JPS6014106A - 寸法測定方法とその装置 - Google Patents
寸法測定方法とその装置Info
- Publication number
- JPS6014106A JPS6014106A JP12285283A JP12285283A JPS6014106A JP S6014106 A JPS6014106 A JP S6014106A JP 12285283 A JP12285283 A JP 12285283A JP 12285283 A JP12285283 A JP 12285283A JP S6014106 A JPS6014106 A JP S6014106A
- Authority
- JP
- Japan
- Prior art keywords
- measured
- gap
- measuring member
- light
- photoelectric conversion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 16
- 230000003287 optical effect Effects 0.000 claims abstract description 17
- 238000006243 chemical reaction Methods 0.000 claims description 8
- 238000001514 detection method Methods 0.000 claims 2
- 239000002184 metal Substances 0.000 claims 1
- 238000005259 measurement Methods 0.000 abstract description 9
- 238000010586 diagram Methods 0.000 description 4
- 239000000428 dust Substances 0.000 description 3
- 238000000691 measurement method Methods 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 230000001427 coherent effect Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/08—Measuring arrangements characterised by the use of optical techniques for measuring diameters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12285283A JPS6014106A (ja) | 1983-07-05 | 1983-07-05 | 寸法測定方法とその装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12285283A JPS6014106A (ja) | 1983-07-05 | 1983-07-05 | 寸法測定方法とその装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6014106A true JPS6014106A (ja) | 1985-01-24 |
JPH0547763B2 JPH0547763B2 (enrdf_load_stackoverflow) | 1993-07-19 |
Family
ID=14846232
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12285283A Granted JPS6014106A (ja) | 1983-07-05 | 1983-07-05 | 寸法測定方法とその装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6014106A (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20130128285A1 (en) * | 2010-07-29 | 2013-05-23 | Panart Khajornrungruang | System and method for measuring length of gap between rotating tool and workpiece |
-
1983
- 1983-07-05 JP JP12285283A patent/JPS6014106A/ja active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20130128285A1 (en) * | 2010-07-29 | 2013-05-23 | Panart Khajornrungruang | System and method for measuring length of gap between rotating tool and workpiece |
US8755055B2 (en) * | 2010-07-29 | 2014-06-17 | Kyushu Institute Of Technology | System and method for measuring length of gap between rotating tool and workpiece |
Also Published As
Publication number | Publication date |
---|---|
JPH0547763B2 (enrdf_load_stackoverflow) | 1993-07-19 |
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