JPS6013713Y2 - 搬送設備 - Google Patents

搬送設備

Info

Publication number
JPS6013713Y2
JPS6013713Y2 JP12939880U JP12939880U JPS6013713Y2 JP S6013713 Y2 JPS6013713 Y2 JP S6013713Y2 JP 12939880 U JP12939880 U JP 12939880U JP 12939880 U JP12939880 U JP 12939880U JP S6013713 Y2 JPS6013713 Y2 JP S6013713Y2
Authority
JP
Japan
Prior art keywords
air
storage section
object storage
main body
conveyed object
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12939880U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5752359U (enrdf_load_stackoverflow
Inventor
寿雄 林
浩二 山本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daifuku Co Ltd
Original Assignee
Daifuku Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daifuku Co Ltd filed Critical Daifuku Co Ltd
Priority to JP12939880U priority Critical patent/JPS6013713Y2/ja
Publication of JPS5752359U publication Critical patent/JPS5752359U/ja
Application granted granted Critical
Publication of JPS6013713Y2 publication Critical patent/JPS6013713Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP12939880U 1980-09-10 1980-09-10 搬送設備 Expired JPS6013713Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12939880U JPS6013713Y2 (ja) 1980-09-10 1980-09-10 搬送設備

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12939880U JPS6013713Y2 (ja) 1980-09-10 1980-09-10 搬送設備

Publications (2)

Publication Number Publication Date
JPS5752359U JPS5752359U (enrdf_load_stackoverflow) 1982-03-26
JPS6013713Y2 true JPS6013713Y2 (ja) 1985-05-01

Family

ID=29489749

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12939880U Expired JPS6013713Y2 (ja) 1980-09-10 1980-09-10 搬送設備

Country Status (1)

Country Link
JP (1) JPS6013713Y2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58161340A (ja) * 1982-03-19 1983-09-24 Hitachi Ltd 製品移送装置
JPS6197576U (enrdf_load_stackoverflow) * 1984-12-01 1986-06-23
JPH0527014Y2 (enrdf_load_stackoverflow) * 1985-10-31 1993-07-08

Also Published As

Publication number Publication date
JPS5752359U (enrdf_load_stackoverflow) 1982-03-26

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