JPS60116895A - 真空ポンプ - Google Patents

真空ポンプ

Info

Publication number
JPS60116895A
JPS60116895A JP22415783A JP22415783A JPS60116895A JP S60116895 A JPS60116895 A JP S60116895A JP 22415783 A JP22415783 A JP 22415783A JP 22415783 A JP22415783 A JP 22415783A JP S60116895 A JPS60116895 A JP S60116895A
Authority
JP
Japan
Prior art keywords
stage
impeller
pump stage
viscous
housing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP22415783A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0477160B2 (de
Inventor
Masahiro Mase
正弘 真瀬
Yoshitsugu Tsutsumi
芳紹 堤
Minoru Taniyama
実 谷山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP22415783A priority Critical patent/JPS60116895A/ja
Priority to DE19843442843 priority patent/DE3442843A1/de
Publication of JPS60116895A publication Critical patent/JPS60116895A/ja
Publication of JPH0477160B2 publication Critical patent/JPH0477160B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
JP22415783A 1983-11-30 1983-11-30 真空ポンプ Granted JPS60116895A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP22415783A JPS60116895A (ja) 1983-11-30 1983-11-30 真空ポンプ
DE19843442843 DE3442843A1 (de) 1983-11-30 1984-11-23 Vakuumpumpe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22415783A JPS60116895A (ja) 1983-11-30 1983-11-30 真空ポンプ

Publications (2)

Publication Number Publication Date
JPS60116895A true JPS60116895A (ja) 1985-06-24
JPH0477160B2 JPH0477160B2 (de) 1992-12-07

Family

ID=16809422

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22415783A Granted JPS60116895A (ja) 1983-11-30 1983-11-30 真空ポンプ

Country Status (2)

Country Link
JP (1) JPS60116895A (de)
DE (1) DE3442843A1 (de)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63266188A (ja) * 1987-04-24 1988-11-02 Osaka Shinku Kiki Seisakusho:Kk 複合真空ポンプ
JPS6447994U (de) * 1987-09-18 1989-03-24
JPH01187396A (ja) * 1988-01-22 1989-07-26 Hitachi Ltd 真空ポンプ
JPH0223297A (ja) * 1988-07-13 1990-01-25 Osaka Shinku Kiki Seisakusho:Kk 円周溝真空ポンプ
JPH0255897A (ja) * 1988-08-17 1990-02-26 Osaka Shinku Kiki Seisakusho:Kk 複合真空ポンプ
JPH0275796A (ja) * 1988-09-12 1990-03-15 Osaka Shinku Kiki Seisakusho:Kk 複合真空ポンプ
CN103423160A (zh) * 2013-09-04 2013-12-04 张周卫 螺旋压缩膨胀制冷机用变螺距螺旋压缩机头
CN103644118A (zh) * 2013-12-17 2014-03-19 储继国 并联环流泵、组合环流泵、复合环流泵及其抽气机组
RU2543917C1 (ru) * 2014-03-24 2015-03-10 Общество с ограниченной ответственностью "Владимирский центр механической обработки" Двухпоточный турбомолекулярный вакуумный насос с гибридными проточными частями
JP2017020502A (ja) * 2015-07-01 2017-01-26 プファイファー・ヴァキューム・ゲーエムベーハー スプリットフロー真空ポンプ及びスプリットフロー真空ポンプを有する真空システム

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61247893A (ja) * 1985-04-26 1986-11-05 Hitachi Ltd 真空ポンプ
DE3728154C2 (de) * 1987-08-24 1996-04-18 Balzers Pfeiffer Gmbh Mehrstufige Molekularpumpe
US5358373A (en) * 1992-04-29 1994-10-25 Varian Associates, Inc. High performance turbomolecular vacuum pumps
DE4314418A1 (de) * 1993-05-03 1994-11-10 Leybold Ag Reibungsvakuumpumpe mit unterschiedlich gestalteten Pumpenabschnitten
US5449270A (en) * 1994-06-24 1995-09-12 Varian Associates, Inc. Tangential flow pumping channel for turbomolecular pumps
DE10114585A1 (de) * 2001-03-24 2002-09-26 Pfeiffer Vacuum Gmbh Vakuumpumpe
EP2108844A3 (de) * 2008-03-26 2013-09-18 Ebara Corporation Turbovakuumpumpe

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5048512A (de) * 1973-03-30 1975-04-30

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2405890A1 (de) * 1974-02-07 1975-08-14 Siemens Ag Seitenkanal-ringverdichter
US3969039A (en) * 1974-08-01 1976-07-13 American Optical Corporation Vacuum pump

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5048512A (de) * 1973-03-30 1975-04-30

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63266188A (ja) * 1987-04-24 1988-11-02 Osaka Shinku Kiki Seisakusho:Kk 複合真空ポンプ
JPS6447994U (de) * 1987-09-18 1989-03-24
JPH01187396A (ja) * 1988-01-22 1989-07-26 Hitachi Ltd 真空ポンプ
JPH0223297A (ja) * 1988-07-13 1990-01-25 Osaka Shinku Kiki Seisakusho:Kk 円周溝真空ポンプ
JPH0255897A (ja) * 1988-08-17 1990-02-26 Osaka Shinku Kiki Seisakusho:Kk 複合真空ポンプ
JPH0275796A (ja) * 1988-09-12 1990-03-15 Osaka Shinku Kiki Seisakusho:Kk 複合真空ポンプ
CN103423160A (zh) * 2013-09-04 2013-12-04 张周卫 螺旋压缩膨胀制冷机用变螺距螺旋压缩机头
CN103423160B (zh) * 2013-09-04 2015-11-25 张周卫 螺旋压缩膨胀制冷机用变螺距螺旋压缩机头
CN103644118A (zh) * 2013-12-17 2014-03-19 储继国 并联环流泵、组合环流泵、复合环流泵及其抽气机组
RU2543917C1 (ru) * 2014-03-24 2015-03-10 Общество с ограниченной ответственностью "Владимирский центр механической обработки" Двухпоточный турбомолекулярный вакуумный насос с гибридными проточными частями
JP2017020502A (ja) * 2015-07-01 2017-01-26 プファイファー・ヴァキューム・ゲーエムベーハー スプリットフロー真空ポンプ及びスプリットフロー真空ポンプを有する真空システム

Also Published As

Publication number Publication date
JPH0477160B2 (de) 1992-12-07
DE3442843A1 (de) 1985-06-05

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