JPH017724Y2 - - Google Patents
Info
- Publication number
- JPH017724Y2 JPH017724Y2 JP1826884U JP1826884U JPH017724Y2 JP H017724 Y2 JPH017724 Y2 JP H017724Y2 JP 1826884 U JP1826884 U JP 1826884U JP 1826884 U JP1826884 U JP 1826884U JP H017724 Y2 JPH017724 Y2 JP H017724Y2
- Authority
- JP
- Japan
- Prior art keywords
- quartz tube
- reaction system
- substrate
- present
- jig
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010453 quartz Substances 0.000 claims description 28
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 28
- 238000001947 vapour-phase growth Methods 0.000 claims description 5
- 239000000758 substrate Substances 0.000 description 10
- 239000007795 chemical reaction product Substances 0.000 description 7
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 4
- 238000001816 cooling Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 230000002265 prevention Effects 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- XOYLJNJLGBYDTH-UHFFFAOYSA-M chlorogallium Chemical compound [Ga]Cl XOYLJNJLGBYDTH-UHFFFAOYSA-M 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1826884U JPS60132458U (ja) | 1984-02-10 | 1984-02-10 | 気相成長装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1826884U JPS60132458U (ja) | 1984-02-10 | 1984-02-10 | 気相成長装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60132458U JPS60132458U (ja) | 1985-09-04 |
| JPH017724Y2 true JPH017724Y2 (enrdf_load_stackoverflow) | 1989-03-01 |
Family
ID=30506742
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1826884U Granted JPS60132458U (ja) | 1984-02-10 | 1984-02-10 | 気相成長装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60132458U (enrdf_load_stackoverflow) |
-
1984
- 1984-02-10 JP JP1826884U patent/JPS60132458U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60132458U (ja) | 1985-09-04 |
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