JPS60138938A - 誘電体分離基板の製造方法 - Google Patents

誘電体分離基板の製造方法

Info

Publication number
JPS60138938A
JPS60138938A JP58247515A JP24751583A JPS60138938A JP S60138938 A JPS60138938 A JP S60138938A JP 58247515 A JP58247515 A JP 58247515A JP 24751583 A JP24751583 A JP 24751583A JP S60138938 A JPS60138938 A JP S60138938A
Authority
JP
Japan
Prior art keywords
silicon
substrate
type
porous
single crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58247515A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6343889B2 (en:Method
Inventor
Akinobu Satou
佐藤　倬暢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toko Inc
Original Assignee
Toko Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toko Inc filed Critical Toko Inc
Priority to JP58247515A priority Critical patent/JPS60138938A/ja
Publication of JPS60138938A publication Critical patent/JPS60138938A/ja
Publication of JPS6343889B2 publication Critical patent/JPS6343889B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W10/00—
    • H10W10/01—

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Element Separation (AREA)
JP58247515A 1983-12-27 1983-12-27 誘電体分離基板の製造方法 Granted JPS60138938A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58247515A JPS60138938A (ja) 1983-12-27 1983-12-27 誘電体分離基板の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58247515A JPS60138938A (ja) 1983-12-27 1983-12-27 誘電体分離基板の製造方法

Publications (2)

Publication Number Publication Date
JPS60138938A true JPS60138938A (ja) 1985-07-23
JPS6343889B2 JPS6343889B2 (en:Method) 1988-09-01

Family

ID=17164626

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58247515A Granted JPS60138938A (ja) 1983-12-27 1983-12-27 誘電体分離基板の製造方法

Country Status (1)

Country Link
JP (1) JPS60138938A (en:Method)

Also Published As

Publication number Publication date
JPS6343889B2 (en:Method) 1988-09-01

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