JPS6012777B2 - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS6012777B2
JPS6012777B2 JP49022797A JP2279774A JPS6012777B2 JP S6012777 B2 JPS6012777 B2 JP S6012777B2 JP 49022797 A JP49022797 A JP 49022797A JP 2279774 A JP2279774 A JP 2279774A JP S6012777 B2 JPS6012777 B2 JP S6012777B2
Authority
JP
Japan
Prior art keywords
oxide film
low
temperature oxide
impurities
type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP49022797A
Other languages
English (en)
Japanese (ja)
Other versions
JPS50116276A (enrdf_load_stackoverflow
Inventor
三彦 上野
正孝 平沢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP49022797A priority Critical patent/JPS6012777B2/ja
Priority to GB8370/75A priority patent/GB1503017A/en
Priority to US05/554,152 priority patent/US3986896A/en
Publication of JPS50116276A publication Critical patent/JPS50116276A/ja
Publication of JPS6012777B2 publication Critical patent/JPS6012777B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
JP49022797A 1974-02-28 1974-02-28 半導体装置の製造方法 Expired JPS6012777B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP49022797A JPS6012777B2 (ja) 1974-02-28 1974-02-28 半導体装置の製造方法
GB8370/75A GB1503017A (en) 1974-02-28 1975-02-28 Method of manufacturing semiconductor devices
US05/554,152 US3986896A (en) 1974-02-28 1975-02-28 Method of manufacturing semiconductor devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49022797A JPS6012777B2 (ja) 1974-02-28 1974-02-28 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS50116276A JPS50116276A (enrdf_load_stackoverflow) 1975-09-11
JPS6012777B2 true JPS6012777B2 (ja) 1985-04-03

Family

ID=12092659

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49022797A Expired JPS6012777B2 (ja) 1974-02-28 1974-02-28 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS6012777B2 (enrdf_load_stackoverflow)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS555710B2 (enrdf_load_stackoverflow) * 1971-11-18 1980-02-08
JPS4874788A (enrdf_load_stackoverflow) * 1971-12-29 1973-10-08
JPS497626A (enrdf_load_stackoverflow) * 1972-05-23 1974-01-23
JPS5236217B2 (enrdf_load_stackoverflow) * 1972-05-26 1977-09-14

Also Published As

Publication number Publication date
JPS50116276A (enrdf_load_stackoverflow) 1975-09-11

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