JPS60135805A - パタ−ン検出方法及びその装置 - Google Patents

パタ−ン検出方法及びその装置

Info

Publication number
JPS60135805A
JPS60135805A JP24384783A JP24384783A JPS60135805A JP S60135805 A JPS60135805 A JP S60135805A JP 24384783 A JP24384783 A JP 24384783A JP 24384783 A JP24384783 A JP 24384783A JP S60135805 A JPS60135805 A JP S60135805A
Authority
JP
Japan
Prior art keywords
light
fluorescence
printed circuit
circuit board
base material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP24384783A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0476042B2 (enrdf_load_stackoverflow
Inventor
Hirotani Saitou
斎藤　啓谷
Koichi Tsukazaki
柄崎　晃一
Yasuhiko Hara
靖彦 原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP24384783A priority Critical patent/JPS60135805A/ja
Publication of JPS60135805A publication Critical patent/JPS60135805A/ja
Publication of JPH0476042B2 publication Critical patent/JPH0476042B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP24384783A 1983-12-26 1983-12-26 パタ−ン検出方法及びその装置 Granted JPS60135805A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24384783A JPS60135805A (ja) 1983-12-26 1983-12-26 パタ−ン検出方法及びその装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24384783A JPS60135805A (ja) 1983-12-26 1983-12-26 パタ−ン検出方法及びその装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP15473092A Division JPH0676884B2 (ja) 1992-06-15 1992-06-15 パターン検出方法

Publications (2)

Publication Number Publication Date
JPS60135805A true JPS60135805A (ja) 1985-07-19
JPH0476042B2 JPH0476042B2 (enrdf_load_stackoverflow) 1992-12-02

Family

ID=17109832

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24384783A Granted JPS60135805A (ja) 1983-12-26 1983-12-26 パタ−ン検出方法及びその装置

Country Status (1)

Country Link
JP (1) JPS60135805A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62207904A (ja) * 1986-03-07 1987-09-12 Mitsubishi Monsanto Chem Co ウエハ−発光波長及び面積測定装置
US6187417B1 (en) 1998-02-18 2001-02-13 International Business Machines Corporation Substrate having high optical contrast and method of making same

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52114483A (en) * 1976-03-18 1977-09-26 Agfa Gevaert Nv Improvement for radioactiveeray conversion screens
JPS5447579A (en) * 1977-09-22 1979-04-14 Hitachi Ltd Develping condiction inspecting method in photoetching

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52114483A (en) * 1976-03-18 1977-09-26 Agfa Gevaert Nv Improvement for radioactiveeray conversion screens
JPS5447579A (en) * 1977-09-22 1979-04-14 Hitachi Ltd Develping condiction inspecting method in photoetching

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62207904A (ja) * 1986-03-07 1987-09-12 Mitsubishi Monsanto Chem Co ウエハ−発光波長及び面積測定装置
US6187417B1 (en) 1998-02-18 2001-02-13 International Business Machines Corporation Substrate having high optical contrast and method of making same

Also Published As

Publication number Publication date
JPH0476042B2 (enrdf_load_stackoverflow) 1992-12-02

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