JPS60130842A - 誘電体分離基板の製造方法 - Google Patents
誘電体分離基板の製造方法Info
- Publication number
- JPS60130842A JPS60130842A JP24003983A JP24003983A JPS60130842A JP S60130842 A JPS60130842 A JP S60130842A JP 24003983 A JP24003983 A JP 24003983A JP 24003983 A JP24003983 A JP 24003983A JP S60130842 A JPS60130842 A JP S60130842A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- silicon
- porous
- single crystal
- type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Element Separation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24003983A JPS60130842A (ja) | 1983-12-20 | 1983-12-20 | 誘電体分離基板の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24003983A JPS60130842A (ja) | 1983-12-20 | 1983-12-20 | 誘電体分離基板の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60130842A true JPS60130842A (ja) | 1985-07-12 |
| JPS6343888B2 JPS6343888B2 (enrdf_load_stackoverflow) | 1988-09-01 |
Family
ID=17053558
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24003983A Granted JPS60130842A (ja) | 1983-12-20 | 1983-12-20 | 誘電体分離基板の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60130842A (enrdf_load_stackoverflow) |
-
1983
- 1983-12-20 JP JP24003983A patent/JPS60130842A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6343888B2 (enrdf_load_stackoverflow) | 1988-09-01 |
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