JPS60116773A - イオンプレ−ティング装置 - Google Patents
イオンプレ−ティング装置Info
- Publication number
- JPS60116773A JPS60116773A JP22578583A JP22578583A JPS60116773A JP S60116773 A JPS60116773 A JP S60116773A JP 22578583 A JP22578583 A JP 22578583A JP 22578583 A JP22578583 A JP 22578583A JP S60116773 A JPS60116773 A JP S60116773A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- high molecular
- sheet
- coil
- evaporated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007733 ion plating Methods 0.000 title abstract description 3
- 239000000758 substrate Substances 0.000 claims abstract description 12
- 239000000126 substance Substances 0.000 claims abstract description 7
- 229920000642 polymer Polymers 0.000 claims description 9
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 abstract description 6
- 230000005294 ferromagnetic effect Effects 0.000 abstract description 5
- 239000010409 thin film Substances 0.000 abstract description 5
- 230000005291 magnetic effect Effects 0.000 abstract description 4
- 239000000463 material Substances 0.000 abstract description 4
- 229910052742 iron Inorganic materials 0.000 abstract description 3
- 230000001050 lubricating effect Effects 0.000 abstract description 2
- 229920000728 polyester Polymers 0.000 abstract description 2
- 238000000151 deposition Methods 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 abstract 1
- 239000002052 molecular layer Substances 0.000 abstract 1
- 230000001681 protective effect Effects 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 9
- 150000002500 ions Chemical class 0.000 description 5
- -1 polytetrafluoroethylene Polymers 0.000 description 4
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910017052 cobalt Inorganic materials 0.000 description 2
- 239000010941 cobalt Substances 0.000 description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- 101100313164 Caenorhabditis elegans sea-1 gene Proteins 0.000 description 1
- 229930182556 Polyacetal Natural products 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 229920000265 Polyparaphenylene Polymers 0.000 description 1
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- HCDGVLDPFQMKDK-UHFFFAOYSA-N hexafluoropropylene Chemical group FC(F)=C(F)C(F)(F)F HCDGVLDPFQMKDK-UHFFFAOYSA-N 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 229920006324 polyoxymethylene Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 229920002620 polyvinyl fluoride Polymers 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/12—Organic material
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22578583A JPS60116773A (ja) | 1983-11-30 | 1983-11-30 | イオンプレ−ティング装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22578583A JPS60116773A (ja) | 1983-11-30 | 1983-11-30 | イオンプレ−ティング装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60116773A true JPS60116773A (ja) | 1985-06-24 |
| JPH0379435B2 JPH0379435B2 (enExample) | 1991-12-18 |
Family
ID=16834738
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22578583A Granted JPS60116773A (ja) | 1983-11-30 | 1983-11-30 | イオンプレ−ティング装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60116773A (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6357768A (ja) * | 1986-03-12 | 1988-03-12 | Toobi:Kk | 高速移動フイルムの連続的イオンプレ−テイング装置 |
| JP2007274185A (ja) * | 2006-03-30 | 2007-10-18 | Matsushita Electric Works Ltd | タイムスイッチ |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57134558A (en) * | 1981-02-16 | 1982-08-19 | Fuji Photo Film Co Ltd | Production of organic vapor deposited thin film |
| JPS59153881A (ja) * | 1983-02-18 | 1984-09-01 | Hitachi Ltd | 皮膜形成装置 |
-
1983
- 1983-11-30 JP JP22578583A patent/JPS60116773A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57134558A (en) * | 1981-02-16 | 1982-08-19 | Fuji Photo Film Co Ltd | Production of organic vapor deposited thin film |
| JPS59153881A (ja) * | 1983-02-18 | 1984-09-01 | Hitachi Ltd | 皮膜形成装置 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6357768A (ja) * | 1986-03-12 | 1988-03-12 | Toobi:Kk | 高速移動フイルムの連続的イオンプレ−テイング装置 |
| JP2007274185A (ja) * | 2006-03-30 | 2007-10-18 | Matsushita Electric Works Ltd | タイムスイッチ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0379435B2 (enExample) | 1991-12-18 |
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