JPH0327353B2 - - Google Patents

Info

Publication number
JPH0327353B2
JPH0327353B2 JP58225915A JP22591583A JPH0327353B2 JP H0327353 B2 JPH0327353 B2 JP H0327353B2 JP 58225915 A JP58225915 A JP 58225915A JP 22591583 A JP22591583 A JP 22591583A JP H0327353 B2 JPH0327353 B2 JP H0327353B2
Authority
JP
Japan
Prior art keywords
vacuum
chip
electronic component
degree
type electronic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58225915A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60118481A (ja
Inventor
Masayuki Seno
Yoshihiko Misawa
Yoshinobu Hashiguchi
Yoshinobu Maeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP22591583A priority Critical patent/JPS60118481A/ja
Publication of JPS60118481A publication Critical patent/JPS60118481A/ja
Publication of JPH0327353B2 publication Critical patent/JPH0327353B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Manipulator (AREA)
JP22591583A 1983-11-30 1983-11-30 吸着検出装置 Granted JPS60118481A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22591583A JPS60118481A (ja) 1983-11-30 1983-11-30 吸着検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22591583A JPS60118481A (ja) 1983-11-30 1983-11-30 吸着検出装置

Publications (2)

Publication Number Publication Date
JPS60118481A JPS60118481A (ja) 1985-06-25
JPH0327353B2 true JPH0327353B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-04-15

Family

ID=16836875

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22591583A Granted JPS60118481A (ja) 1983-11-30 1983-11-30 吸着検出装置

Country Status (1)

Country Link
JP (1) JPS60118481A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2629738B2 (ja) * 1987-09-29 1997-07-16 松下電器産業株式会社 部品吸着検出装置
JPH0727119Y2 (ja) * 1987-10-23 1995-06-21 豊田合成株式会社 残材吸着装置
EP0603396B1 (en) * 1991-09-09 1998-05-13 Smc Kabushiki Kaisha Vacuum-chuck ascertaining apparatus and vacuum-chuck ascertaining pressure level setting method

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49134056A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1973-04-25 1974-12-24

Also Published As

Publication number Publication date
JPS60118481A (ja) 1985-06-25

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