JPS60151709A - Temperature controller for industrial furnace - Google Patents
Temperature controller for industrial furnaceInfo
- Publication number
- JPS60151709A JPS60151709A JP575484A JP575484A JPS60151709A JP S60151709 A JPS60151709 A JP S60151709A JP 575484 A JP575484 A JP 575484A JP 575484 A JP575484 A JP 575484A JP S60151709 A JPS60151709 A JP S60151709A
- Authority
- JP
- Japan
- Prior art keywords
- furnace
- temperature
- furnace temperature
- calculates
- control
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D23/00—Control of temperature
- G05D23/19—Control of temperature characterised by the use of electric means
- G05D23/1917—Control of temperature characterised by the use of electric means using digital means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
- Feedback Control In General (AREA)
- Regulation And Control Of Combustion (AREA)
- Control Of Heat Treatment Processes (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の属する技術分野〕
この発明は、銅材等の利Ｆ）を加熱する］−築炉（加熱
炉、均熱炉、焼鈍炉および熱処理炉等）の炉内ガス温度
、すなわち炉内温度（以下、４洗ｉともいう。）の１ｌ
ＩｉＪ ａｌｌｌ装置、特に最適なｒｆＩｔＪ御パラメ
ータを１１１トさせて制御を行なう炉温制御装置に関す
る。[Detailed description of the invention] [Technical field to which the invention pertains] This invention is directed to heating copper materials, etc.] - inside of a furnace (heating furnace, soaking furnace, annealing furnace, heat treatment furnace, etc.) 1 liter of gas temperature, i.e. furnace temperature (hereinafter also referred to as 4 wash i)
The present invention relates to an IiJ all device, and particularly to a furnace temperature control device that performs control by adjusting optimal rfItJ control parameters.
一般ニ、プロセスのフィードバック制御においてｔよ、
制御パラメータ、例えばＰＩＤ（比１（・１・持分・微
分）制御ならば比例利得、積分時定数および微分時定数
をプロセスの特性に応じて適正に設定することが大切で
ある。しかしながら、プロセスの特性はその操業条件に
より変化１・るものであるから、これに応じて制御パラ
メータも変更することが望ましく、このように制御を行
なうのが、いわゆる適応制御と呼ばれるものである。In general, in process feedback control,
For example, in the case of PID (ratio 1 (・1・equity・derivative) control), it is important to appropriately set the control parameters, proportional gain, integral time constant, and differential time constant according to the characteristics of the process. Since the characteristics change depending on the operating conditions, it is desirable to change the control parameters accordingly, and controlling in this way is called adaptive control.
一般に、加熱炉における炉温制御は、炉内のガス湿度を
検出し、これをＰＩ制御により目標値と一致するように
燃料供給量を制御することにより行なわれる。このとき
、ＰＩパラメータは燃料供ｖｊ１と炉温のプロセス特性
によって決まるが、このプロセス特性は前述の如く操業
状態によって大きく変化する。すなわち、第１図は無負
荷時（炉内に拐ｒ１がないとき）と通常負荷時における
燃料供給量のステップ変化に対する炉温の応答特性を示
す特性図であるが、この図からも明らかなように、無負
荷時の場合は通′ｌ；５負狗ＩＳに比べて、燃料供給Ｊ
■の変化に対する炉ｄδ）の感度が鋭い、つまり燃料Ｕ
：玲量に対する炉温の変化量が大きいことがわかる。な
お、第１図は炉壁と相判間の熱吸収率が０１の場合の例
である。このことは、操業開始時すなわち空炉の状態か
ら材料を装入する際に、いわゆる１ハンチング”を起こ
してプロセスが不安定になり易いということである。こ
れを防ぐために？ｉ、ＰＩパラメータを弱くする必要が
あるが、このようにすると通常負荷時の応答性が悪くな
り、適正な制御ができなくなるという難点がある。これ
は、応答を早めることと、ハンチングを起こさないよう
にすることとが相反する事項であるためである。このた
め、操業変化に対応するプロセス特性をめて制御パラメ
ータを適応させる、いわゆる適応制御を行なうことが考
えられる０しかしながら、以下に述べるように燃料供給
量と炉温のプロセス特性は材料温度、炉壁湿度等が相互
に関係しあって非常に複雑であり、これを決めることは
必ずしも容易ではない。例えば、燃料ガスについては、
一σｉ＝□φｃｇ （（Ｔｇ＋２７３）’（Ｔｓｉ＋２
７３）’ ）ＡｓＨ
−σ、Σ φＷｇ （（Ｔｇ＋２７３）’鳳＝１
（Ｔｓｉ＋２７３）’ ）Ａｗ −・” （１）亥た；
゛材料（ｉ＝１〜ｎ）については、−（’ｉ’ ｓｉ
＋２７３） ） ・・・・・・ （３ンさらに、炉壁温
度については、
−（ｒｗ＋２７ａ） ） ・−・・−・（５）の如き関
係があり、例えば燃料ガスの温度を上記（１）式の関係
だけからめることができず、（１）〜（５）式を連立方
程式として解かなければならないという難点がある。な
お、上記（１）〜（５）式に示される記号の意味は次の
通りである。Generally, furnace temperature control in a heating furnace is performed by detecting the gas humidity in the furnace and controlling the fuel supply amount using PI control so that it matches a target value. At this time, the PI parameter is determined by the process characteristics of fuel supply vj1 and furnace temperature, but these process characteristics vary greatly depending on the operating conditions as described above. In other words, Fig. 1 is a characteristic diagram showing the response characteristics of the furnace temperature to a step change in the fuel supply amount under no load (when there is no fuel r1 in the furnace) and under normal load. As such, when there is no load, the fuel supply J
The sensitivity of the furnace dδ) to changes in ■ is sharp, that is, the fuel U
: It can be seen that the amount of change in furnace temperature with respect to the amount of heat is large. Note that FIG. 1 is an example in which the heat absorption rate between the furnace wall and the phase plate is 01. This means that at the start of operation, that is, when charging material from an empty furnace state, so-called "1-hunting" tends to occur and the process becomes unstable. To prevent this, the ?i and PI parameters are It is necessary to make the load weaker, but this has the disadvantage that the response under normal loads will deteriorate and proper control will not be possible. Therefore, it is possible to perform so-called adaptive control, which adapts the control parameters based on the process characteristics corresponding to operational changes.However, as described below, the fuel supply amount and The process characteristics of furnace temperature are very complex as material temperature, furnace wall humidity, etc. are interrelated, and it is not always easy to determine them.For example, for fuel gas, -σi=□φcg (( Tg+273)'(Tsi+2
73)' ) AsH -σ, Σ φWg ((Tg+273)'Otori=1 (Tsi+273)' )Aw -・" (1) I got it;
゛For materials (i = 1 to n), -('i' si
+273) ) ...... (3) Furthermore, regarding the furnace wall temperature, there is a relationship as shown in -(rw+27a) ) ...... (5). For example, if the temperature of the fuel gas is The problem is that it is not possible to consider only the relationship between the equations, and equations (1) to (5) must be solved as simultaneous equations. The meanings of the symbols shown in the above formulas (1) to (5) are as follows.
Ｔｇ：炉温
Ｔｓｌ： ｉ番目の材料温度
Ｔｗ：１戸什■、１１度
Ｔａ：予熱空気湿度
Ｍｇ：炉内所定ゾーンのガス熱容量
Ｍ５１： ｉ番目の材料熱容量
Ｍｗ：炉壁の熱容量
Ｍａ：予熱空気の熱容量
Ｍｏ：排ガスの熱容量
ｒｑ：燃料低位発熱量
ｒａ：空燃比
Ａｇ３： ｉ番目の材料の表面積
Ａｗ：炉壁の表面積
に５１：ｉ番目の材料の熱伝導率
ｋＷ：炉壁の熱伝導率
σ ：ステファンＯボルツマン定数
ｎ ：ゾーン内の材料本数
φｃｇ”材料−ガス間の熱吸収率
〜ｇ：炉壁−ガス間の熱吸収率
ｆｇ：ガス流量
Ｘ ：材料の幅
ｙ ：材料の高さ
〔発明の目的〕
この発明は上記に鑑みてなされたもので、時々刻々変化
する操業東件に対応してＭ週な制御が可能な工業炉の炉
温制御装置を提供することを目的とするものである。Tg: Furnace temperature Tsl: i-th material temperature Tw: 1 door, 11 degrees Ta: Preheating air humidity Mg: Gas heat capacity in a predetermined zone in the furnace M51: i-th material heat capacity Mw: Heat capacity of the furnace wall Ma: Preheating Heat capacity of air Mo: Heat capacity of exhaust gas rq: Lower heating value of fuel ra: Air-fuel ratio Ag3: Surface area of i-th material Aw: Surface area of furnace wall 51: Thermal conductivity of i-th material kW: Heat conduction of furnace wall Rate σ: Stefan O-Boltzmann constant n: Number of materials in the zone φcg" Heat absorption rate between material and gas ~ g: Heat absorption rate between furnace wall and gas fg: Gas flow rate X: Width of material y: Height of material [Object of the Invention] This invention has been made in view of the above, and an object of the present invention is to provide a furnace temperature control device for an industrial furnace that can perform control over a period of M weeks in response to ever-changing operating conditions. It is something to do.
その要点は、燃料供給量に対する炉温の動特性を所定の
伝達関数で近似するとともに、炉の特性および炉内に存
在する材料の本数や特性等に応じて該伝達関数のパラメ
ータをめ、該パラメータを用いて表わされる伝達関数を
含む制御装置全体の伝達関数に対して最適な制御パラメ
ータを演算し、この制御パラメータにもとづいて炉温の
制御を行なうようにした点にある。The key point is to approximate the dynamic characteristics of the furnace temperature with respect to the amount of fuel supplied by a predetermined transfer function, and to determine the parameters of the transfer function according to the characteristics of the furnace and the number and characteristics of the materials present in the furnace. The optimum control parameter is calculated for the transfer function of the entire control device including the transfer function expressed using the parameter, and the furnace temperature is controlled based on this control parameter.
まず、制御原理について説明する。 First, the control principle will be explained.
燃料供給ｉｔに対する炉温のステップ応答は負荷状態に
よって異なるが、その伝達関数の形式は次式の如く、
１次遅れ要素（上式の右辺第１項）と積分要素（上式の
右辺第２項）との和で近似できることが、第１図の特性
曲線からも明らかである。なお、Ｓはラプラス演算子で
ある０ところで、上記（６）式の如く表わされる炉温特
性を、先の（１）〜（５）式で表わされる特性と略一致
させるためには、（６）式で用いられる係数に１および
時定数Ｔｌ ｐ ’ｒ２を以下の如く選べば良いことが
確かめられている。すなわち、ただし、
Ａ＝ｒｑ＋ＭａｒａＴａ Ｍｇ（１＋ｒａ）ＴｇＢ＝σ
φ ・４♂・Ａｗ
ｇｇ
」−〇ｇθＳｉ ＋０５□）Ａｓｉ 十Ｂ ）であり、
各記号の意味は先と同様である。なお、θ２．ｏｓｉｔ
−ｊそれぞれ炉の絶対湿度ｓ［目の材料の絶対湿度で、
θ、＝Ｔｇ＋２７３
θ５ｉ−Ｔ、ｉ＋２７３
である。The step response of the furnace temperature to the fuel supply IT differs depending on the load condition, but the form of the transfer function is as shown in the following equation. It is clear from the characteristic curve in FIG. 1 that it can be approximated by the sum of the term). Note that S is the Laplace operator, which is 0. In order to make the furnace temperature characteristics expressed by the above equation (6) approximately match the characteristics expressed by the above equations (1) to (5), (6 ) It has been confirmed that the coefficient 1 and the time constant Tl p 'r2 used in the equation can be selected as follows. That is, however, A=rq+MaraTa Mg(1+ra)TgB=σ
φ・4♂・Aw gg ”−〇gθSi +05□)Asi 1B),
The meaning of each symbol is the same as above. Note that θ2. osit
-j respectively, the absolute humidity of the furnace s [absolute humidity of the eye material, θ, = Tg + 273 θ5i-T, i + 273.
一方、１ｔｉＵ御装置の操作部および検出部の各伝達関
数Ｇｕ（Ｓ）およびＧＦ（Ｓ）を、
の如く仮定する。ここに、むだ時間ＬＵ ｐ ＩＪＦお
よび時定数’Ｉ’Ｕ ｐ ＴＦは、設備によって定まる
定数である。こうすることにより、操作部から検出部ま
での系全体の伝達関数Ｇ（Ｓ）は、先の（６）式の如く
推定された伝達関数Ｇｐ（８）と合わせて、次の如く表
わされる。On the other hand, the transfer functions Gu(S) and GF(S) of the operating section and detection section of the 1tiU control device are assumed as follows. Here, the dead time LU p IJF and the time constant 'I'U p TF are constants determined depending on the equipment. By doing so, the transfer function G(S) of the entire system from the operating section to the detection section, together with the transfer function Gp(8) estimated as in equation (6) above, can be expressed as follows.
Ｇ（Ｓ）−〇Ｕ（Ｓ）・Ｇｐ（Ｓ）・Ｇｒ（Ｓ） ｎｏ
・＋−（１２こうして得られた伝達関数Ｇ （Ｓ）に対
し、次式の如きＰＩＤ制御の操作出力ｕ（ｔ）における
ｕ（ｔ） ＝ Ｋｐ （（ｒ Ｔｇ）
・・・・・・（ｔ３）
最適な制御パラメータＫｐ（比例利得） ｐ Ｔｉ （
積分時間）およびＴＤ （微分時間）をめる。なお、成
る伝達関数が与えられたとき、これにもとづいて最適な
制御パラメータをめる手法には種々あって、いずれも公
知である（なお、必要ならば、例えば、第２２回日本自
動制御学術講演会予稿集（１９７８年）１２７〜１２８
頁「応答面積を用いたＰＩＤオートチューニングの方式
」の項を参照されたい。）。なお、（１１式におけるＴ
ｇは炉温であり、ｒはその目標値である。G(S)-〇U(S)・Gp(S)・Gr(S) no
・+-(12 For the transfer function G (S) obtained in this way, u(t) = Kp ((r Tg) ......( t3) Optimal control parameter Kp (proportional gain) p Ti (
Calculate the integral time) and TD (differential time). There are various methods for determining the optimal control parameters based on the given transfer function, all of which are publicly known (if necessary, for example, Lecture proceedings (1978) 127-128
Please refer to the page "PID autotuning method using response area". ). In addition, (T in equation 11
g is the furnace temperature, and r is its target value.
、以上の如くしてめられた制御パラメータにもとづいて
、制御装置が工業炉の炉温を所定の目標値となるように
制御する、というのがこの発明による制御原理である０
以下、綿２図を参照して具体的に説明する０なお、第２
図はこの発明の実施例を示す構成図である。同図におい
て、１は炉、２は鋼材等の材料、３１１ｔガス温度計（
検出部）、４はコントローラ、５はバーナ、６はトラッ
キング演算装置、７は温度演算装置、８はプロセス特性
演算装置、９は制御パラメータ演算装置、１０は燃料供
給経路（操作部）、１１は予熱空気供給経路（操作部）
、Ｗは炉壁、Ｚは加熱ゾーンである。The control principle according to the present invention is that the control device controls the furnace temperature of the industrial furnace to a predetermined target value based on the control parameters determined as described above. This will be explained in detail with reference to the figure.
The figure is a configuration diagram showing an embodiment of the present invention. In the figure, 1 is a furnace, 2 is a material such as steel, and a 311t gas thermometer (
4 is a controller, 5 is a burner, 6 is a tracking calculation device, 7 is a temperature calculation device, 8 is a process characteristic calculation device, 9 is a control parameter calculation device, 10 is a fuel supply path (operation portion), 11 is a Preheated air supply route (control unit)
, W is the furnace wall, and Z is the heating zone.
すなわち、第２図は連続加熱炉の例であり、炉１の一部
とそれに対応する制御装置系とが図示され°Ｃいる。鋼
材等の材料２は、バーナ５にて加熱されながら、炉１内
の加熱ゾーンＺを通って矢印几方向へ移動せしめられる
。トラッキング演算装置６は、炉ｌに相打２が装入され
た時点から加熱ゾーンＺがどのようになっているかをト
ラッキング（追跡）シ、装入詩からの経過時間と相打の
移送態様とにもとづいて、ゾーンＺ内に存在する材料の
本数、その位置等を演算する０温度演算装置７は、この
トラッキング演算装置６による演算結果と、温度計３を
介して検出される炉温とから周知の差分法（必要ならば
、昭和４６年５月１０日、日本鉄鋼協会編１発行、「連
続鋼片加熱炉における伝導実験と計算方法」を参照され
たい。）等を用いて炉壁の表面温度、さらには各材料の
サイズ（断面積）を考慮して各材料の表面温度を算出す
る。プロセス特性演算装置８は、演算装置６，７で演算
されたこれらの値（ゾーン内材料の本数。That is, FIG. 2 is an example of a continuous heating furnace, in which a portion of the furnace 1 and a corresponding control system are shown. A material 2 such as steel is moved in the direction of the arrow through a heating zone Z within the furnace 1 while being heated by a burner 5 . The tracking calculation device 6 tracks the state of the heating zone Z from the time when the quarry 2 is charged into the furnace 1, and calculates the elapsed time from the charging and the transfer mode of the quarry 2. Based on this, the zero temperature calculation device 7 calculates the number of materials existing in the zone Z, their positions, etc. from the calculation result by the tracking calculation device 6 and the furnace temperature detected via the thermometer 3. Using the well-known difference method (if necessary, please refer to "Conduction Experiments and Calculation Methods in Continuous Billet Reheating Furnaces", May 10, 1970, edited by the Japan Iron and Steel Institute, published 1). The surface temperature of each material is calculated by taking into consideration the surface temperature and further the size (cross-sectional area) of each material. The process characteristic calculation device 8 calculates these values calculated by the calculation devices 6 and 7 (the number of materials in the zone).
炉壁の表面温度、各材料の表面温度）と、材料のサイズ
、温度計３を介して検出される炉温、経路１０を介して
供給される燃料の供給量および経路１１を介して供給さ
れる予熱空気の温度等から、先の（６）式で近似される
プルセスの伝達量１Ｇｐ（Ｓ）に関するパラメータに１
＃ Ｔ１ ＃ Ｔ２を（７）〜（９）式を用いて演算
する。なお、燃料供給量および予熱空気温度を検出する
手段は適宜設けられているものとする６制御パラメータ
演算装置９は、前記ａａ式で表わされる伝達関数に対す
る最適なＰＩＤパラメータを演算し、コントローラ４に
与えるｏコントｏ ５４ｔｊ、ｓこの制御パラメータに
よってＰＩＤ演算を行ない、温度計３を介して検出され
る炉温をその目標値に一致させるべく、経路１０および
バーナ５を介して供給する燃料の量をコントロールする
。the surface temperature of the furnace wall, the surface temperature of each material), the size of the material, the furnace temperature detected via the thermometer 3, the amount of fuel supplied via the path 10, and the amount of fuel supplied via the path 11. From the temperature of the preheated air, etc., the parameter related to the transmission amount of 1 Gp (S) of the purcess approximated by the above equation (6) is set to 1.
#T1 #T2 are calculated using equations (7) to (9). It is assumed that means for detecting the fuel supply amount and the preheated air temperature are appropriately provided.6 The control parameter calculation device 9 calculates the optimum PID parameter for the transfer function expressed by the aa formula, and sends it to the controller 4. PID calculation is performed using these control parameters, and the amount of fuel supplied via path 10 and burner 5 is adjusted to match the furnace temperature detected via thermometer 3 with its target value. control.
なお、炉壁および各材料の温度は上述の如く、演算によ
ってめるのが一般的であるが、別途センサを設けること
により、これらを検出するようにしてもよいものである
０
〔発明の効果〕
この発明によれば、工業炉の操業条件にかかわらず常に
最適なパラメータを用いてフィード／＜ツク制御を行な
うことができるので、安定かつ連応性の良好な制御が実
現され、これによって操業開始１１ｔ「の不安定状態ま
たはフル操業時の応答性の悪さも解消されるという利点
がもたらされるものである。Although the temperature of the furnace wall and each material is generally determined by calculation as described above, it is also possible to detect these by providing a separate sensor. ] According to the present invention, it is possible to always perform feed/<tsuk control using optimal parameters regardless of the operating conditions of the industrial furnace, so stable and well-coordinated control is achieved, and this allows for stable and well-coordinated control. This provides the advantage that the unstable state of 11t'' or poor responsiveness during full operation can be eliminated.
第１図は燃料供給ｈ（のステップ変化に対する炉温の応
答特性を示す特性図、第２図はこの発明の実施例を示す
構成図である。
符号説明
１・・・・・・炉、２・・・・・・材料、３・・・・・
・ガス温度計、４・・・・・・コントローラ、５・・・
・・・バーナ、６・・・・・・トラッキング演算装置、
７・・・・・・温度演算装置、８・・・・・・プロセス
特性演算装置、９・・・・・・制御パラメータ演算装置
、１０・・・・・・燃料供給経路、１１・・・・・・予
熱空気供給経路、Ｗ・・・・・・炉壁、Ｚ・・・・・・
加熱ゾーン代理人 弁理士 並 木 昭 夫
代理人 弁理士 松 崎 渭
第１頁の続きFig. 1 is a characteristic diagram showing the response characteristic of the furnace temperature to a step change in the fuel supply h (h), and Fig. 2 is a configuration diagram showing an embodiment of the present invention.・・・・・・Materials, 3・・・・・・
・Gas thermometer, 4... Controller, 5...
...burner, 6...tracking calculation device,
7... Temperature calculation device, 8... Process characteristic calculation device, 9... Control parameter calculation device, 10... Fuel supply path, 11... ...Preheated air supply path, W...Furnace wall, Z...
Heating Zone Agent Patent Attorney Akio Namiki Agent Patent Attorney Akira MatsuzakiContinued from page 1
Claims (1)
の時々刻々変化する操業条件に対応するプロセス特性を
め、これに対して最適なパラメータを適応させて炉温の
フィードバック制御を行なう工業炉の炉温制御装置であ
って、該炉内に装入される材料をトラッキングして少な
くともその本数を演算するとともに該材料の本数および
サイズならびに別途検出される炉温（検出炉温）とにも
とづいて各相打と４様の各表面温度を演算する第１の１
１１１０手段と、燃料供給景に対する炉温の動特性を所
定の伝達関数にて近似し該第１演算手段による演算結果
、６拐ｒ１のサイズおよび検出炉温と別途検出される予
熱空気の温度および流量とにもとづいて該伝達関数のパ
ラメータを演算する第２の演算手段と、該伝達関数を含
む制御装置全体の伝達関数に対して最適な制御パラメー
タを演算する第３の演算手段とを備え、該制御パラメー
タにもとづいて炉温の制御を行なうことを！Ｆ、！徴と
する工業炉の炉温制御装置。Feedback control of the furnace temperature is performed by determining the process characteristics that correspond to the ever-changing operating conditions of an industrial furnace that supplies fuel and preheated air to heat a predetermined phase material, and by adapting optimal parameters to these characteristics. A furnace temperature control device for an industrial furnace, which tracks materials charged into the furnace and calculates at least the number of materials, and also calculates the number and size of the materials and a separately detected furnace temperature (detected furnace temperature). The first 1 calculates each phase and each surface temperature of 4 types based on
1110 means, the calculation result by the first calculation means by approximating the dynamic characteristics of the furnace temperature with respect to the fuel supply scene by a predetermined transfer function, the size of 6-kilometer r1, the detected furnace temperature, the separately detected preheating air temperature, and a second calculation means for calculating parameters of the transfer function based on the flow rate; and a third calculation means for calculating an optimal control parameter for the transfer function of the entire control device including the transfer function, Control the furnace temperature based on the control parameters! F,! This is a furnace temperature control device for industrial furnaces.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP575484A JPS60151709A (en) | 1984-01-18 | 1984-01-18 | Temperature controller for industrial furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP575484A JPS60151709A (en) | 1984-01-18 | 1984-01-18 | Temperature controller for industrial furnace |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60151709A true JPS60151709A (en) | 1985-08-09 |
| JPH0565883B2 JPH0565883B2 (en) | 1993-09-20 |
Family
ID=11619902
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP575484A Granted JPS60151709A (en) | 1984-01-18 | 1984-01-18 | Temperature controller for industrial furnace |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60151709A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62163107A (en) * | 1986-01-14 | 1987-07-18 | Yokogawa Electric Corp | Process controller |
| JPH06128656A (en) * | 1992-10-19 | 1994-05-10 | Sumitomo Metal Ind Ltd | Method for controlling combustion in heating furnace |
| EP0851325B1 (en) * | 1996-12-23 | 2003-05-07 | Stein Heurtey | Method for controlling the heating of a furnace using fuzzy logic techniques |
| WO2014017378A1 (en) * | 2012-07-25 | 2014-01-30 | 株式会社Kelk | Temperature controller for semiconductor manufacturing equipment, method for calculating pid constants in semiconductor manufacturing, and method for operating temperature controller for semiconductor manufacturing equipment |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110542322B (en) * | 2019-08-21 | 2021-09-21 | 中国电子科技集团公司第四十八研究所 | Material process control method, system, device and medium for continuous sintering furnace |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5433813A (en) * | 1977-08-22 | 1979-03-12 | Nippon Steel Corp | Combustion control device in incandescence furnace |
| JPS5782426A (en) * | 1980-11-08 | 1982-05-22 | Mitsubishi Electric Corp | Control method for continuous type heating furnace |
| JPS57185503A (en) * | 1981-05-11 | 1982-11-15 | Seiko Instr & Electronics Ltd | Automatic proportional, integral and differential constant setter for calorimeter |
| JPS5831405A (en) * | 1981-08-19 | 1983-02-24 | Hitachi Ltd | Temperature controlling system in heating furnace |
| JPS58140808A (en) * | 1981-10-21 | 1983-08-20 | フアウ・エ−・ウイ−センシヤフトリツシエ−テヒニツシエル・ベトリ−プ・ケラミツク | Method and apparatus for optimizing disturbance beforehand |
-
1984
- 1984-01-18 JP JP575484A patent/JPS60151709A/en active Granted
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5433813A (en) * | 1977-08-22 | 1979-03-12 | Nippon Steel Corp | Combustion control device in incandescence furnace |
| JPS5782426A (en) * | 1980-11-08 | 1982-05-22 | Mitsubishi Electric Corp | Control method for continuous type heating furnace |
| JPS57185503A (en) * | 1981-05-11 | 1982-11-15 | Seiko Instr & Electronics Ltd | Automatic proportional, integral and differential constant setter for calorimeter |
| JPS5831405A (en) * | 1981-08-19 | 1983-02-24 | Hitachi Ltd | Temperature controlling system in heating furnace |
| JPS58140808A (en) * | 1981-10-21 | 1983-08-20 | フアウ・エ−・ウイ−センシヤフトリツシエ−テヒニツシエル・ベトリ−プ・ケラミツク | Method and apparatus for optimizing disturbance beforehand |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62163107A (en) * | 1986-01-14 | 1987-07-18 | Yokogawa Electric Corp | Process controller |
| JPH06128656A (en) * | 1992-10-19 | 1994-05-10 | Sumitomo Metal Ind Ltd | Method for controlling combustion in heating furnace |
| EP0851325B1 (en) * | 1996-12-23 | 2003-05-07 | Stein Heurtey | Method for controlling the heating of a furnace using fuzzy logic techniques |
| WO2014017378A1 (en) * | 2012-07-25 | 2014-01-30 | 株式会社Kelk | Temperature controller for semiconductor manufacturing equipment, method for calculating pid constants in semiconductor manufacturing, and method for operating temperature controller for semiconductor manufacturing equipment |
| JP2014041593A (en) * | 2012-07-25 | 2014-03-06 | Kelk Ltd | Temperature adjustment device for semiconductor manufacturing device, pid constants calculation method in manufacturing semiconductor, and operation method of temperature adjustment device of semiconductor manufacturing device |
| CN104508575A (en) * | 2012-07-25 | 2015-04-08 | 科理克株式会社 | Temperature controller for semiconductor manufacturing equipment, method for calculating PID constants in semiconductor manufacturing, and method for operating temperature controller for semiconductor manufacturing equipment |
| US9484231B2 (en) | 2012-07-25 | 2016-11-01 | Kelk Ltd. | Temperature controller for semiconductor manufacturing equipment, method for calculating PID constants in semiconductor manufacturing, and method for operating temperature controller for semiconductor manufacturing equipment |
| CN104508575B (en) * | 2012-07-25 | 2016-12-28 | 科理克株式会社 | PID constant operation method in use in semiconductor manufacturing apparatus temperature adjustment device, semiconductor manufacturing and the method for operation of use in semiconductor manufacturing apparatus temperature adjustment device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0565883B2 (en) | 1993-09-20 |
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