JPS60135566A - 斜め方向に指向性を有する蒸発源装置 - Google Patents

斜め方向に指向性を有する蒸発源装置

Info

Publication number
JPS60135566A
JPS60135566A JP24220783A JP24220783A JPS60135566A JP S60135566 A JPS60135566 A JP S60135566A JP 24220783 A JP24220783 A JP 24220783A JP 24220783 A JP24220783 A JP 24220783A JP S60135566 A JPS60135566 A JP S60135566A
Authority
JP
Japan
Prior art keywords
evaporation
evaporated
vessel
oblique direction
source device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP24220783A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0360913B2 (enrdf_load_stackoverflow
Inventor
Muneharu Komiya
小宮　宗治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Nihon Shinku Gijutsu KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc, Nihon Shinku Gijutsu KK filed Critical Ulvac Inc
Priority to JP24220783A priority Critical patent/JPS60135566A/ja
Publication of JPS60135566A publication Critical patent/JPS60135566A/ja
Publication of JPH0360913B2 publication Critical patent/JPH0360913B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP24220783A 1983-12-23 1983-12-23 斜め方向に指向性を有する蒸発源装置 Granted JPS60135566A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24220783A JPS60135566A (ja) 1983-12-23 1983-12-23 斜め方向に指向性を有する蒸発源装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24220783A JPS60135566A (ja) 1983-12-23 1983-12-23 斜め方向に指向性を有する蒸発源装置

Publications (2)

Publication Number Publication Date
JPS60135566A true JPS60135566A (ja) 1985-07-18
JPH0360913B2 JPH0360913B2 (enrdf_load_stackoverflow) 1991-09-18

Family

ID=17085841

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24220783A Granted JPS60135566A (ja) 1983-12-23 1983-12-23 斜め方向に指向性を有する蒸発源装置

Country Status (1)

Country Link
JP (1) JPS60135566A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH042764A (ja) * 1990-04-18 1992-01-07 Sharp Corp 薄膜ｅｌ素子の製造方法
JPH0449668U (enrdf_load_stackoverflow) * 1990-08-31 1992-04-27
KR101076227B1 (ko) * 2008-12-23 2011-10-26 주식회사 테스 진공증착장치

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH042764A (ja) * 1990-04-18 1992-01-07 Sharp Corp 薄膜ｅｌ素子の製造方法
JPH0449668U (enrdf_load_stackoverflow) * 1990-08-31 1992-04-27
KR101076227B1 (ko) * 2008-12-23 2011-10-26 주식회사 테스 진공증착장치

Also Published As

Publication number Publication date
JPH0360913B2 (enrdf_load_stackoverflow) 1991-09-18

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