JPS60200319A - 炉温度制御装置 - Google Patents
炉温度制御装置Info
- Publication number
- JPS60200319A JPS60200319A JP5581184A JP5581184A JPS60200319A JP S60200319 A JPS60200319 A JP S60200319A JP 5581184 A JP5581184 A JP 5581184A JP 5581184 A JP5581184 A JP 5581184A JP S60200319 A JPS60200319 A JP S60200319A
- Authority
- JP
- Japan
- Prior art keywords
- control
- fuel
- zone
- amount
- heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000446 fuel Substances 0.000 claims abstract description 56
- 238000002485 combustion reaction Methods 0.000 claims abstract description 15
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 229910000831 Steel Inorganic materials 0.000 description 33
- 239000010959 steel Substances 0.000 description 33
- 238000010438 heat treatment Methods 0.000 description 30
- 238000004364 calculation method Methods 0.000 description 19
- 238000002791 soaking Methods 0.000 description 11
- 238000000034 method Methods 0.000 description 5
- 239000010949 copper Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 230000005855 radiation Effects 0.000 description 4
- 230000009467 reduction Effects 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 230000000717 retained effect Effects 0.000 description 3
- 239000002912 waste gas Substances 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000005338 heat storage Methods 0.000 description 2
- 230000008676 import Effects 0.000 description 2
- 238000007726 management method Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 229910001208 Crucible steel Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 210000000078 claw Anatomy 0.000 description 1
- 238000004134 energy conservation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000010365 information processing Effects 0.000 description 1
- 238000003303 reheating Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D23/00—Control of temperature
- G05D23/19—Control of temperature characterised by the use of electric means
- G05D23/1917—Control of temperature characterised by the use of electric means using digital means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Regulation And Control Of Combustion (AREA)
- Control Of Heat Treatment Processes (AREA)
- Feedback Control In General (AREA)
- Control Of Temperature (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5581184A JPS60200319A (ja) | 1984-03-23 | 1984-03-23 | 炉温度制御装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5581184A JPS60200319A (ja) | 1984-03-23 | 1984-03-23 | 炉温度制御装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60200319A true JPS60200319A (ja) | 1985-10-09 |
JPH0332606B2 JPH0332606B2 (enrdf_load_stackoverflow) | 1991-05-14 |
Family
ID=13009309
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5581184A Granted JPS60200319A (ja) | 1984-03-23 | 1984-03-23 | 炉温度制御装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60200319A (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03201012A (ja) * | 1989-12-28 | 1991-09-02 | Tokyo Erekutoron Kyushu Kk | レジスト処理装置 |
-
1984
- 1984-03-23 JP JP5581184A patent/JPS60200319A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03201012A (ja) * | 1989-12-28 | 1991-09-02 | Tokyo Erekutoron Kyushu Kk | レジスト処理装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0332606B2 (enrdf_load_stackoverflow) | 1991-05-14 |
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