A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2744985B2 (ja) * | 1989-12-28 | 1998-04-28 | 東京エレクトロン株式会社 | レジスト処理装置 |
-
1984
- 1984-03-23 JP JP5581184A patent/JPS60200319A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60200319A (ja) | 1985-10-09 |
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