JPS60116775A - 蒸着処理装置 - Google Patents

蒸着処理装置

Info

Publication number
JPS60116775A
JPS60116775A JP22497783A JP22497783A JPS60116775A JP S60116775 A JPS60116775 A JP S60116775A JP 22497783 A JP22497783 A JP 22497783A JP 22497783 A JP22497783 A JP 22497783A JP S60116775 A JPS60116775 A JP S60116775A
Authority
JP
Japan
Prior art keywords
gear
gears
planetary gears
vapor deposition
fixed gear
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP22497783A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0350833B2 (enrdf_load_stackoverflow
Inventor
Yoshikazu Sakashita
坂下　嘉和
Shunji Inamura
稲村　俊二
Kazuyuki Suganuma
菅沼　一幸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pioneer Corp
Original Assignee
Pioneer Corp
Pioneer Electronic Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pioneer Corp, Pioneer Electronic Corp filed Critical Pioneer Corp
Priority to JP22497783A priority Critical patent/JPS60116775A/ja
Publication of JPS60116775A publication Critical patent/JPS60116775A/ja
Publication of JPH0350833B2 publication Critical patent/JPH0350833B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP22497783A 1983-11-28 1983-11-28 蒸着処理装置 Granted JPS60116775A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22497783A JPS60116775A (ja) 1983-11-28 1983-11-28 蒸着処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22497783A JPS60116775A (ja) 1983-11-28 1983-11-28 蒸着処理装置

Publications (2)

Publication Number Publication Date
JPS60116775A true JPS60116775A (ja) 1985-06-24
JPH0350833B2 JPH0350833B2 (enrdf_load_stackoverflow) 1991-08-02

Family

ID=16822164

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22497783A Granted JPS60116775A (ja) 1983-11-28 1983-11-28 蒸着処理装置

Country Status (1)

Country Link
JP (1) JPS60116775A (enrdf_load_stackoverflow)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105051247A (zh) * 2013-03-19 2015-11-11 株式会社神户制钢所 Pvd处理装置以及pvd处理方法
US20170301502A1 (en) * 2012-08-09 2017-10-19 Vactronix Scientific, Llc Inverted cylindrical magnetron (icm) system and methods of use
US10968527B2 (en) 2015-11-12 2021-04-06 California Institute Of Technology Method for embedding inserts, fasteners and features into metal core truss panels
US11155907B2 (en) 2013-04-12 2021-10-26 California Institute Of Technology Systems and methods for shaping sheet materials that include metallic glass-based materials
US11168776B2 (en) 2015-03-05 2021-11-09 California Institute Of Technology Systems and methods for implementing tailored metallic glass-based strain wave gears and strain wave gear components
US11773475B2 (en) 2017-06-02 2023-10-03 California Institute Of Technology High toughness metallic glass-based composites for additive manufacturing
US11839927B2 (en) 2017-03-10 2023-12-12 California Institute Of Technology Methods for fabricating strain wave gear flexsplines using metal additive manufacturing
US11905578B2 (en) 2017-05-24 2024-02-20 California Institute Of Technology Hypoeutectic amorphous metal-based materials for additive manufacturing
US11920668B2 (en) 2012-06-26 2024-03-05 California Institute Of Technology Systems and methods for implementing bulk metallic glass-based macroscale gears

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57207570A (en) * 1981-06-12 1982-12-20 Matsushita Electric Works Ltd Article holding jig

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57207570A (en) * 1981-06-12 1982-12-20 Matsushita Electric Works Ltd Article holding jig

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11920668B2 (en) 2012-06-26 2024-03-05 California Institute Of Technology Systems and methods for implementing bulk metallic glass-based macroscale gears
US20170301502A1 (en) * 2012-08-09 2017-10-19 Vactronix Scientific, Llc Inverted cylindrical magnetron (icm) system and methods of use
US11004644B2 (en) * 2012-08-09 2021-05-11 Vactronix Scientific, Llc Inverted cylindrical magnetron (ICM) system and methods of use
CN105051247A (zh) * 2013-03-19 2015-11-11 株式会社神户制钢所 Pvd处理装置以及pvd处理方法
US11155907B2 (en) 2013-04-12 2021-10-26 California Institute Of Technology Systems and methods for shaping sheet materials that include metallic glass-based materials
US11168776B2 (en) 2015-03-05 2021-11-09 California Institute Of Technology Systems and methods for implementing tailored metallic glass-based strain wave gears and strain wave gear components
US10968527B2 (en) 2015-11-12 2021-04-06 California Institute Of Technology Method for embedding inserts, fasteners and features into metal core truss panels
US11753734B2 (en) 2015-11-12 2023-09-12 California Institute Of Technology Method for embedding inserts, fasteners and features into metal core truss panels
US11839927B2 (en) 2017-03-10 2023-12-12 California Institute Of Technology Methods for fabricating strain wave gear flexsplines using metal additive manufacturing
US11905578B2 (en) 2017-05-24 2024-02-20 California Institute Of Technology Hypoeutectic amorphous metal-based materials for additive manufacturing
US11773475B2 (en) 2017-06-02 2023-10-03 California Institute Of Technology High toughness metallic glass-based composites for additive manufacturing

Also Published As

Publication number Publication date
JPH0350833B2 (enrdf_load_stackoverflow) 1991-08-02

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