JPS60117629A - 真空処理装置 - Google Patents

真空処理装置

Info

Publication number
JPS60117629A
JPS60117629A JP58224122A JP22412283A JPS60117629A JP S60117629 A JPS60117629 A JP S60117629A JP 58224122 A JP58224122 A JP 58224122A JP 22412283 A JP22412283 A JP 22412283A JP S60117629 A JPS60117629 A JP S60117629A
Authority
JP
Japan
Prior art keywords
valve
vacuum
pressure
high vacuum
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58224122A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0354458B2 (en:Method
Inventor
Norio Kanai
金井　謙雄
Fumio Shibata
柴田　史雄
Tsunehiko Tsubone
恒彦 坪根
Sumio Fukuda
福田　澄雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP58224122A priority Critical patent/JPS60117629A/ja
Publication of JPS60117629A publication Critical patent/JPS60117629A/ja
Publication of JPH0354458B2 publication Critical patent/JPH0354458B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P50/00—

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP58224122A 1983-11-30 1983-11-30 真空処理装置 Granted JPS60117629A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58224122A JPS60117629A (ja) 1983-11-30 1983-11-30 真空処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58224122A JPS60117629A (ja) 1983-11-30 1983-11-30 真空処理装置

Publications (2)

Publication Number Publication Date
JPS60117629A true JPS60117629A (ja) 1985-06-25
JPH0354458B2 JPH0354458B2 (en:Method) 1991-08-20

Family

ID=16808881

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58224122A Granted JPS60117629A (ja) 1983-11-30 1983-11-30 真空処理装置

Country Status (1)

Country Link
JP (1) JPS60117629A (en:Method)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63219130A (ja) * 1986-11-10 1988-09-12 テクニメディックス　コーポレイション 集積回路デバイスの歩留りを改良する方法および装置
JPH01218013A (ja) * 1988-02-26 1989-08-31 Tel Sagami Ltd 反応装置
JPH02224231A (ja) * 1988-11-30 1990-09-06 Tokyo Electron Ltd プラズマ処理装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5516475A (en) * 1978-07-21 1980-02-05 Nec Corp Plasma processing unit
JPS57133633A (en) * 1981-02-13 1982-08-18 Anelva Corp Dry-etching device
JPS59114814A (ja) * 1982-12-21 1984-07-03 Fujitsu Ltd 真空排気方法
JPS6091642A (ja) * 1983-10-25 1985-05-23 Toshiba Corp 半導体製造用真空装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5516475A (en) * 1978-07-21 1980-02-05 Nec Corp Plasma processing unit
JPS57133633A (en) * 1981-02-13 1982-08-18 Anelva Corp Dry-etching device
JPS59114814A (ja) * 1982-12-21 1984-07-03 Fujitsu Ltd 真空排気方法
JPS6091642A (ja) * 1983-10-25 1985-05-23 Toshiba Corp 半導体製造用真空装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63219130A (ja) * 1986-11-10 1988-09-12 テクニメディックス　コーポレイション 集積回路デバイスの歩留りを改良する方法および装置
JPH01218013A (ja) * 1988-02-26 1989-08-31 Tel Sagami Ltd 反応装置
JPH02224231A (ja) * 1988-11-30 1990-09-06 Tokyo Electron Ltd プラズマ処理装置

Also Published As

Publication number Publication date
JPH0354458B2 (en:Method) 1991-08-20

Similar Documents

Publication Publication Date Title
EP1081380A4 (en) APPARATUS AND METHOD FOR PUMPING
EP0690235B1 (en) Method and apparatus for evacuating vacuum system
KR920010777A (ko) 기판처리장치 및 기판 처리방법
JPS60117629A (ja) 真空処理装置
JPH03102820A (ja) 真空処理装置
JPH02216823A (ja) 処理方法
JP2000223055A (ja) 真空処理装置及びイオンポンプ
JPS5685826A (en) Vacuum treatment device
JPH0334540A (ja) プラズマ処理装置およびその装置におけるウエハ温度制御方法
JPS5638587A (en) Vacuum device
KR970052153A (ko) 이온주입시스템의 진공처리장치
JPH02159018A (ja) 減圧式気相成長装置
JPH03129821A (ja) 半導体装置の製造方法
JPS59154025A (ja) 半導体製造装置反応室のリ−ク方法
JPH0435408Y2 (en:Method)
JP3778296B2 (ja) 真空装置
JPH05106042A (ja) 半導体装置の製造装置及び半導体装置の製造方法
JPH01125933A (ja) 真空処理方法及び装置
JPS5516475A (en) Plasma processing unit
JPS63177520A (ja) ドライエッチング方法
JPH09184482A (ja) 真空排気装置構成
JPS6333962Y2 (en:Method)
JPH0429402Y2 (en:Method)
JPS5423464A (en) Exhaust system for vacuum unit
JP2946733B2 (ja) 真空排気装置