JPH0374823B2 - - Google Patents

Info

Publication number
JPH0374823B2
JPH0374823B2 JP24083383A JP24083383A JPH0374823B2 JP H0374823 B2 JPH0374823 B2 JP H0374823B2 JP 24083383 A JP24083383 A JP 24083383A JP 24083383 A JP24083383 A JP 24083383A JP H0374823 B2 JPH0374823 B2 JP H0374823B2
Authority
JP
Japan
Prior art keywords
pattern
unit
reference information
defect inspection
frame memories
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP24083383A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60133726A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP58240833A priority Critical patent/JPS60133726A/ja
Publication of JPS60133726A publication Critical patent/JPS60133726A/ja
Publication of JPH0374823B2 publication Critical patent/JPH0374823B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P95/00—

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP58240833A 1983-12-22 1983-12-22 パタ−ンの欠陥検査装置に用いる境界の処理方法 Granted JPS60133726A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58240833A JPS60133726A (ja) 1983-12-22 1983-12-22 パタ−ンの欠陥検査装置に用いる境界の処理方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58240833A JPS60133726A (ja) 1983-12-22 1983-12-22 パタ−ンの欠陥検査装置に用いる境界の処理方法

Publications (2)

Publication Number Publication Date
JPS60133726A JPS60133726A (ja) 1985-07-16
JPH0374823B2 true JPH0374823B2 (enExample) 1991-11-28

Family

ID=17065369

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58240833A Granted JPS60133726A (ja) 1983-12-22 1983-12-22 パタ−ンの欠陥検査装置に用いる境界の処理方法

Country Status (1)

Country Link
JP (1) JPS60133726A (enExample)

Also Published As

Publication number Publication date
JPS60133726A (ja) 1985-07-16

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees