JPS60135566A - Evaporating source device having directivity in oblique direction - Google Patents

Abstract

PURPOSE:To carry out vapor deposition independently of the placement and shape of a substrate by tilting and rotating a vessel so as to generate vapor distributed at high density in an oblique direction by the evaporation of a material to be evaporated from the evaporating outlet of the vessel tilted upward. CONSTITUTION:A heat resistant vessel 7 contg. a material 8 to be evaporated is set in a vacuum chamber 1. The vessel 7 is tilted so that the evaporating outlet 4 is titlted upward, and it is made freely rotatable on a tilted rotating shaft 6. The material 8 is melted with electron beams 10 or other heating means 11, and the melt is evaporated from the outlet 4 to generate vapor distributed at high density in an oblique direction. Thus, vapor deposition is carried out independently of the placement and shape of a substrate 3.

Description

[Detailed Description of the Invention] The present invention provides diagonal directionality of evaporated vapor used in vacuum evaporation. The present invention relates to an evaporation source device suitable for evaporation.

Conventional evaporation source devices are known, for example, as shown in Figure 1, in which an evaporation material b'2 is placed in a heat-resistant container a with a water-cooled copper hearth, and an electron beam C is thrown into the evaporation material to completely melt it. However, in this type, the entire evaporation source device is arranged so that the melting surface in the container a is kept horizontal, and the entire substrate d is placed above it, so that the vapor evaporated from the melting surface is all over the substrate d. In general, a diagonally placed substrate has the disadvantage of condensing vapor.

In other words, the vapor evaporated from such a horizontally arranged evaporation source device has the highest density in the vertical direction, and approximately follows the cosine law (ωS).
θ: n is a real number greater than 1), and it is not possible to obtain a particularly large density distribution in the direction of inclination, and the arrangement and shape of the substrate are restricted, which is undesirable.

The entire purpose of the present invention is to provide an evaporation source device that can obtain a high density distribution in an oblique direction.
A heat-resistant container containing the evaporation port is placed in a vacuum chamber so that it can be rotated freely around an inclined rotation axis with the evaporation port facing upward, and the evaporation material is melted by an electron beam or other heating means and then passed through the evaporation port. It is characterized by evaporating diagonally upward.

To explain the embodiment of the present invention with reference to the drawings, in FIG. The evaporation source device (2) is a heat-resistant container such as a water-cooled copper hearth that is rotated around a rotation shaft (6) tilted from the drive shaft (51K) with the evaporation port +41 diagonally upward. The evaporative material (8) contained in a cough container (7) comprising a filament (9)
) is melted by heating means (old j) using an electron beam 001 deflected by a magnetic field.

To explain its operation, the heat-resistant container (7) is rotated, and when the evaporated material (8) inside is irradiated with an electron beam 00 to completely melt it, the molten metal flows according to gravity to form a horizontal melting surface. In this case, if the rotation is relatively slow, the molten metal will be in the container (7).
However, if the rotation speed is appropriate, the kinematic viscosity of the molten metal, the synergistic effect of the centrifugal force, and the surface tension will distribute it in a parabolic shape along the wall surface, and the entire surface force of the paraboloid will be almost uniform. The molten metal evaporates. When evaporation is carried out under these conditions, a vapor beam with the highest density distribution in the direction of the tilted rotation axis (6) can be obtained.
) can be applied with high-density steam, allowing rapid deposition.

The evaporation material (8) is completely replenished by a method such as inserting a wire-shaped evaporation material from the evaporation port (4), and the entire melting surface of the high stones is maintained at an appropriate level.

As described above, according to the present invention, the heat-resistant container is rotated at an angle so that all of the evaporation material is evaporated from the evaporation port diagonally upward, so that an evaporation vapor having directivity with a high density distribution in the diagonal direction can be obtained. It is possible to change the layout and shape of one board.
It has the effect of being able to carry out steaming N without having to burn.

[Brief explanation of drawings]

FIG. 1 is a cut side view of a conventional example, and FIG. 2 is a cut side view of an embodiment of the present invention. (1)...Vacuum chamber (4)...Evaporation port (6)...
・Rotating shaft (7)...Heat-resistant container (8)...Evaporation material En...2 people outside the heating means

Claims (1)

[Claims] A heat-resistant container containing evaporated material gold is placed in a vacuum chamber so that it can rotate freely around an inclined rotation axis with the evaporation port facing upward, and the evaporated material gold melted by an electron beam or other heating means is placed inside the vacuum chamber. An evaporation source device having diagonal directivity, characterized in that it evaporates diagonally upward through an evaporation port.