JPS6013739U - ウエハ保持装置 - Google Patents

ウエハ保持装置

Info

Publication number
JPS6013739U
JPS6013739U JP10484883U JP10484883U JPS6013739U JP S6013739 U JPS6013739 U JP S6013739U JP 10484883 U JP10484883 U JP 10484883U JP 10484883 U JP10484883 U JP 10484883U JP S6013739 U JPS6013739 U JP S6013739U
Authority
JP
Japan
Prior art keywords
wafer
holding device
wafer holding
processing table
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10484883U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6322673Y2 (enrdf_load_stackoverflow
Inventor
鈴木　美雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Machine Co Ltd
Original Assignee
Toshiba Machine Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Machine Co Ltd filed Critical Toshiba Machine Co Ltd
Priority to JP10484883U priority Critical patent/JPS6013739U/ja
Publication of JPS6013739U publication Critical patent/JPS6013739U/ja
Application granted granted Critical
Publication of JPS6322673Y2 publication Critical patent/JPS6322673Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP10484883U 1983-07-06 1983-07-06 ウエハ保持装置 Granted JPS6013739U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10484883U JPS6013739U (ja) 1983-07-06 1983-07-06 ウエハ保持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10484883U JPS6013739U (ja) 1983-07-06 1983-07-06 ウエハ保持装置

Publications (2)

Publication Number Publication Date
JPS6013739U true JPS6013739U (ja) 1985-01-30
JPS6322673Y2 JPS6322673Y2 (enrdf_load_stackoverflow) 1988-06-22

Family

ID=30246017

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10484883U Granted JPS6013739U (ja) 1983-07-06 1983-07-06 ウエハ保持装置

Country Status (1)

Country Link
JP (1) JPS6013739U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6322673Y2 (enrdf_load_stackoverflow) 1988-06-22

Similar Documents

Publication Publication Date Title
JPS6013739U (ja) ウエハ保持装置
JPS6056461U (ja) 研磨治具
JPS5983029U (ja) 半導体基板
JPS6052656U (ja) 回路基板
JPS5978523U (ja) 磁気ヘツド用保持装置
JPS6135747U (ja) ウエハ−保持用ピンセツト
JPS59104487U (ja) ソケツト
JPS59180424U (ja) 半導体基板用治具
JPS59159942U (ja) スピンナ−装置
JPS60178575U (ja) ピンセツト
JPS63139638U (enrdf_load_stackoverflow)
JPS6092153U (ja) イオンエツチング用サンプルホルダ
JPS6042738U (ja) 半導体ペレツトの位置決めクランプ装置
JPS5818388U (ja) 配線基板保持装置
JPS59107192U (ja) 回路ブロツクの放熱構造
JPS6097257U (ja) ピンセツト
JPS58138676U (ja) 伝票ホルダ−
JPS5837138U (ja) 半導体素子用キヤリアラツク
JPS6061887U (ja) 小型スピ−カ−
JPS58475U (ja) 基板位置決め用キヤリア
JPS5984834U (ja) 半導体基板
JPS59192834U (ja) 基板保持構造
JPS59164238U (ja) 混成集積回路装置
JPS596834U (ja) シリコンウエハ
JPS6036162U (ja) 部品押え付けピンセット