JPS60119636A - 磁気記録媒体の製造装置 - Google Patents
磁気記録媒体の製造装置Info
- Publication number
- JPS60119636A JPS60119636A JP22578983A JP22578983A JPS60119636A JP S60119636 A JPS60119636 A JP S60119636A JP 22578983 A JP22578983 A JP 22578983A JP 22578983 A JP22578983 A JP 22578983A JP S60119636 A JPS60119636 A JP S60119636A
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- ferromagnetic metal
- vacuum
- thin film
- base body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 12
- 230000005291 magnetic effect Effects 0.000 title claims description 15
- 230000005294 ferromagnetic effect Effects 0.000 claims abstract description 45
- 239000002184 metal Substances 0.000 claims abstract description 39
- 229910052751 metal Inorganic materials 0.000 claims abstract description 39
- 239000010409 thin film Substances 0.000 claims abstract description 25
- 238000004381 surface treatment Methods 0.000 claims abstract description 13
- 238000005192 partition Methods 0.000 claims abstract description 10
- 238000007740 vapor deposition Methods 0.000 claims abstract description 3
- 238000011282 treatment Methods 0.000 claims description 13
- 208000028659 discharge Diseases 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 10
- 239000011241 protective layer Substances 0.000 claims description 6
- 239000010408 film Substances 0.000 abstract description 9
- 238000001704 evaporation Methods 0.000 abstract description 5
- 230000008020 evaporation Effects 0.000 abstract description 5
- 238000007738 vacuum evaporation Methods 0.000 abstract description 2
- 230000002093 peripheral effect Effects 0.000 abstract 2
- 238000000034 method Methods 0.000 description 10
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 229910017052 cobalt Inorganic materials 0.000 description 2
- 239000010941 cobalt Substances 0.000 description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 229920006254 polymer film Polymers 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 235000014113 dietary fatty acids Nutrition 0.000 description 1
- 229930195729 fatty acid Natural products 0.000 description 1
- 239000000194 fatty acid Substances 0.000 description 1
- 150000004665 fatty acids Chemical class 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Thin Magnetic Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22578983A JPS60119636A (ja) | 1983-11-30 | 1983-11-30 | 磁気記録媒体の製造装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22578983A JPS60119636A (ja) | 1983-11-30 | 1983-11-30 | 磁気記録媒体の製造装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60119636A true JPS60119636A (ja) | 1985-06-27 |
| JPH0334617B2 JPH0334617B2 (enrdf_load_stackoverflow) | 1991-05-23 |
Family
ID=16834799
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22578983A Granted JPS60119636A (ja) | 1983-11-30 | 1983-11-30 | 磁気記録媒体の製造装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60119636A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62234236A (ja) * | 1986-04-04 | 1987-10-14 | Hitachi Ltd | 磁気記録媒体の製造方法 |
-
1983
- 1983-11-30 JP JP22578983A patent/JPS60119636A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62234236A (ja) * | 1986-04-04 | 1987-10-14 | Hitachi Ltd | 磁気記録媒体の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0334617B2 (enrdf_load_stackoverflow) | 1991-05-23 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4581245A (en) | Method of manufacturing of abrasion resisting magnetic recording product | |
| US5486234A (en) | Removal of field and embedded metal by spin spray etching | |
| US4393091A (en) | Method of vacuum depositing a layer on a plastic film substrate | |
| JPH055894B2 (enrdf_load_stackoverflow) | ||
| JPS60119636A (ja) | 磁気記録媒体の製造装置 | |
| US4876113A (en) | Method for producing magnetic recording media | |
| JPS60136035A (ja) | 磁気デイスクの製造方法 | |
| US3436258A (en) | Method of forming an insulated ground plane for a cryogenic device | |
| US5418017A (en) | Method of forming oxide film | |
| JPS57164431A (en) | Magnetic recording medium and its manufacture | |
| JPS6032127A (ja) | 磁気記録媒体の製造方法 | |
| US3974043A (en) | Making a stabilized superconductor | |
| JPS58222439A (ja) | 磁気記録媒体及びその製造方法 | |
| JPS58220244A (ja) | 磁気記録媒体及びその製造方法 | |
| KR890001947B1 (ko) | 자기기록매체 | |
| JP2548231B2 (ja) | 磁気記録媒体の製造方法 | |
| JPH02175871A (ja) | 蒸着装置 | |
| JPS58133372A (ja) | イオンプレ−テイング装置 | |
| JPS6018824A (ja) | 磁気記録媒体の製造方法 | |
| KR900002610B1 (ko) | 고내식성 자성층을 갖는 자기기록 매체 및 그 자성층 형성방법 | |
| JPH05320872A (ja) | 耐食性被膜付き金属物品及びその製造方法 | |
| JPS6032126A (ja) | 磁気記録媒体の製造方法 | |
| JPH04297579A (ja) | 薄膜形成方法およびその装置 | |
| JPS60219638A (ja) | 磁気デイスクの製造方法 | |
| JPH0353693B2 (enrdf_load_stackoverflow) |