JPS60133333A - 圧力センサ - Google Patents

圧力センサ

Info

Publication number
JPS60133333A
JPS60133333A JP24272183A JP24272183A JPS60133333A JP S60133333 A JPS60133333 A JP S60133333A JP 24272183 A JP24272183 A JP 24272183A JP 24272183 A JP24272183 A JP 24272183A JP S60133333 A JPS60133333 A JP S60133333A
Authority
JP
Japan
Prior art keywords
pressure
movable plate
coil
fixed plate
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP24272183A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0365851B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Toshitsugu Ueda
敏嗣 植田
Fusao Kosaka
幸坂 扶佐夫
Yoshinobu Sugihara
吉信 杉原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Hokushin Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Hokushin Electric Corp filed Critical Yokogawa Hokushin Electric Corp
Priority to JP24272183A priority Critical patent/JPS60133333A/ja
Publication of JPS60133333A publication Critical patent/JPS60133333A/ja
Publication of JPH0365851B2 publication Critical patent/JPH0365851B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0004Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using variations in inductance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP24272183A 1983-12-22 1983-12-22 圧力センサ Granted JPS60133333A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24272183A JPS60133333A (ja) 1983-12-22 1983-12-22 圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24272183A JPS60133333A (ja) 1983-12-22 1983-12-22 圧力センサ

Publications (2)

Publication Number Publication Date
JPS60133333A true JPS60133333A (ja) 1985-07-16
JPH0365851B2 JPH0365851B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-10-15

Family

ID=17093254

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24272183A Granted JPS60133333A (ja) 1983-12-22 1983-12-22 圧力センサ

Country Status (1)

Country Link
JP (1) JPS60133333A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01124540U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1988-02-17 1989-08-24
WO1997000504A1 (en) * 1995-06-19 1997-01-03 Bright Star Enterprises Limited Apparatus for detecting air movements or changes in pressure

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01124540U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1988-02-17 1989-08-24
WO1997000504A1 (en) * 1995-06-19 1997-01-03 Bright Star Enterprises Limited Apparatus for detecting air movements or changes in pressure

Also Published As

Publication number Publication date
JPH0365851B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-10-15

Similar Documents

Publication Publication Date Title
JP7188824B2 (ja) 磁気抵抗慣性センサ・チップ
US5055786A (en) Barber-pole magnetoresistive magnetic field sensor
JPS60111129A (ja) 圧力センサ
JP3407689B2 (ja) 振動ジャイロ
US7594438B2 (en) Inertial sensor having a flexing element supporting a movable mass
JP2015042990A (ja) 平行な磁石間に磁束集束器を有するmems加速度計
JP2010169681A (ja) 磁束密度増加ダルソンバルmems加速度計のためのシステムおよび方法
JP2010091565A (ja) 微小電気機械システム(mems)力平行加速度計
JPS5952365B2 (ja) 角度測定又は加速度測定に使用できる測定装置
US4400979A (en) Force transducer flexure with conductors on surfaces in the neutral bending plane
JP2006177823A (ja) 加速度センサ
JPS60133333A (ja) 圧力センサ
JP2518814B2 (ja) 真空計
EP0007583B1 (en) Change of angular acceleration sensor
JPS60133332A (ja) 圧力センサ
JP2913525B2 (ja) 傾斜計
JP3024575B2 (ja) 圧力・振動検知装置
JPH0365850B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH01110210A (ja) 傾斜角度センサ
JP3024558B2 (ja) 圧力・振動検知装置
JPH07167890A (ja) 容量形加速度センサ
JPS6246266A (ja) 振動センサ
JPH10325719A (ja) 傾斜・加速度センサ
JP3371608B2 (ja) 振動ジャイロ
JPH01156669A (ja) 加速度センサ