JP2012006705A - Workpiece carrying device and workpiece carrying method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a workpiece carrying device having the good carrying efficiency of a workpiece.SOLUTION: In the workpiece carrying device in which the workpiece is loaded on a carrying table and is carried to a plurality of stages disposed along a carrying way, the workpiece carrying device includes a first and second carrying mechanisms for coexisting and holding the workpiece alternately for carrying, and a control part for controlling the first and second carrying mechanisms, the first carrying mechanism advances and retreats a first carrying table column which is arranged in a carrying direction which is composed of a plurality of carrying tables disposed in the carrying direction, the second carrying mechanism advances and retreats a second carrying table column which is arranged in a carrying direction and is composed of a plurality of carrying tables disposed in the carrying direction, and the control part advances and retreats the first and second carrying mechanisms alternately and switches the holding of the workpiece to the carrying table column side which advances from now on when positions of the carrying tables between the first and second carrying table column which advance and retreat are synchronized with each other.

Description

  The present invention relates to a workpiece transfer device that moves a workpiece to be processed to a position inside or outside a processing position, and more particularly to a workpiece transfer device that increases the transfer efficiency of a workpiece.

  When a workpiece such as a solar cell substrate, a flat display (FPD) glass substrate, or a semiconductor wafer is processed, processed, or assembled (hereinafter simply referred to as “processing”), the workpiece is processed from the loading position or the introduction position. It is necessary to move to the processing position provided with and move the processed workpiece to the unloading position (next process). A transfer device is used to transfer the workpiece between predetermined positions.

  For the transport device, for example, a belt conveyor on which the work is placed, a transport table on which the work is placed, or the like is used. Since the former can continuously convey a workpiece, it is easy to increase the conveyance amount per unit time (conveyance efficiency), but it is difficult to increase the alignment accuracy of each workpiece. In the latter case, a work holding mechanism can be provided on the transfer table, and the position of the work and the transfer table can be adjusted for each transfer table and the alignment accuracy can be increased. Therefore, it is difficult to increase the workpiece transfer efficiency.

  Therefore, for example, in the invention described in Japanese Patent Application Laid-Open No. 2010-18356 (Patent Document 1), first and second transport mechanisms (pallets) are provided in series (in a row) on a common screw shaft to each work station. A transport device is proposed in which loading and unloading are shared by each transport mechanism. In addition, the invention described in Japanese Patent Application Laid-Open No. 2007-238237 is provided with a conveying device that moves a workpiece placed on a table in a vertical direction in order to selectively convey the workpiece to a plurality of workpiece processing devices. A work transfer device having a plurality of stages is proposed.

JP 2010-18356 A JP 2007-238237 A

  However, even when the above-described first and second transport mechanisms are arranged in series and the transport tables of the respective transport mechanisms are operated separately, the operation of each transport table that reciprocates is not subjected to a non-transport time (empty load). Return time). Further, since the movable range (position) of the other conveyance table is restricted by the position (movement range) of one conveyance table, the control of the system is complicated.

  Further, even when a plurality of transport devices are arranged in the vertical direction described above, there is a return time (empty load) of the transport table that reciprocates in the operation of the transport mechanism of each stage.

  Accordingly, a first object of the present invention is to provide a workpiece transfer device with good workpiece transfer efficiency.

  The second problem of the present invention is to provide a work transfer device in which the transfer mechanism is relatively simple in addition to the first issue, and can be easily combined with various processes and process devices. To do.

  One aspect of the workpiece transfer device of the present invention that solves such a problem is a transfer device that transfers a workpiece on a transfer table on a plurality of stages arranged along the transfer path, and is arranged in parallel. And a controller for controlling the first and second transport mechanisms, wherein the first transport mechanism includes a plurality of transport mechanisms arranged in the transport direction. The first transport table row including the transport table moves forward and backward in the transport direction, and the second transport mechanism advances the second transport table row including a plurality of transport tables arranged in the transport direction in the transport direction. When the position of the conveyance tables between the first and second conveyance table rows that advance and retreat is synchronized, the control unit alternately advances and retracts the first and second conveyance mechanisms. Protection It switched to the other conveying table column side from one conveyance table column side.

  By setting it as this structure, a workpiece | work can be conveyed in one direction or the reverse direction. When the transport table row of the first (or second) transport mechanism moves (forwards) the workpiece in the transport direction, the transport table row of the second (or first) transport mechanism moves in the direction opposite to the transport direction. Since (retracting) (returning the transfer table), the loss of the return time of the transfer table in transferring the work can be substantially eliminated, and the transfer efficiency of the work can be improved.

  Preferably, in the workpiece transfer apparatus according to the present invention, the first transfer mechanism further includes a first vertical movement mechanism that moves up and down the first transfer table row, and the second transfer mechanism is the second transfer table. A second vertical movement mechanism that moves up and down the line, and the control unit moves the transfer table line of one of the first and second transfer mechanisms to the transfer table line of the other transfer mechanism when moving forward and backward. Relatively raise.

  By adopting such a configuration, there is no rubbing between the work placed on one transport table and the other transport table moving in a complementary (reverse direction) manner, and the condition is good. It suffices if there is a difference in height between the two transfer table rows, and only one of the transfer table rows can be moved up and down. When rubbing with the workpiece does not matter, the vertical movement mechanism can be omitted.

  Preferably, when the positions of the conveyance tables between the first and second conveyance table rows synchronize, the control unit moves the holding of the workpiece from the conveyance table row side advanced to the conveyance table row side retracted. Switch. Thereby, the said workpiece | work can be moved to a conveyance direction.

  Preferably, when the positions of the conveyance tables between the first and second conveyance table rows are synchronized, the control unit moves the holding of the workpiece from the conveyance table row side moved backward to the conveyance table row side advanced. Switch. Thereby, the said workpiece | work can be moved to a reverse conveyance direction.

  It is desirable that the transfer table includes a work holding mechanism that holds the placed work, and the control unit controls the work holding mechanism. Thereby, the holding of the workpiece can be switched from the conveyance table on one side to the conveyance table on the other side (the workpiece is moved).

  It is desirable that the workpiece holding mechanism is a suction mechanism that sucks the workpiece onto the transfer table. Accordingly, it is possible to easily move the workpiece between the transfer tables by switching the suction. The holding (suction, adsorption) may be suction by air (fluid) forming a negative pressure, suction by electrostatic force, suction by electromagnetic force, or the like.

  Further, a plurality of sets of the first transport mechanism and the second transport mechanism are arranged, and the control unit simultaneously advances the transport table row of one transport mechanism of each set, and the transport table of the other transport mechanism of each set. It is desirable to retract the rows simultaneously. Thereby, a plurality of workpiece conveyance paths can be configured, and workpiece conveyance efficiency can be improved.

  It is preferable that one transport table row in each set is connected by mechanical structural means, and the other transport table row in each set is connected by mechanical structural means. Thereby, the movements of the plurality of transfer table rows are the same.

  Moreover, it is desirable that the distance between the conveyance tables in each conveyance table row corresponds to the distance between the stages of the plurality of stages. As a result, the stop position of the transport table in each row is synchronized at each stage position.

  Each of the first and second transport table rows is preferably constituted by a bar-shaped member extending in the transport direction and provided with a plurality of suction holes corresponding to the positions of the plurality of transport tables. . Thereby, a structure that operates integrally as a transfer table row is obtained.

  The workpiece is held on the first and second transfer table rows. As a result, the first and second transfer tables can coexist under the work, and the work can be held alternately without moving (changing) the work.

  The stage preferably includes at least one of a carry-in stage, an alignment stage, a printing stage, and a carry-out stage. As a result, it is possible to configure a print processing system with good work transfer efficiency.

  It is desirable that a work table that is flush with the transfer table is disposed on the stage. Thereby, the conveyance table and the work table can be combined to form a work space for the work.

  Further, according to one aspect of the workpiece transfer method of the present invention, two transfer table rows that hold and transfer workpieces alternately are juxtaposed along the transfer path, and the two transfer table rows are transferred to the transfer table row. The workpieces are alternately moved forward and backward by a distance corresponding to the interval, and the workpieces are transported while holding the workpieces in the forwardly moving transport table rows when the respective transport table rows advance alternately. Here, the forward and backward movement may be any relative movement in the movement between the two transport table rows.

  According to such a method, the work moves in one direction on a conveyance path formed by two conveyance table rows that advance and retreat alternately.

  Further, when the positions of the conveyance tables of the two conveyance table rows alternately moving forward and backward are synchronized, the side of the conveyance table row where the holding of the workpiece is advanced (the side of the conveyance table row where the forward movement is finished and the backward movement is started from now on) It is desirable to switch to the side of the transport table row that has been retracted (the side of the transport table row from which the reverse operation has ended and will start moving forward). Thereby, the work is alternately moved between the two transfer table rows and is transferred in one direction (forward direction). If the workpiece is held on the side of the conveyance table row from which retraction is started, the workpiece is conveyed in the reverse direction (reverse direction).

  In the advance and retreat of the two transport table rows, it is desirable that the forward transport table row moves at a relatively higher position than the backward transport table row. Thereby, it is possible to avoid rubbing between the workpiece that is held by the transfer table and moves forward and the transfer table that moves backward.

  It is desirable that the two transfer table rows advance while holding one workpiece or a plurality of workpiece rows alternately. Thus, one workpiece or a plurality of workpiece rows are conveyed by two conveyance table rows.

  It is desirable that the two transfer table rows exist under at least one workpiece and advance and retreat alternately. As a result, it is possible to prevent the position of the workpiece from changing with the change of the conveyance table for holding the workpiece, and the workpiece can be moved (conveyed) linearly.

  It is desirable that the work is alternately held by alternately sucking the work between the transport table in one of the two transport table rows and the transport table in the other row. Thereby, holding | maintenance of a workpiece | work and switching of holding | maintenance can be performed easily. The suction (suction) is preferably air suction, electrostatic force suction, magnetic force suction, or the like.

  According to the present invention, workpieces are alternately held by two reciprocating (advancing and retreating) conveyance table rows, and one or a plurality of workpieces are led out in one direction. When one conveyance table row conveys a workpiece in one direction, the operation of the other conveyance table row returning in the opposite direction simultaneously repeats each of the two conveyance table rows alternately. Substantially does not occur.

  In addition, according to the present invention, the basic work transfer mechanism can be configured by a pair of transfer table rows having the same configuration, so that the apparatus configuration is relatively simple.

It is explanatory drawing explaining the structural example of the workpiece conveyance apparatus of this invention. It is explanatory drawing explaining the structural example (in the case of a raise of a conveyance table row | line | column) of the workpiece conveyance apparatus of this invention. It is explanatory drawing explaining the workpiece conveyance principle by the two conveyance table row | line | columns of this invention. It is explanatory drawing explaining the example of conveyance of the simultaneous several workpiece | work by the some conveyance table row | line | group grouped into 2 of this invention. It is explanatory drawing explaining two (plural) workpiece | work conveyance by the workpiece conveyance apparatus of this invention. It is explanatory drawing explaining the continuous workpiece conveyance by the workpiece conveyance apparatus of this invention. It is explanatory drawing explaining the continuous workpiece conveyance by the workpiece conveyance apparatus of this invention. It is explanatory drawing explaining the continuous workpiece conveyance by the workpiece conveyance apparatus of this invention. It is explanatory drawing explaining the continuous workpiece conveyance by the workpiece conveyance apparatus of this invention. It is explanatory drawing explaining the continuous workpiece conveyance by the workpiece conveyance apparatus of this invention. It is explanatory drawing explaining the other Example (2 sheets feeding in series) of the workpiece conveyance apparatus of this invention. It is explanatory drawing explaining the other Example (3 stage) of the workpiece conveyance apparatus of this invention. It is explanatory drawing explaining the other Example (parallel 2 sheet feeding) of the workpiece conveyance apparatus of this invention. It is explanatory drawing explaining the other Example (serial-parallel 4 sheet | seat feeding) of the workpiece conveyance apparatus of this invention.

  Hereinafter, the present invention will be described through embodiments of the invention with reference to the drawings. However, the following examples do not limit the invention according to the claims and are described in the embodiments. Not all combinations of features are essential to the solution of the invention. In the following embodiment, an example in which the work transport apparatus of the present invention is applied to a printing system (screen printing apparatus) will be described. However, the work transport apparatus of the present invention is not limited to this, For example, it can be used for a liquid crystal display manufacturing apparatus, an organic EL display manufacturing apparatus, a plasma display manufacturing apparatus, a semiconductor device manufacturing apparatus, a multicolor printing apparatus, and the like.

  In the embodiment of the present invention, two transfer table rows that hold workpieces alternately and transfer them are arranged along the transfer path, and one transfer table row is transferred to the other in the extending direction of the two transfer table rows. When moving forward relative to the table row and repeatedly moving the other transfer table row backward relative to one transfer table, the positions of the two transfer table rows moving forward and backward are synchronized. In addition, the workpiece is transferred by repeatedly switching the holding of the workpiece from the transport table row side moved forward to the transport table row side retracted.

(Example 1)
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
1 and 2 show an outline of one aspect of the workpiece transfer device of the present invention, FIG. 1A is a top view of the workpiece transfer device, and FIG. 1B is a front view of the workpiece transfer device. . FIG. 2 shows a state of the work transfer device when the first transfer table row 26 described later is raised in the configuration of FIG. 1, FIG. 2 (A) is a top view, and FIG. 2 (B) is a front view. It is. In this embodiment, an example is shown in which the workpiece W moves from the left side to the right side in the figure. Corresponding parts are denoted by the same reference numerals in the drawings.

  As shown in FIG. 1, the workpiece transfer apparatus 1 is roughly divided into a base unit 10, a first transfer mechanism 20, a second transfer mechanism 30, a carry-in (or receive) belt conveyor 41, a carry-out belt conveyor 42, a control unit 70, and the like. Consists of.

  The base unit 10 of the workpiece transfer device 1 constitutes a frame 12 for assembling a transfer mechanism. Inside the frame 12, there are provided a suction pump that performs air suction, an air pump that forms high-pressure air, a filter, a solenoid valve, air piping, a switchboard, a motor control device, and the like. On the upper surface of the frame 12, from the left side to the right side of the figure, a conveyance path for the workpiece W is formed by a carry-in belt conveyor 41, a conveyance mechanism including the first conveyance mechanism 20 and the second conveyance mechanism 30, a carry-out belt conveyor 42, and the like. One lane is formed. As will be described later, a plurality of transport paths (a plurality of transport lanes) can be arranged in parallel to increase the work transport efficiency.

  On the frame 12, for example, a workpiece loading (or receiving) stage A, an alignment adjustment stage B, a printing stage C, and a workpiece unloading stage D are arranged along the above-described conveyance path. The workpiece W supplied from a previous process (not shown) (not shown) is placed on the two conveyor belts 41a and 41b of the carry-in belt conveyor 41 and is conveyed to the workpiece carry-in stage A. The workpiece W transported to the stage A is sequentially transported to the alignment adjustment stage B, the printing stage C, and the workpiece unloading stage D by a transport mechanism including a first transport mechanism 20 and a second transport mechanism 30 described below. The stage B is provided with an alignment table 16 (rear alignment table 16a, front alignment table 16b) for adjusting the position of the workpiece W and a known position adjusting mechanism (not shown). On stage C, a printing table (working table) 18 (back printing table 18a, front printing table 18b) on which the workpiece W is placed for printing (processing) the workpiece W and a known printing mechanism (desired processing) not shown. Mechanism). The upper surface of the printing table 18 and the upper surface of the transport table 26c have the same height and form the same plane (flat surface). In the embodiment, electric wiring and terminals are formed on the substrate as the work W by screen printing. The workpiece W conveyed to the workpiece unloading stage D is placed on the two conveying belts 42a and 42b of the unloading belt conveyor 42 and is conveyed to the next process (not shown).

  The first transport mechanism 20 includes a rail 21 disposed on the upper surface of the frame 12, a slider 22 that moves on the rail 21 in the left-right direction in FIG. 1, and lift (vertical movement) mechanisms 24 a to 24 c provided on the slider 22. A transport table row (first transport table row) 26 supported by the mechanisms 24a to 24c is provided.

  In FIG. 1B, the elevating mechanisms 24b and 24c exist behind the elevating mechanisms 34a and 34b of the second transport mechanism 30 existing in front.

  The slider 22 incorporates a linear motor and a position sensor, and moves smoothly on the rail 21 by a linear guide (not shown) interposed between the slider 22 and the rail 21. The linear motor is controlled by a known technique, and the slider 22 stop position has a required accuracy. The movement of the slider 22 may be controlled by a feed screw mechanism or a reciprocating belt.

  The raising / lowering (up-and-down movement) mechanisms 24a to 24c can be configured by, for example, an air cylinder mechanism in which the piston rod moves in the up-and-down direction by the high-pressure air described above. You may comprise with an electromagnet, a screw feed mechanism, etc. The elevating mechanisms 24 a to 24 c raise or lower the entire transport table row 26 in response to a command signal from the control unit 70. In addition, it is good also as a structure which raises / lowers a conveyance table separately.

  The transport table row 26 is configured by connecting transport tables 26a to 26c each having a plurality of intake holes 28 as holding means on a flat upper surface via a coupling member (see FIG. 6 described later). ). In the embodiment, the transport table row 26 is configured by a longitudinal member extending in the bar-shaped transport direction, but is not limited thereto.

  The conveyance table row 26 (conveyance tables 26a to 26c) is moved in the left-right direction by the slider 22, and is moved in the vertical direction by the lifting / lowering (vertical movement) mechanism 24 (24a-24c). These movement controls are performed by the control unit 70.

  A second transport mechanism 30 is provided in parallel with the first transport mechanism 20. The transport mechanism 30 is configured in the same manner as the transport mechanism 20, and forms a transport path for transporting one workpiece W by the two transport mechanisms 20 and 30.

  That is, the second transport mechanism 30 includes a rail 31 disposed on the upper surface of the frame 12, a slider 32 that moves on the rail 31 in the left-right direction in FIG. 1, and a lift (vertical movement) mechanism 34 a to 34 c provided on the slider 32. A transport table row (first transport table row) 36 supported by the elevating mechanisms 34a to 34c is provided.

  The slider 32 incorporates a linear motor and a position sensor, and moves smoothly on the rail 31 by a linear guide (not shown) interposed between the slider 32 and the rail 31. The linear motor is controlled by a known technique, and the required stop position of the slider 32 is ensured. The movement of the slider 32 may be controlled by a feed screw mechanism or a reciprocating belt.

  The raising / lowering (up-and-down movement) mechanisms 34a to 34c can be configured by, for example, an air cylinder mechanism in which the piston rod moves in the up-and-down direction by the high-pressure air described above. You may comprise with an electromagnet, a screw feed mechanism, etc. The elevating mechanisms 34 a to 34 c raise or lower the entire transport table row 36 in response to a command signal from the control unit 70. In addition, it is good also as a structure which raises / lowers a conveyance table separately.

The conveyance table row 36 is configured by connecting the conveyance tables 36a to 36c each having a plurality of intake holes 38 as holding means on a flat upper surface with a coupling member. In the embodiment, the transport table row 36 is configured by a longitudinal member extending in the bar-shaped transport direction, but is not limited thereto.
The conveyance table row 36 (conveyance tables 36a to 36c) is moved in the left-right direction by the slider 32, and is moved in the up-down direction by the lifting / lowering (vertical movement) mechanism 34 (34a-34c).

  FIG. 2 shows an example in which the entire transport table row 26 of the transport mechanism 20 is lifted by the lifting mechanism 24 (24a to 24c) in the configuration of FIG. As shown in the figure, the work W is moved from the belt conveyor 41 onto the transport table 26a by raising the transport table row 26 by a predetermined amount y. The workpiece W is held on the conveyance table 26a by adsorbing the workpiece W through the suction hole 28 of the conveyance table 26a. In this state, the work table W can be moved onto the alignment table by moving the transfer table row 26 to the next stage and lowering it by a predetermined amount y. The predetermined ascending amount and descending amount y are set to a distance necessary for movement of the workpiece W between the members (between the belt conveyor and the transport table, between the transport table and the alignment / work table, and between the alignment / work table and the transport table). Is done. Further, the distance is set such that the conveyance table and the work W do not come into contact with each other when the conveyance table rows 20 and 30 are moved complementary (forward and backward).

Next, the reason why the workpiece W moves between the stages by the control of the two conveyance table rows by the control unit 70 will be described with reference to FIG. 3, parts corresponding to those in FIGS. 1 and 2 are denoted by the same reference numerals, and description thereof will be omitted.
As shown in FIG. 3, the intervals of the three transfer tables 26a to 26c and 36a to 36c in the transfer table rows 26 and 36 are set corresponding to the four stages A to D described above. Further, the stop position of each transfer table and the position of each stage are controlled so as to correspond (synchronize). The control unit 70 controls the operation of each unit as follows.

  First, in the initial state shown in FIG. 3A, the control unit 70 moves one transfer table row 26 to the left side and positions the transfer table 26a on the workpiece carry-in stage A. The workpiece W is conveyed to the workpiece loading stage A by the belt conveyor 41. Further, the other transfer table row 36 is moved to the right side, and the transfer table 36 c is positioned on the workpiece carry-out stage D.

  The controller 70 raises the conveyance table row 26 from this state, sucks the workpiece W onto the conveyance table 26a, and holds the workpiece W at a position above the belts 41a and 41b of the belt conveyor 41. Next, the entire one transfer table row 26 is moved forward and moved to the right by one stage, and the other transfer table row 36 is moved backward and moved to the left by one stage. The entire conveyance table row 26 is lowered and the work W is placed on the alignment table 16 to obtain the state shown in FIG. At this position, the alignment of the workpiece W is adjusted.

  After the alignment adjustment is completed, the control unit 70 raises the conveyance table row 36, sucks the workpiece W onto the conveyance table 36b, and holds the workpiece W at a position above the alignment table 16. Next, the entire transfer table row 36 is moved forward and moved to the right by one stage, and at the same time, the other transfer table row 26 is moved backward and moved to the left by one stage. The entire conveyance table row 36 is lowered and the work W is placed on the printing table 18 to obtain the state shown in FIG. At this position, printing on the workpiece W is performed.

  After the printing is completed, the control unit 70 raises the conveyance table row 26, sucks the workpiece W onto the conveyance table 26c, and holds the workpiece W at a position above the print table 18. Next, the entire transfer table row 26 is moved forward and moved to the right by one stage, and at the same time, the entire other transfer table row 36 is moved backward and moved to the left by one stage. The entire conveyance table row 26 is lowered to release the suction, and the workpiece W is placed on the belt conveyor 42 of the carry-out stage D, and the state shown in FIG. The workpiece W is conveyed outside.

  In the above description, the conveyance of one workpiece W has been described for convenience of explanation, but the workpieces W are continuously conveyed by the conveyance tables 26a and 36a alternately sucking the workpiece W at the workpiece loading stage A as described later. I can do it.

  Thus, according to the present embodiment, the workpieces are held alternately by the two transfer table rows that reciprocate (advance and retreat), and one or a plurality of workpieces are led out in one direction. When one conveyance table row conveys a workpiece in one direction, the operation of the other conveyance table row returning in the opposite direction simultaneously repeats each of the two conveyance table rows alternately. Substantially does not occur.

  Further, according to the present embodiment, the two conveyance table rows 26 and 36 that hold and convey the workpiece are juxtaposed along the conveyance path, and one conveyance table row and the other conveyance table row are moved in a complementary manner. When the positions of the transport tables of the two transport table rows that advance and retreat are synchronized (matched) at the stage position, the work W is held and the work W is held forward. By switching from the transport table row side to the next forward transport table row side, the work W is transferred forward by alternately transferring the transport tables of the two transport table rows.

(Example 2)
4 and 5 are explanatory views showing an example in which a plurality of lanes (two lanes in the embodiment) are installed and the plurality of workpieces W are simultaneously conveyed in parallel by the above-described two conveyance table rows. In the figure, parts corresponding to those in FIG. 3 are denoted by the same reference numerals, and description thereof will be omitted.

As shown in FIG. 4, the transport table row 26 described above is composed of transport table rows 26 ₁ and 26 ₂ , and the transport table row 36 is composed of transport table rows 36 ₁ and 36 ₂ . And conveying table columns 26 ₁ and 26 ₂ of the two conveying mechanisms arranged in parallel is connected by a connecting member 26e in the left end portion thereof, and is configured to shape the "U". As a result, the transport table rows 26 ₁ and 26 ₂ move in the same manner (the motions are synchronized). Further, the conveying table columns 36 ₁ and 36 ₂ of the two conveying mechanisms arranged in parallel is connected by a connecting member 36e in the right end portion thereof, and is configured to shape the "U". As a result, the transport table rows 36 ₁ and 36 ₂ perform the same movement (the movements are synchronized).

  Note that the connecting members 26e and 36e do not have to be used when the movements of the transport table row that is paired can be accurately synchronized by individual control of the slider and the lifting mechanism. In the embodiments described later, a plurality of coexisting transportation lanes can be operated synchronously, asynchronously operated, or a part can be operated to stop others (see FIGS. 13 and 14). ).

  The two “U” -shaped transport mechanisms described above are opposed to each other on their open side, and have a so-called nested arrangement. When the transport mechanism of one group X moves in the right direction, the transport mechanism of the other group Y moves in the left direction. When the transport mechanism of one group X moves in the left direction, the transport mechanism of the other group Y moves in the right direction. Thus, the transport mechanisms of the two groups X and Y move in a complementary manner.

In this configuration, a set of transfer table rows 26 ₁ and 36 ₁ forms a transfer route for one work W. A set of transfer table rows 26 ₂ and 36 ₂ forms a transfer route for one work W. Thereby, two workpiece conveyance routes are formed.

  Although not shown, a belt conveyor for loading workpieces and a belt conveyor for unloading workpieces are added corresponding to two workpiece conveyance routes.

  Next, the conveyance of the workpiece W by the two groups of conveyance mechanisms will be described.

First, in the initial state shown in FIG. 4A, the control unit 70 moves the transport table rows 26 ₁ and 26 ₂ of the group X to the left side and positions the transport tables 26a and 26a on the workpiece carry-in stage A. Yes. The workpieces W and W are conveyed to the workpiece loading stage A by the belt conveyors 41 and 41 described above. Further, the transfer table rows 36 ₁ and 36 ₂ of the group Y are moved to the right side, and the transfer tables 36 c and 36 c are positioned on the work carry-out stage D.

From this state, the controller 70 raises the transport table rows 26 ₁ and 26 ₂ of the group X, sucks the workpieces W and W onto the transport tables 26a and 26a, and is above the belts of the belt conveyors 41 and 41. Hold in position. Next, the transport table rows 26 ₁ and 26 ₂ of the group X are moved forward (moved to the right) and moved to the right by one stage, and the transport table rows 36 ₁ and 36 ₂ of the group Y are moved backward (moved to the left). ) And move it one stage to the left. The conveyance table rows 26 ₁ and 26 ₂ of the group X are lowered and the workpieces W and W are placed on the two alignment tables 16 and 16 (not shown), and the state shown in FIG. At this position, the alignment of the workpieces W and W is adjusted.

After the alignment adjustment is completed, the control unit 70 raises the transport table rows 36 ₁ and 36 ₂ of the group Y and sucks the workpieces W and W onto the transport tables 36b and 36b, respectively, so that they are above the alignment tables 16 and 16. Hold in position. Next, the transport table rows 36 ₁ and 36 ₂ of the group Y are moved forward and moved to the right by one stage, and simultaneously, the transport table rows 26 ₁ and 26 ₂ of the group X are moved backward and moved to the left by one stage. The transport table rows 36 ₁ and 36 ₂ of the group Y are lowered and the workpieces W and W are placed on the print tables 18a to 18c, respectively, and the state shown in FIG. At this position, printing on the workpieces W and W is performed by a printing machine (not shown).

After the printing is finished, the control unit 70 raises the transport table rows 26 ₁ and 26 ₂ of the group X and sucks the workpieces W and W onto the transport tables 26c and 26c, respectively, so that the positions are higher than the print tables 18a to 18c. To hold. Next, the conveyance table rows 26 ₁ and 26 ₂ of the group X are moved forward and moved to the right by one stage, and simultaneously, the conveyance table rows 36 ₁ and 36 ₂ of the groove Y are moved backward and moved to the left by one stage. The conveyance table rows 26 ₁ and 26 ₂ of group X are lowered to release the suction, and the workpieces W and W are placed on belt conveyors 42 and 42 (not shown) of the carry-out stage D, and the state shown in FIG. The workpieces W and W are conveyed to the outside by a belt conveyor.

  In this way, a plurality of workpieces are conveyed simultaneously in parallel. In the above-described embodiment, an example has been described in which two workpieces W are transported simultaneously by two transport routes. Similarly, n (plurality) transport routes are arranged and n workpieces are transported simultaneously. I can do it.

  In the above description of the workpiece transfer mechanism, the basic operation of transferring one or two workpieces has been described as an example for convenience of explanation. However, in a normal use state, the workpiece is continuously transferred and continuously connected to the workpiece. Processing is performed.

(Example 3)
6 to 10 are explanatory views for explaining a continuous workpiece transfer operation in the workpiece transfer apparatus shown in FIG. In each figure, parts corresponding to those in FIGS. 1 to 3 are denoted by the same reference numerals, and description thereof will be omitted.

  As shown in FIG. 6A, a work carry-in stage A, an alignment adjustment stage B, a printing stage C, and a work carry-out stage D are arranged in the work traveling direction along the work transport path. The portion not particularly related to the work transport mechanism is not shown. In the alignment adjustment stage B, only the cameras CM1 and CM2 for adjusting the position of the workpiece are shown. An alignment adjustment mechanism using an adjustment pin or the like is omitted. In the printing stage C, only the squeegee SK used for screen printing is shown, and other elements in the printing mechanism are omitted.

First, as shown in FIG. 6A, the control unit 70 moves (retracts) one conveyance table row 26 including the three conveyance tables 26a to 26c to the left side, and moves the conveyance table 26a to the workpiece loading stage A. Is located. The workpiece W ₁₁ is conveyed from the outside to the workpiece loading stage A by the belt conveyor 41. Further, the other transfer table row 36 is moved (moved forward) to the right side, and the transfer table 36 c is positioned on the workpiece carry-out stage D.

Next, as shown in FIG. 6B, the controller 70 raises the entire transport table row 26 and holds the workpiece W ₁₁ at a position above the belts 41 a and 41 b of the belt conveyor 41. At this time, the workpiece W ₁₁ is detachably held by being sucked by a plurality of suction holes 28 on the conveying table 26a of the conveyor table 26a.

As shown in FIG. 6 (C), the control unit 70 advances the entire one conveying table column 26 is moved one stage to the right, the alignment table 16 a workpiece W ₁₁ (after alignment table 16a, before the alignment table 16b) Move up. Further, the entire other transfer table row 36 is moved backward and moved to the left by one stage.

As shown in FIG. 7 (A), the control unit 70, placed on the alignment table 16 a workpiece W ₁₁ lowers the entire conveying table column 26 (16a, 16b), releases the holding of the workpiece W _11. Workpiece W ₁₁ is held appropriately sucked by a plurality of suction holes 28 provided on the alignment table 16. In this position, the position adjustment of the workpiece W ₁₁ is performed by the alignment adjusting mechanism (not shown).
As shown in FIG. 7B, the subsequent workpiece W ₁₂ is conveyed to the workpiece loading stage A by the belt conveyor 41 during the alignment adjustment of the workpiece W ₁₁ .

As shown in FIG. 7 (C), after the end alignment of the workpiece W _11, the control unit 70 sucks the workpiece W ₁₁ on the transport table 36b, by stopping the suction of the alignment table 16, conveying table column 36 The whole is raised and the workpiece W ₁₁ is held at a position above the alignment table 16. At the time of the ascent, the work W ₁₂ is sucked onto the transfer table 36 a and is held at a position higher than the belt conveyor 41.

Next, as shown in FIG. 8A, the entire conveying table row 36 is advanced and moved to the right by one stage, and the workpieces W ₁₁ and W ₁₂ are conveyed above the printing table 18 and the alignment table 16, respectively. . At the same time, the entire other transfer table row 26 is moved backward and moved one stage to the left. The transfer table 26a in the transfer table row 26 returns to the workpiece carry-in stage A.

  Thereafter, as shown in FIG. 8B, the entire conveying table row 36 is lowered and the workpieces W11 and W12 are placed on the printing table 18 and the alignment table 16, respectively.

As shown in FIG. 8C, the workpiece W ₁₃ is transferred from the outside to the workpiece loading stage A. In alignment adjustment stage B alignment adjustment of the work W ₁₂ is performed. In the printing stage C, the printing process to the workpiece W ₁₁ is performed.

  After the end of the alignment adjustment and the printing process, the control unit 70 raises the entire transport table row 26 as shown in FIG. The workpieces W11, W12, and W13 are sucked onto the transport tables 26c, 26b, and 26a, respectively, and held at positions above the print table 18, the alignment table 16, and the belt conveyor 41.

Next, as shown in FIG. 9B, the control unit 70 advances the entire transport table row 26 and moves it to the right by one stage. As a result, the workpieces W ₁₁ , W ₁₂ , and W ₁₃ are conveyed above the workpiece carry-out stage D, the printing stage C, and the alignment adjustment stage B, respectively. At the same time, the entire other transfer table row 36 is moved backward and moved to the left by one stage. The transfer table 36a of the transfer table row 36 returns to the workpiece carry-in stage A.

As shown in FIG. 10A, the control unit 70 lowers the entire transport table row 26. The workpieces W ₁₁ , W ₁₂ , and W ₁₃ are placed on the belt conveyor 42, the printing table 18, and the alignment table 16 of the carry-out stage D, respectively. The workpieces W ₁₂ and W ₁₃ are appropriately held (sucked), and the holding (suction) of the workpiece W ₁₁ is released.

As shown in FIG. 10B, the workpiece W ₁₄ is transferred from the outside to the workpiece loading stage A. In the alignment adjusting stage B alignment of the workpiece W ₁₃ it is performed. In the printing stage C, the printing process to the workpiece W ₁₂ is performed. The workpiece W11 is conveyed to the outside (post process) by the belt conveyor 42 of the carry-out stage D.

As illustrated in FIG. 10C, after the alignment adjustment and the printing process are finished, the control unit 70 raises the entire transport table row 36. The workpieces W ₁₂ , W ₁₃ , and W ₁₄ are held (sucked) on the transfer tables 36 c, 36 b, and 36 a, respectively, and are held at positions above the print table 18, alignment table 16, and belt conveyor 41.

  Thereafter, by repeating the processes of FIGS. 8A to 10C, the workpiece W is continuously conveyed to the stages A to D, and workpiece loading, alignment adjustment, printing processing, and workpiece unloading are performed. .

Example 4
Another embodiment of the present invention will be described with reference to FIGS.
In each figure, parts corresponding to those in FIGS. 1 to 3 are denoted by the same reference numerals, and description thereof will be omitted.

  FIG. 11 shows an example of a workpiece transfer apparatus that can process two workpieces at the same time. 1 differs from the workpiece transfer apparatus of FIG. 1 described above in the configuration of FIG. 1 that only one workpiece can be transferred between the stages simultaneously. There are two (a plurality) of workpieces W that can be conveyed at the same time.

  In this embodiment, in order to simultaneously process two (plural) workpieces W, the workpiece carry-in stage A, the alignment adjustment stage B, the printing stage C, and the workpiece carry-out stage D are arranged in series in the carrying direction. Further, it is configured so that simultaneous processing can be performed by two (plural) mechanisms. Corresponding to each of these stages, two (plural) transfer tables are assigned to the tables of the transfer table rows 26 and 36.

For example, two workpieces W are loaded into the workpiece loading stage A from the outside. The alignment adjustment stage B includes two alignment tables (16a ₁ and 16b ₁ , 16a ₂ and 16b ₂ ) and two alignment adjustment mechanisms (not shown). The printing stage C includes a large printing table 18 (18a, 18b) for two works W and two printing mechanisms (not shown). Printing is performed by moving the squeegee from the front to the back as shown. In the workpiece unloading stage D, the two workpieces W are simultaneously unloaded to the outside (post process).
In this embodiment, an example in which two transfer tables are provided for one stage is shown. However, n (plural) pieces (in series) connected in series (or connected) to one stage in the traveling direction. Obviously, it can be configured to include a transfer table.

  According to the present embodiment, even if the conveyance path has a single lane configuration, two (plurality) are simultaneously provided between each stage by using two (plurality) conveyance tables per stage arranged in series. Can move the workpiece.

(Example 5)
FIG. 12 shows an example in which the workpiece carry-in stage A and the alignment adjustment stage B are configured by a workpiece receiving alignment adjustment unit AB which is one stage in the configuration example of the workpiece transfer apparatus shown in FIG. The workpiece receiving alignment adjusting unit AB performs reception of the workpiece W carried in from the outside and alignment adjustment for printing of the received workpiece W. For this reason, the belt conveyor 41 enters the inside of the alignment table 16. The other printing stages C and workpiece carry-out stages D have the same configuration and the same operation.

  According to the configuration of this embodiment, the conveyance tables in the conveyance table rows 26 and 36 can be reduced by one stage.

(Example 6)
Next, an example in which a plurality of transportation lanes coexist will be described. In the embodiment, for convenience of explanation, the explanation is made with two transportation lanes, but it is obvious that the construction can be made up of a plurality of transportation lanes.

As shown in FIG. 13, two (plural) conveyance lanes are arranged in the direction in which the workpiece W is conveyed and in the direction orthogonal to the direction. Two works W ₁₁ and W ₁₂ , W ₁₃ and W ₁₄ ,... Are supplied in parallel to one stage by two transfer lanes.

In this example, the transport lanes are close to each other, and the print table 18 includes a rear print table 18a, a front print table b, and a middle print table c. Thereby, it functions as a printing table for two units. Printing is performed by moving the squeegee in the horizontal direction (left-right direction in the figure).
Each transportation lane may operate synchronously with each other or may operate asynchronously. Moreover, it is good also as operating one part among several conveyance lanes and stopping others.

  According to the configuration of this embodiment, each conveyance lane can be individually controlled, so that it is easy to cope with an increase or decrease in work throughput. Further, there is an advantage that the entire length of the transport path can be shortened as compared with the configuration of FIG.

(Example 7)
In this embodiment, as shown in FIG. 14, a plurality (n) of transfer lanes coexist in the direction orthogonal to the workpiece transfer direction. Further, the transport table row of each transport lane includes a plurality (m) of transport tables per stage. Thereby, n × m workpieces W are simultaneously transferred to one stage.

In this example, the workpiece carry-in alignment adjustment part AB is provided with four alignment adjustment mechanisms (not shown). The printing unit C is also provided with four printing mechanisms (not shown). Four workpieces W _{11 to} W ₁₄ , W _{15 to} W ₁₈ ,... Are simultaneously conveyed to each stage.

  Also in this embodiment, as in the case of FIG. 13, it is possible to select an operation that synchronizes each transportation lane, an asynchronous operation, an individual operation for each transportation lane, and the like.

  According to this embodiment, there is an advantage that the number of workpieces W to be simultaneously conveyed can be increased to increase the efficiency of workpiece processing.

  As described above, in the embodiment of the present invention, each row member of two transfer table rows having a plurality of transfer tables is alternately moved (reciprocated), and the work is held on the transfer table moving in the transfer direction. Is switched to move the workpiece in the transport direction. For this reason, when the member of one conveyance table row conveys the workpiece (forward movement), the member of the other conveyance table row returns (reverse movement), so that the workpiece can be conveyed without interruption (continuously). The number of workpieces transferred per unit time (work transfer efficiency) can be increased.

  Further, according to the embodiment of the present invention, it is possible to increase the work transfer amount by arranging a plurality of transfer lanes and assigning a plurality of transfer tables per stage to each transfer lane.

  Further, according to the embodiment of the present invention, since the row of one or a plurality of workpieces linearly moves (conveys) between a plurality of stages, there is no need to change the workpiece path by a flow guide. There is no damage to the work edge.

  In addition, when the apparatus configuration of the embodiment of the present invention is compared with an apparatus (turn table type work conveyance apparatus) that places a work on a rotary table and conveys the work, the work conveyance path is linear. This makes it easy to design and arrange production lines. The floor area (installation area) occupied by the work transfer device is greatly reduced, and the transfer device can be relatively miniaturized. It can be easily incorporated into a printing system or a manufacturing system. Further, since the weight of the transport mechanism can be reduced, it is easy to reduce power consumption and control the operation of the apparatus, and to increase the transport speed.

  Further, when the apparatus configuration of the embodiment of the present invention is compared with a turntable type or belt conveyor type work conveyance device, the inertial mass of the moving mechanism is small, so that the alignment accuracy at each stage in the work conveyance is high. Can be convenient.

  In the embodiment, the example is described in which the workpiece is conveyed and printed on the workpiece. However, the present invention is not limited to a specific process. In addition, examples of the work include a solar cell substrate, a glass substrate of a flat display (FPD), a semiconductor wafer, and the like. However, the work is not limited to these, and anything that can be transported by the mechanism of the present invention. good.

  According to the present invention, in a workpiece conveyance mechanism that reciprocates and conveys a workpiece, one workpiece conveyance mechanism holds and conveys one or a plurality of workpieces by alternately operating the two workpiece conveyance mechanisms. Sometimes the other workpiece transfer mechanism can be returned, and the workpiece can be transferred without interruption.

  The above-described embodiments and application examples of the present invention can be used in combination as appropriate according to the application, or can be used with modifications or improvements, and the present invention is not limited to the description of the above-described embodiments. It is apparent from the description of the scope of claims that the embodiments added with such combinations or changes or improvements can be included in the technical scope of the present invention.

16 alignment table, 18 printing table, 20 first transport mechanism, 22 slider, 24, 24a-24c lifting mechanism, 26 first transport table row, 26a-26c transport table, 28 air intake hole, 30 second transport mechanism, 32 slider , 34 a - 34 c lifting mechanism, 36 a second conveying table column, 36 a - 36 c transport table 38 suction holes, 41 and 42 the belt conveyor, the control unit 70, CM _1, CM ₂ cameras, SK squeegee, A work loading stage, B Alignment adjustment stage, C printing stage, D work unloading stage, W, W ₁₁ -W ₁₈ work

Claims (18)

A transport device that transports workpieces placed on a transport table on a plurality of stages arranged along a transport path,
A first and second transfer mechanism for holding the workpiece alternately and transferring the workpiece,
A controller for controlling the first and second transport mechanisms,
The first transport mechanism advances and retracts a first transport table row including a plurality of transport tables arranged in the transport direction in the transport direction,
The second transport mechanism moves forward and backward in a transport direction in a second transport table row including a plurality of transport tables arranged in the transport direction;
The control unit alternately advances and retracts the first and second transport mechanisms, and holds the work when one of the transport tables between the first and second transport table rows moving forward and backward is synchronized. A workpiece transfer device that switches from the transfer table row side to the other transfer table row side. Furthermore,
The first transport mechanism includes a first vertical movement mechanism that moves up and down the first transport table row,
The second transport mechanism includes a second vertical movement mechanism that moves the second transport table row up and down,
The said control part raises the conveyance table row | line | column of one conveyance mechanism of the said 1st and 2nd conveyance mechanisms relatively rather than the conveyance table row | line of the other conveyance mechanism in the said advance / retreat. Work transfer device.   The control unit switches the holding of the workpiece from the transport table row side advanced to the transport table row side retracted when the positions of the transport tables between the first and second transport table rows are synchronized. Item 3. The workpiece transfer apparatus according to Item 1 or 2.   The control unit switches the holding of the workpiece from the retracted transport table row side to the advanced transport table row side when the positions of the transport tables between the first and second transport table rows are synchronized. Item 3. The workpiece transfer apparatus according to Item 1 or 2. The transfer table includes a work holding mechanism for holding the placed work.
The workpiece transfer device according to claim 1, wherein the control unit controls the workpiece holding mechanism.   The workpiece transfer apparatus according to claim 5, wherein the workpiece holding mechanism is a suction mechanism that sucks the workpiece onto the transfer table. Furthermore,
A plurality of sets of the first transport mechanism and the second transport mechanism are arranged,
The workpiece transfer according to any one of claims 1 to 6, wherein the control unit simultaneously advances the transfer table row of one transfer mechanism of each set and simultaneously moves the transfer table row of the other transfer mechanism of each set backward. apparatus.   The workpiece transfer apparatus according to claim 7, wherein one transfer table row of each set is connected by mechanical structural means, and the other transfer table row of each set is connected by mechanical structural means.   9. The workpiece transfer apparatus according to claim 1, wherein a distance between transfer tables in each transfer table row corresponds to a distance between the stages of the plurality of stages.   Each of the said 1st and 2nd conveyance table row | line | column is comprised by the rod-shaped member which extended in the said conveyance direction and was provided with the some suction hole corresponding to the position of these conveyance tables. The work conveyance apparatus in any one of 1 thru | or 9.   The workpiece conveyance device according to any one of claims 1 to 9, wherein the workpiece is held on a row of the first and second conveyance table rows.   The workpiece transfer apparatus according to claim 1, wherein the stage includes at least one of a carry-in stage, an alignment stage, a printing stage, and a carry-out stage.   The work transfer apparatus according to claim 1, wherein a work table that is flush with the transfer table is disposed on the stage. A method for conveying a workpiece,
Two transfer table rows that hold workpieces alternately and transfer them side by side along the transfer path,
The two transport table rows are alternately advanced and retracted by a distance corresponding to the transport table interval of the transport table row,
Transporting the work by holding the work in the transport table row to advance when each transport table row advances alternately,
The workpiece transfer method.   The workpiece according to claim 14, wherein when the positions of the conveyance tables of the two conveyance table rows alternately moving back and forth are synchronized, the workpiece holding is switched from the conveyance table row side advanced to the conveyance table row side retracted. Transport method.   The workpiece transfer method according to claim 14 or 15, wherein, in advance and retreat of the two transfer table rows, the forward transfer table row moves at a relatively higher position than the reverse transfer table row.   17. The workpiece transfer method according to claim 14, wherein the two transfer table rows advance while holding one workpiece or a plurality of workpiece rows alternately.   The alternating holding of the workpiece is performed by alternately sucking the workpiece between the conveyance table of one row of the two conveyance table rows and the conveyance table of the other row. The workpiece transfer method described.

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