JPS60133725A - パタ−ンの欠陥検査装置に用いるパタ−ンの判定方法 - Google Patents

パタ−ンの欠陥検査装置に用いるパタ−ンの判定方法

Info

Publication number
JPS60133725A
JPS60133725A JP58240832A JP24083283A JPS60133725A JP S60133725 A JPS60133725 A JP S60133725A JP 58240832 A JP58240832 A JP 58240832A JP 24083283 A JP24083283 A JP 24083283A JP S60133725 A JPS60133725 A JP S60133725A
Authority
JP
Japan
Prior art keywords
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Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58240832A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0374822B2 (enExample
Inventor
Yasushi Uchiyama
内山　康
Daikichi Awamura
粟村　大吉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIPPON JIDO SEIGYO KK
NIPPON JIDOSEIGYO Ltd
Original Assignee
NIPPON JIDO SEIGYO KK
NIPPON JIDOSEIGYO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIPPON JIDO SEIGYO KK, NIPPON JIDOSEIGYO Ltd filed Critical NIPPON JIDO SEIGYO KK
Priority to JP58240832A priority Critical patent/JPS60133725A/ja
Publication of JPS60133725A publication Critical patent/JPS60133725A/ja
Publication of JPH0374822B2 publication Critical patent/JPH0374822B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P95/00—

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP58240832A 1983-12-22 1983-12-22 パタ−ンの欠陥検査装置に用いるパタ−ンの判定方法 Granted JPS60133725A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58240832A JPS60133725A (ja) 1983-12-22 1983-12-22 パタ−ンの欠陥検査装置に用いるパタ−ンの判定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58240832A JPS60133725A (ja) 1983-12-22 1983-12-22 パタ−ンの欠陥検査装置に用いるパタ−ンの判定方法

Publications (2)

Publication Number Publication Date
JPS60133725A true JPS60133725A (ja) 1985-07-16
JPH0374822B2 JPH0374822B2 (enExample) 1991-11-28

Family

ID=17065353

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58240832A Granted JPS60133725A (ja) 1983-12-22 1983-12-22 パタ−ンの欠陥検査装置に用いるパタ−ンの判定方法

Country Status (1)

Country Link
JP (1) JPS60133725A (enExample)

Also Published As

Publication number Publication date
JPH0374822B2 (enExample) 1991-11-28

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Legal Events

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