JPS60118481A - 吸着検出装置 - Google Patents

吸着検出装置

Info

Publication number
JPS60118481A
JPS60118481A JP22591583A JP22591583A JPS60118481A JP S60118481 A JPS60118481 A JP S60118481A JP 22591583 A JP22591583 A JP 22591583A JP 22591583 A JP22591583 A JP 22591583A JP S60118481 A JPS60118481 A JP S60118481A
Authority
JP
Japan
Prior art keywords
vacuum
degree
type electronic
chip
nozzle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP22591583A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0327353B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
瀬野　眞透
義彦 三沢
橋口　義信
嘉信 前田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP22591583A priority Critical patent/JPS60118481A/ja
Publication of JPS60118481A publication Critical patent/JPS60118481A/ja
Publication of JPH0327353B2 publication Critical patent/JPH0327353B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Manipulator (AREA)
JP22591583A 1983-11-30 1983-11-30 吸着検出装置 Granted JPS60118481A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22591583A JPS60118481A (ja) 1983-11-30 1983-11-30 吸着検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22591583A JPS60118481A (ja) 1983-11-30 1983-11-30 吸着検出装置

Publications (2)

Publication Number Publication Date
JPS60118481A true JPS60118481A (ja) 1985-06-25
JPH0327353B2 JPH0327353B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-04-15

Family

ID=16836875

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22591583A Granted JPS60118481A (ja) 1983-11-30 1983-11-30 吸着検出装置

Country Status (1)

Country Link
JP (1) JPS60118481A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6486088A (en) * 1987-09-29 1989-03-30 Matsushita Electric Ind Co Ltd Apparatus for detecting suction of part
JPH0166998U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1987-10-23 1989-04-28
WO1993004963A1 (en) * 1991-09-09 1993-03-18 Smc Kabushiki Kaisha Vacuum-chuck ascertaining apparatus and vacuum-chuck ascertaining pressure level setting method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49134056A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1973-04-25 1974-12-24

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49134056A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1973-04-25 1974-12-24

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6486088A (en) * 1987-09-29 1989-03-30 Matsushita Electric Ind Co Ltd Apparatus for detecting suction of part
JPH0166998U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1987-10-23 1989-04-28
WO1993004963A1 (en) * 1991-09-09 1993-03-18 Smc Kabushiki Kaisha Vacuum-chuck ascertaining apparatus and vacuum-chuck ascertaining pressure level setting method

Also Published As

Publication number Publication date
JPH0327353B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-04-15

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