JPS60197825A - Method for controlling cooling - Google Patents

Abstract

PURPOSE:To cool uniformly the entire part of heated objects to a target temp. in the water cooling stage of said objects by dividing the objects to plural zones, calculating the deviation between the actual temp. and the target value for cooling for each of the zones and performing the feedback control by the average value thereof. CONSTITUTION:Heated objects 1 are cooled A by cooling water 4 while the objects are moved in the direction B. The objects 1 are divided to plural zones 1-n and the temp. is measured at a temp. detecting end 2 for each of the zones. The deviation of the measured temp. from a target cooling temp. TS is calculated. The deviation values determined for each of the zones 1-n are averaged by a calculator 81 within the same lot and the average value thereof is multiplied by the coefft. determined by every lot to obtain a feedback control output. This output is added to the feedback control output from a temp. controller 3' in an adder 82 and the output therefrom is inputted to a controller 6 for the flow rate of the cooling water which controls the flow rate of the cooling water thereby cooling uniformly each zone of the objects 1 to the target value TS.

Description

[Detailed Description of the Invention] <Industrial Application Field> The present invention relates to a method of heating an object to a constant temperature and then cooling it to control the temperature to be uniform. This invention relates to a system control cooling control method.

<Prior art> After heating an object to a certain temperature, it is cooled down and becomes uniformly dry! I
Conventionally, as a cooling control method called JIII, a constant flow rate ai(]@ shown in FIG. 1 has been carried out.

113 in the system shown in Figure 1, 1 is the object to be cooled such as iron, 2
is a temperature detection end that measures the temperature of object 1, 3 is a temperature indicator,
4 is a pipe through which cooling water flows; 5 is a cooling water flow rate regulator for controlling a cooling water control valve 7; a cooling water flow mg1.6;

The cooling control method shown in FIG. 1 is a constant cooling water flow m control, in which the object 1 is first heated in another system, and then,
The object 1 is transferred to the system shown in Figure 1, the cooling water flowing through the pipe 4 is brought into contact with the object 1 at point A, and the object 1 is further moved in the direction shown by arrow B to cool the object 1. Ta.

At this time, although the flow rate of the cooling water flowing through the pipe 4 was kept constant and the humidity of the object 1 was measured, no feedback was provided to this system.

Figure 2 shows the state of cooling control for object 1. In this figure, the vertical axis is temperature; the left side of the figure is the temperature at the tip of the object 1, and the right side is the temperature at the rear end of the object 1.

As shown in this figure, the target temperature of the object is set to r s
Then, the temperature before cooling is lower than the temperature before cooling, and the temperature after cooling is as shown in 1-2, and the disturbance during heating of object 1 and the disturbance during cooling 14 times are completely controlled. I couldn't do it.

Incidentally, the heating unevenness that occurs when heating the object 1 appears in a substantially uniform pattern in the objects of the same lot being processed, as shown in the humidity distribution surface tQ -1-+ in FIG.

In response to disturbances during this cooling process, as shown in FIG. C' can be solved by control.

FIG. 4 shows this situation, and it can be seen that the disturbance during the cold fJJ process has been improved by 16.

However, the method of controlling the waste hood shown in FIG. 3 is also a step-by-step adjustment of the temperature, and therefore cannot improve large unevenness during heating.

<Objective of the Invention> The object of the present invention is to remove the large unevenness that occurs in a substantially constant pattern during heating, and to cool the entire object to a uniform target temperature.

<Summary of the Invention 22. The present invention focuses on heating unevenness that occurs in a certain pattern when heating an object. When cooling an object, the object is divided into a plurality of zones, and the actual temperature is calculated for each zone. Calculate the deviation between the temperature value and the cooling temperature target value by 81, and set this deviation as the same 1 =
Average the same zone within one zone, multiply the averaged deviation value by a coefficient, and add the value to the feedback control output of each zone as a feedforward control output,
This is a cooling control method in which this additive n value is used as a cooling control output.

<Example> The present invention will be explained in detail using FIG.

First, a cold object 1 moving in the direction of arrow B is divided into a plurality of zones (1 to n), the temperature of each zone is measured by the temperature detection end 2, and the deviation from the target temperature is calculated.

81 is an arithmetic unit e which calculates and averages this deviation, and 82 is a deviation output from the arithmetic unit 81).
There is an adder that adds to .

Assuming that the temperature after cooling of each zone is Tpt (i=1 to n), the zone-by-zone deviation Δ゛I'' is as follows.

Δ1-i = 1-p 1-'l-S ... (1) Furthermore, the deviation obtained for each zone is the same [1 point (same place)
! l! (171 objects).

In other words, the average deviation Δ' of the 2ith G of the 1st lot in the same lot? −f j becomes as follows.

ΔT′tj=(1−α)△d−tJ−+1αΔTij・
...〈2) Here, ∆T'i j is the average 1i (] of the <j-1)th deviation within the same lot, ∆T, , is the first temperature deviation of the same lot, and α is the Constant, same lot 1
It is a constant determined by whether to give weight to the deviation value of ~(j-1) [1] and the deviation value of the first deviation value of the same lot.

Next, for the average (if) for each zone determined in (2),
Multiply by a coefficient I< determined for each lot (each product type) to obtain the feedforward control output for each zone.

That is, if the feedforward output is MV+, then MVt=aK△T', 3, +b -<3> is the computing unit 8.
The output will be 1.

However, a, Lit feedforward IIIJ II
The constant K for adjusting the I output is determined for each product type, and is a coefficient for converting temperature deviation into cooling water stone.

In this way, (3) maru feedforward $1 t
It output MV is output from the calculator 81, this value is further added to the feedback control output from the temperature controller 3' in the adder 82, and is supplied to the cooling water flow m controller 6, and the cooling water is , 1ilJ is controlled by this output.

In this way, the temperature deviation for each zone of each object in each lot 1- is calculated, the values are averaged, the feedforward control output is calculated from this value, and it is output at the timing when the corresponding zone is cooled, so the same lot Disturbances such as a fixed pattern of heating unevenness can be memorized, and the flow of cooling water can always be appropriately controlled.

Note that if this control is not performed, both a and b may be set to 0, and this feedforward control output will be 0 for the object that comes at the beginning of the lot.

When this feedforward control is performed, as shown in FIG. 6, the temperature 1-2 of the object after cooling approaches the target temperature TS without being affected by uneven heating or disturbance.

Effect of Explanation> As described above, according to the cooling control method of the present invention, the cooling control t111 can be uniformly covered without being affected by uneven heating of the object or disturbance.

[Brief explanation of the drawing]

Figure 1 is Figure 7 for explaining the conventional cooling lubrication control method.
, Figure 2 shows the conventional cold 7. I] A diagram showing the state of cooling according to the control method, FIG. 3 is a diagram for explaining the conventional cooling control method, FIG. 4 is a diagram showing the state of cooling according to the conventional cooling control method, FIG. 6 is a diagram for explaining the cooling control method of the present invention. FIG. 6 is a diagram showing the state of cooling by the cooling control method of the present invention. 1...Object, 2...Temperature detection end, 3. Warm melon indicator,
3'...Temperature controller 4...Cooling water piping, 5...
Cold fJJ water flow rate transmitter, 6... Cooling water flow rate regulator, 7... Cooling water control valve, 8
1... Arithmetic unit, 82... Adder.

Claims (1)

[Claims] (1) When cooling an object, divide the object into multiple zones and measure the deviation between the actual temperature value and the cooling temperature target value for each zone. The cooling filter 11 calculates the average value for the same zone, adds a coefficient to the averaged deviation 6fi, adds the value to the feedback control output of each zone as a feedforward control output, and uses this added value as the cooling control output. Control method.