JPS60132470U - 分子線結晶成長装置 - Google Patents

分子線結晶成長装置

Info

Publication number
JPS60132470U
JPS60132470U JP1995484U JP1995484U JPS60132470U JP S60132470 U JPS60132470 U JP S60132470U JP 1995484 U JP1995484 U JP 1995484U JP 1995484 U JP1995484 U JP 1995484U JP S60132470 U JPS60132470 U JP S60132470U
Authority
JP
Japan
Prior art keywords
molecular beam
single crystal
crystal substrate
constituent elements
beam source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1995484U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6348703Y2 (enrdf_load_stackoverflow
Inventor
淳二 斉藤
冷水　佐寿
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP1995484U priority Critical patent/JPS60132470U/ja
Publication of JPS60132470U publication Critical patent/JPS60132470U/ja
Application granted granted Critical
Publication of JPS6348703Y2 publication Critical patent/JPS6348703Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP1995484U 1984-02-15 1984-02-15 分子線結晶成長装置 Granted JPS60132470U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1995484U JPS60132470U (ja) 1984-02-15 1984-02-15 分子線結晶成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1995484U JPS60132470U (ja) 1984-02-15 1984-02-15 分子線結晶成長装置

Publications (2)

Publication Number Publication Date
JPS60132470U true JPS60132470U (ja) 1985-09-04
JPS6348703Y2 JPS6348703Y2 (enrdf_load_stackoverflow) 1988-12-14

Family

ID=30510001

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1995484U Granted JPS60132470U (ja) 1984-02-15 1984-02-15 分子線結晶成長装置

Country Status (1)

Country Link
JP (1) JPS60132470U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5640658U (enrdf_load_stackoverflow) * 1979-09-05 1981-04-15

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5640658U (enrdf_load_stackoverflow) * 1979-09-05 1981-04-15

Also Published As

Publication number Publication date
JPS6348703Y2 (enrdf_load_stackoverflow) 1988-12-14

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