JPS60116895A - 真空ポンプ - Google Patents
真空ポンプInfo
- Publication number
- JPS60116895A JPS60116895A JP22415783A JP22415783A JPS60116895A JP S60116895 A JPS60116895 A JP S60116895A JP 22415783 A JP22415783 A JP 22415783A JP 22415783 A JP22415783 A JP 22415783A JP S60116895 A JPS60116895 A JP S60116895A
- Authority
- JP
- Japan
- Prior art keywords
- stage
- impeller
- pump stage
- viscous
- housing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D23/00—Other rotary non-positive-displacement pumps
- F04D23/008—Regenerative pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22415783A JPS60116895A (ja) | 1983-11-30 | 1983-11-30 | 真空ポンプ |
DE19843442843 DE3442843A1 (de) | 1983-11-30 | 1984-11-23 | Vakuumpumpe |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22415783A JPS60116895A (ja) | 1983-11-30 | 1983-11-30 | 真空ポンプ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60116895A true JPS60116895A (ja) | 1985-06-24 |
JPH0477160B2 JPH0477160B2 (tr) | 1992-12-07 |
Family
ID=16809422
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP22415783A Granted JPS60116895A (ja) | 1983-11-30 | 1983-11-30 | 真空ポンプ |
Country Status (2)
Country | Link |
---|---|
JP (1) | JPS60116895A (tr) |
DE (1) | DE3442843A1 (tr) |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63266188A (ja) * | 1987-04-24 | 1988-11-02 | Osaka Shinku Kiki Seisakusho:Kk | 複合真空ポンプ |
JPS6447994U (tr) * | 1987-09-18 | 1989-03-24 | ||
JPH01187396A (ja) * | 1988-01-22 | 1989-07-26 | Hitachi Ltd | 真空ポンプ |
JPH0223297A (ja) * | 1988-07-13 | 1990-01-25 | Osaka Shinku Kiki Seisakusho:Kk | 円周溝真空ポンプ |
JPH0255897A (ja) * | 1988-08-17 | 1990-02-26 | Osaka Shinku Kiki Seisakusho:Kk | 複合真空ポンプ |
JPH0275796A (ja) * | 1988-09-12 | 1990-03-15 | Osaka Shinku Kiki Seisakusho:Kk | 複合真空ポンプ |
CN103423160A (zh) * | 2013-09-04 | 2013-12-04 | 张周卫 | 螺旋压缩膨胀制冷机用变螺距螺旋压缩机头 |
CN103644118A (zh) * | 2013-12-17 | 2014-03-19 | 储继国 | 并联环流泵、组合环流泵、复合环流泵及其抽气机组 |
RU2543917C1 (ru) * | 2014-03-24 | 2015-03-10 | Общество с ограниченной ответственностью "Владимирский центр механической обработки" | Двухпоточный турбомолекулярный вакуумный насос с гибридными проточными частями |
JP2017020502A (ja) * | 2015-07-01 | 2017-01-26 | プファイファー・ヴァキューム・ゲーエムベーハー | スプリットフロー真空ポンプ及びスプリットフロー真空ポンプを有する真空システム |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61247893A (ja) * | 1985-04-26 | 1986-11-05 | Hitachi Ltd | 真空ポンプ |
DE3728154C2 (de) * | 1987-08-24 | 1996-04-18 | Balzers Pfeiffer Gmbh | Mehrstufige Molekularpumpe |
US5358373A (en) * | 1992-04-29 | 1994-10-25 | Varian Associates, Inc. | High performance turbomolecular vacuum pumps |
DE4314418A1 (de) * | 1993-05-03 | 1994-11-10 | Leybold Ag | Reibungsvakuumpumpe mit unterschiedlich gestalteten Pumpenabschnitten |
US5449270A (en) * | 1994-06-24 | 1995-09-12 | Varian Associates, Inc. | Tangential flow pumping channel for turbomolecular pumps |
DE10114585A1 (de) * | 2001-03-24 | 2002-09-26 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
EP2108844A3 (en) * | 2008-03-26 | 2013-09-18 | Ebara Corporation | Turbo vacuum pump |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5048512A (tr) * | 1973-03-30 | 1975-04-30 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2405890A1 (de) * | 1974-02-07 | 1975-08-14 | Siemens Ag | Seitenkanal-ringverdichter |
US3969039A (en) * | 1974-08-01 | 1976-07-13 | American Optical Corporation | Vacuum pump |
-
1983
- 1983-11-30 JP JP22415783A patent/JPS60116895A/ja active Granted
-
1984
- 1984-11-23 DE DE19843442843 patent/DE3442843A1/de not_active Withdrawn
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5048512A (tr) * | 1973-03-30 | 1975-04-30 |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63266188A (ja) * | 1987-04-24 | 1988-11-02 | Osaka Shinku Kiki Seisakusho:Kk | 複合真空ポンプ |
JPS6447994U (tr) * | 1987-09-18 | 1989-03-24 | ||
JPH01187396A (ja) * | 1988-01-22 | 1989-07-26 | Hitachi Ltd | 真空ポンプ |
JPH0223297A (ja) * | 1988-07-13 | 1990-01-25 | Osaka Shinku Kiki Seisakusho:Kk | 円周溝真空ポンプ |
JPH0255897A (ja) * | 1988-08-17 | 1990-02-26 | Osaka Shinku Kiki Seisakusho:Kk | 複合真空ポンプ |
JPH0275796A (ja) * | 1988-09-12 | 1990-03-15 | Osaka Shinku Kiki Seisakusho:Kk | 複合真空ポンプ |
CN103423160A (zh) * | 2013-09-04 | 2013-12-04 | 张周卫 | 螺旋压缩膨胀制冷机用变螺距螺旋压缩机头 |
CN103423160B (zh) * | 2013-09-04 | 2015-11-25 | 张周卫 | 螺旋压缩膨胀制冷机用变螺距螺旋压缩机头 |
CN103644118A (zh) * | 2013-12-17 | 2014-03-19 | 储继国 | 并联环流泵、组合环流泵、复合环流泵及其抽气机组 |
RU2543917C1 (ru) * | 2014-03-24 | 2015-03-10 | Общество с ограниченной ответственностью "Владимирский центр механической обработки" | Двухпоточный турбомолекулярный вакуумный насос с гибридными проточными частями |
JP2017020502A (ja) * | 2015-07-01 | 2017-01-26 | プファイファー・ヴァキューム・ゲーエムベーハー | スプリットフロー真空ポンプ及びスプリットフロー真空ポンプを有する真空システム |
Also Published As
Publication number | Publication date |
---|---|
JPH0477160B2 (tr) | 1992-12-07 |
DE3442843A1 (de) | 1985-06-05 |
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