JPS60132458U - 気相成長装置 - Google Patents

気相成長装置

Info

Publication number
JPS60132458U
JPS60132458U JP1826884U JP1826884U JPS60132458U JP S60132458 U JPS60132458 U JP S60132458U JP 1826884 U JP1826884 U JP 1826884U JP 1826884 U JP1826884 U JP 1826884U JP S60132458 U JPS60132458 U JP S60132458U
Authority
JP
Japan
Prior art keywords
vapor phase
phase growth
growth equipment
reaction system
quartz
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1826884U
Other languages
English (en)
Japanese (ja)
Other versions
JPH017724Y2 (enrdf_load_stackoverflow
Inventor
純 林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP1826884U priority Critical patent/JPS60132458U/ja
Publication of JPS60132458U publication Critical patent/JPS60132458U/ja
Application granted granted Critical
Publication of JPH017724Y2 publication Critical patent/JPH017724Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP1826884U 1984-02-10 1984-02-10 気相成長装置 Granted JPS60132458U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1826884U JPS60132458U (ja) 1984-02-10 1984-02-10 気相成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1826884U JPS60132458U (ja) 1984-02-10 1984-02-10 気相成長装置

Publications (2)

Publication Number Publication Date
JPS60132458U true JPS60132458U (ja) 1985-09-04
JPH017724Y2 JPH017724Y2 (enrdf_load_stackoverflow) 1989-03-01

Family

ID=30506742

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1826884U Granted JPS60132458U (ja) 1984-02-10 1984-02-10 気相成長装置

Country Status (1)

Country Link
JP (1) JPS60132458U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH017724Y2 (enrdf_load_stackoverflow) 1989-03-01

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