JPH058822B2 - - Google Patents

Info

Publication number
JPH058822B2
JPH058822B2 JP59192701A JP19270184A JPH058822B2 JP H058822 B2 JPH058822 B2 JP H058822B2 JP 59192701 A JP59192701 A JP 59192701A JP 19270184 A JP19270184 A JP 19270184A JP H058822 B2 JPH058822 B2 JP H058822B2
Authority
JP
Japan
Prior art keywords
sub
pattern
scanning
area
line sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59192701A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6171630A (ja
Inventor
Yasushi Uchama
Daikichi Awamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
LASER TEC KK
Original Assignee
LASER TEC KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by LASER TEC KK filed Critical LASER TEC KK
Priority to JP59192701A priority Critical patent/JPS6171630A/ja
Publication of JPS6171630A publication Critical patent/JPS6171630A/ja
Publication of JPH058822B2 publication Critical patent/JPH058822B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P95/00—

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP59192701A 1984-09-17 1984-09-17 パタ−ンの欠陥検査装置に用いるパタ−ンの判定方法 Granted JPS6171630A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59192701A JPS6171630A (ja) 1984-09-17 1984-09-17 パタ−ンの欠陥検査装置に用いるパタ−ンの判定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59192701A JPS6171630A (ja) 1984-09-17 1984-09-17 パタ−ンの欠陥検査装置に用いるパタ−ンの判定方法

Publications (2)

Publication Number Publication Date
JPS6171630A JPS6171630A (ja) 1986-04-12
JPH058822B2 true JPH058822B2 (enExample) 1993-02-03

Family

ID=16295609

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59192701A Granted JPS6171630A (ja) 1984-09-17 1984-09-17 パタ−ンの欠陥検査装置に用いるパタ−ンの判定方法

Country Status (1)

Country Link
JP (1) JPS6171630A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4741747B2 (ja) * 2001-06-01 2011-08-10 日本車輌製造株式会社 振れ止め装置
JP5278783B1 (ja) * 2012-05-30 2013-09-04 レーザーテック株式会社 欠陥検査装置、欠陥検査方法、及び欠陥検査プログラム
CN110517969B (zh) * 2019-08-27 2022-09-02 武汉新芯集成电路制造有限公司 晶圆缺陷监测方法及系统和计算机存储介质

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5846636A (ja) * 1981-09-16 1983-03-18 Nippon Jido Seigyo Kk パタ−ンの欠陥検査装置

Also Published As

Publication number Publication date
JPS6171630A (ja) 1986-04-12

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term