JPH0323835B2 - - Google Patents
Info
- Publication number
- JPH0323835B2 JPH0323835B2 JP16374482A JP16374482A JPH0323835B2 JP H0323835 B2 JPH0323835 B2 JP H0323835B2 JP 16374482 A JP16374482 A JP 16374482A JP 16374482 A JP16374482 A JP 16374482A JP H0323835 B2 JPH0323835 B2 JP H0323835B2
- Authority
- JP
- Japan
- Prior art keywords
- manipulated
- variable
- variables
- furnace
- output
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 claims description 8
- 238000004088 simulation Methods 0.000 claims description 4
- 238000011156 evaluation Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000004364 calculation method Methods 0.000 description 4
- 238000001816 cooling Methods 0.000 description 4
- 238000013459 approach Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000002485 combustion reaction Methods 0.000 description 3
- 238000000605 extraction Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 230000004043 responsiveness Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 230000002452 interceptive effect Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000003111 delayed effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005485 electric heating Methods 0.000 description 1
- 238000004134 energy conservation Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
Landscapes
- Control Of Temperature (AREA)
- Control Of Heat Treatment Processes (AREA)
- Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
- Feedback Control In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16374482A JPS5956084A (ja) | 1982-09-20 | 1982-09-20 | 複数炉の温度制御方式 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16374482A JPS5956084A (ja) | 1982-09-20 | 1982-09-20 | 複数炉の温度制御方式 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5956084A JPS5956084A (ja) | 1984-03-31 |
| JPH0323835B2 true JPH0323835B2 (enrdf_load_stackoverflow) | 1991-03-29 |
Family
ID=15779852
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16374482A Granted JPS5956084A (ja) | 1982-09-20 | 1982-09-20 | 複数炉の温度制御方式 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5956084A (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4551515B2 (ja) * | 1998-10-07 | 2010-09-29 | 株式会社日立国際電気 | 半導体製造装置およびその温度制御方法 |
| JP3915370B2 (ja) * | 2000-04-18 | 2007-05-16 | オムロン株式会社 | 制御装置、温度調節器および熱処理装置 |
| JP2002108408A (ja) * | 2000-09-29 | 2002-04-10 | Hitachi Kokusai Electric Inc | 半導体製造装置の温度制御方法 |
-
1982
- 1982-09-20 JP JP16374482A patent/JPS5956084A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5956084A (ja) | 1984-03-31 |
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