JPS60118513A - Walking beam type conveyor - Google Patents
Walking beam type conveyorInfo
- Publication number
- JPS60118513A JPS60118513A JP22624283A JP22624283A JPS60118513A JP S60118513 A JPS60118513 A JP S60118513A JP 22624283 A JP22624283 A JP 22624283A JP 22624283 A JP22624283 A JP 22624283A JP S60118513 A JPS60118513 A JP S60118513A
- Authority
- JP
- Japan
- Prior art keywords
- cam
- wafer
- bar member
- radius
- walking beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G25/00—Conveyors comprising a cyclically-moving, e.g. reciprocating, carrier or impeller which is disengaged from the load during the return part of its movement
- B65G25/02—Conveyors comprising a cyclically-moving, e.g. reciprocating, carrier or impeller which is disengaged from the load during the return part of its movement the carrier or impeller having different forward and return paths of movement, e.g. walking beam conveyors
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Reciprocating Conveyors (AREA)
Abstract
Description
【発明の詳細な説明】
本発明はウオーキングビーム式搬送装置に関し、特に半
導体製造装置の一つであるコーターのオーブン領域にお
いてウエノ・−を搬送するのに都合良く使用されるウオ
ーキングビーム式搬送装置に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a walking beam type conveying device, and more particularly to a walking beam type conveying device conveniently used for conveying wafer in the oven area of a coater, which is one type of semiconductor manufacturing equipment. .
ＩＣ，ＬＳＩ等の半導体素子を製造するためには、ウェ
ハー上へフォトレジストを塗布するためのコーター、フ
ォトレジストを塗布されたウエノ・−上へ回路パターン
を転写するためのアライナ−、パターンを転写されたウ
ェハーを現像するためのデベロッパー等の装置が使用さ
れる。ところで半導体素子製造装置の一つであるコータ
ーにおいては、スクラバーによって洗浄を終了したウエ
ノ・−面上へフォトレジストを塗布した後、このフォト
レジストを乾燥させるためにウニ・・−をオーブンへ送
り加熱している。In order to manufacture semiconductor devices such as ICs and LSIs, we need a coater to apply photoresist onto the wafer, an aligner to transfer the circuit pattern onto the wafer coated with the photoresist, and an aligner to transfer the pattern. A device such as a developer is used to develop the processed wafer. By the way, in a coater, which is one of the semiconductor device manufacturing equipment, after a photoresist is applied onto the surface of the sea urchin that has been cleaned by a scrubber, the sea urchin is sent to an oven and heated to dry the photoresist. are doing.
従来コーターにおけるウェハーの搬送はゴムベルトによ
っておこなわれていたが、オーブン領域においては約１
００℃に加熱されているため、ゴムベルトが熱によって
変質しベルト上に載置されたウェハーの裏面に付着した
り、場合によってはゴムのかすがフォトレジスト塗布面
に付着する等の不都合が生じていた。Conventionally, wafers were conveyed in coaters using rubber belts, but in the oven area, approximately 1
Because the rubber belt was heated to 00°C, the heat changed the quality of the rubber belt, causing problems such as adhesion to the back side of the wafer placed on the belt, and in some cases, rubber particles adhering to the photoresist coated surface. .
それ数本発明の目的は、コーターのオーブン領域におい
てウェハーにごみが付着するのを防止することができる
ウオーキングビーム式搬送装置を提供することにある。SUMMARY OF THE INVENTION It is an object of the present invention to provide a walking beam type transfer device that can prevent dust from adhering to wafers in the oven area of a coater.
次に添付の図面を参照して本発明の好まし℃・実施例を
説明する０第１図に示されるとおりウエノ・−は搬送ベ
ルトによってウエノ・−カセット（図示せず）からフォ
トレジスト塗布槽１３へ運ばれ、ここでウエノ・−チャ
ック１４によって保持される。Next, preferred embodiments of the present invention will be described with reference to the accompanying drawings. As shown in FIG. 13, where it is held by a Ueno-chuck 14.
フォトレジストを供給ノズル１５からウエハ−上へ滴下
させ、チャック１４を回転させることによってウエノ・
−上へフォトレジストを均一に塗布する。このようにし
てフォトレジストを塗布されたウェハーはオーブン１６
へ送られベーキング処理を施される。このときフォトレ
ジスト塗布槽１６からオーブン１６ヘウエノ・−２を搬
送するために本発明のウオーキングビーム式搬送装置力
（使用される。The photoresist is dropped from the supply nozzle 15 onto the wafer, and the chuck 14 is rotated to remove the photoresist from the wafer.
- Apply photoresist evenly on top. The wafer coated with photoresist in this way is placed in an oven 16.
It is then sent to a bakery and subjected to baking treatment. At this time, the walking beam type conveyance device of the present invention is used to convey the oven 16 from the photoresist coating tank 16 to the oven 16.
本発明のウオーキングビーム式搬送装置は、金属製のビ
ーム１の上面にウェー・−２を載置させるようになって
いる。ビーム１は４つの直線部分から成り、以下に詳述
するカム乙の回転運動に従って水平運動、往彷運動をす
るようになっている。The walking beam type conveyance device of the present invention is configured to place a wafer-2 on the upper surface of a metal beam 1. The beam 1 consists of four straight sections, and is designed to move horizontally and reciprocate in accordance with the rotational movement of a cam A, which will be described in detail below.
第２図に示されるようにカム６はその円周が、半径の小
さな円弧４と半径の大きな円弧５によって構成されてい
る。半径の小さな円弧４と半径の大きな円弧５の接続部
分乙の近傍には棒部材７の一端が連結されており、棒部
材７の他端はビーム１の下側直線部分８にしっかりと固
定された突起部９に枢動自在に連結されている。従って
カム６の回転運動に従って突起部９並びにビーム１は水
平方向へ図中矢印のように往俵運動をする。As shown in FIG. 2, the circumference of the cam 6 is constituted by a circular arc 4 with a small radius and a circular arc 5 with a large radius. One end of a rod member 7 is connected to the vicinity of the connecting portion B between the circular arc 4 with a small radius and the circular arc 5 with a large radius, and the other end of the rod member 7 is firmly fixed to the lower straight portion 8 of the beam 1. It is pivotally connected to the protrusion 9. Accordingly, in accordance with the rotational movement of the cam 6, the protrusion 9 and the beam 1 move in the horizontal direction as indicated by the arrows in the figure.
ところでカム乙の円周と当接するように、従動車１０が
１１を支点としてはね１２によって常に附勢力を与えら
れている。第２図に示されているとおり、従動車１０は
カムの円周のうち半径の小さな円弧４と当接している間
はその位置が不変である。しかしながらカム６の回転に
より従動車１０が半径の小さガ円弧４と半径の大きな円
弧５との接続部分６に当接するようＫなると、棒部材１
７はばね１２の附勢力に反して１１を支点として右まわ
りに回転しはじめ、次に半径の大きな円弧５と従動車１
０の当接により不変の位置をとる。このとき棒部材１７
はくの字形棒部材１８を図中右方向へ引っばり、その結
果くの字形棒部材１８は１９を支点として左まわりに回
転する０同じくくの字形枠部側１８と２０はその下端を
棒部材２１によって両者連結されているため、くの字形
棒部材２０も回期して２１を支点として左まわりに回転
する。くの字形棒部材１８および２Ｕれ端が、ビームの
下側直線部分８に摺動自在に固定された垂直方向案内手
段２２に連結されている。従ってくの字形棒部材１ε３
，２０が左まわりに回転するとビームの下側直線部分８
は垂直方向案内手段２２によって垂直方向上方へ０動す
る０そしてビームはこのようにして上昇した位置におい
て水平方向の移動をおこなう。Incidentally, the driven wheel 10 is always applied with an energizing force by the spring 12 using the fulcrum 11 so as to come into contact with the circumference of the cam B. As shown in FIG. 2, the position of the driven wheel 10 remains unchanged while it is in contact with the circular arc 4 having a small radius on the circumference of the cam. However, when the rotation of the cam 6 causes the driven wheel 10 to come into contact with the connecting portion 6 between the arc 4 with a small radius and the arc 5 with a large radius, the rod member 1
7 begins to rotate clockwise around 11 as a fulcrum against the biasing force of spring 12, and then rotates around arc 5 with a large radius and driven wheel 1.
It assumes an unchanged position due to contact with zero. At this time, the rod member 17
The dogleg-shaped rod member 18 is pulled to the right in the figure, and as a result, the dogleg-shaped rod member 18 rotates counterclockwise using 19 as a fulcrum. Since both are connected by the member 21, the dogleg-shaped rod member 20 also rotates and rotates counterclockwise about the fulcrum 21. The doglegged rod member 18 and the 2U ends are connected to vertical guide means 22 which are slidably fixed to the lower straight section 8 of the beam. Therefore, the dogleg-shaped rod member 1ε3
, 20 rotates counterclockwise, the lower straight part 8 of the beam
is moved vertically upward by the vertical guide means 22 and the beam thus carries out a horizontal movement in the raised position.
本発明のウオーキングビーム式搬送装置は上述したよう
な構成を有しているため、第１図に示された搬送ベルト
領域２７）に位置したウエノ・−をビーム１の上面に載
せた後ビーム１は上昇位置をとった状態で水平運動をお
こなう。そしてオーブン１６のホットプレート２４の面
上ヘウエノ・−が到達したら下降運動をおこない、ホッ
トプレート２４の面上へウェハーをおきさる０次にビー
ム１は下降位置の状態で引っ込むように水平運動をおこ
ない、再度ビーム１が上昇運動をするとき、ホットプレ
ート２４の面上に位置したウェハーをビーム１の上面に
載せる。このようにしてウニハーバ順次ホットプレート
２５の面上へおかれ、次にクーリングプレート２６の面
上まで運ばれる。Since the walking beam type conveyance device of the present invention has the above-described configuration, after the wafer placed on the conveyor belt area 27) shown in FIG. 1 is placed on the upper surface of the beam 1, performs a horizontal movement while in a raised position. Then, when the beam reaches the surface of the hot plate 24 of the oven 16, it performs a downward movement and places the wafer on the surface of the hot plate 24.Next, the beam 1 performs a horizontal movement so as to retract in the lowered position. When the beam 1 moves upward again, the wafer located on the surface of the hot plate 24 is placed on the upper surface of the beam 1. In this way, the sea urchin herbs are sequentially placed on the surface of the hot plate 25 and then transported to the surface of the cooling plate 26.
ウェハーはビーム１の間欠運動の間オープン１６におい
てベーキングされる。The wafer is baked in the open 16 during intermittent movement of the beam 1.
第１図は、本発明のウオーキングビーム式搬送装置をコ
ーターに適用した状態を示した図、第２図は、本発明の
ウオーキングビーム式搬送装置の概略図である。
１＠−・・ｅビーム ３−＠・・カム
４．５・・・・・円弧 ６・・・・・接続部分１２・・
・・・ばね １６・・・・・オーブン１８．２０・・・
・・くの字形棒部材
２２・・・・・垂直方向案内手段FIG. 1 is a diagram showing a state in which a walking beam type conveyance device of the present invention is applied to a coater, and FIG. 2 is a schematic diagram of the walking beam type conveyance device of the present invention. 1@-...E beam 3-@...Cam 4.5...Circular arc 6...Connection part 12...
...Spring 16...Oven 18.20...
... Dog-shaped rod member 22 ... Vertical guide means
Claims (1)
異なる複数の円弧を有するカムと、前記カムの回転に従
って前記ビームを水平方向へ往復移動させるための第１
の従動手段と、前記カムの円弧と当接し、円弧の半径の
変化に応じてビームを垂直方向へ移動させるための第２
の従動手段とから成ることを特徴とする、ウオーキング
ビーム式搬送装置。a beam having a surface for placing a conveyed object; a cam having a plurality of circular arcs with different radii; and a first beam for reciprocating the beam in the horizontal direction according to rotation of the cam.
a second driven means that contacts the arc of the cam and moves the beam in the vertical direction according to a change in the radius of the arc.
A walking beam type conveyance device characterized by comprising a following means.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22624283A JPS60118513A (en) | 1983-11-30 | 1983-11-30 | Walking beam type conveyor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22624283A JPS60118513A (en) | 1983-11-30 | 1983-11-30 | Walking beam type conveyor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60118513A true JPS60118513A (en) | 1985-06-26 |
Family
ID=16842118
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22624283A Pending JPS60118513A (en) | 1983-11-30 | 1983-11-30 | Walking beam type conveyor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60118513A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012006705A (en) * | 2010-06-24 | 2012-01-12 | Micro-Tec Co Ltd | Workpiece carrying device and workpiece carrying method |
| CN104097904A (en) * | 2014-07-24 | 2014-10-15 | 广西北流市智诚陶瓷自动化科技有限公司 | Intermittent automatic bowl base shifting device |
| CN111646161A (en) * | 2020-07-14 | 2020-09-11 | 福州市长乐区白英设计有限公司 | Parallel feeding device for thin-wall round tubes |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4996468A (en) * | 1972-12-21 | 1974-09-12 | ||
| JPS5419674A (en) * | 1977-07-15 | 1979-02-14 | Fujitsu Ltd | Checking mechanism of photo repeaters |
-
1983
- 1983-11-30 JP JP22624283A patent/JPS60118513A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4996468A (en) * | 1972-12-21 | 1974-09-12 | ||
| JPS5419674A (en) * | 1977-07-15 | 1979-02-14 | Fujitsu Ltd | Checking mechanism of photo repeaters |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012006705A (en) * | 2010-06-24 | 2012-01-12 | Micro-Tec Co Ltd | Workpiece carrying device and workpiece carrying method |
| CN104097904A (en) * | 2014-07-24 | 2014-10-15 | 广西北流市智诚陶瓷自动化科技有限公司 | Intermittent automatic bowl base shifting device |
| CN111646161A (en) * | 2020-07-14 | 2020-09-11 | 福州市长乐区白英设计有限公司 | Parallel feeding device for thin-wall round tubes |
| CN111646161B (en) * | 2020-07-14 | 2021-04-27 | 福州市长乐区白英设计有限公司 | Parallel feeding device for thin-wall round tubes |
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